Patents by Inventor Otto Cornelis Jonkers

Otto Cornelis Jonkers has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inspection system for process devices for treating substrates, sensor intended for such inspection system, and method for inspecting process devices
    Publication number: 20020148307
    Abstract: The invention relates to an inspection system for process equipment for treating substrates, such as, for instance, semiconductor wafers or flat panel displays. The system is provided with a wireless sensor with which the interior of the process device can be inspected. The sensor is provided with a transmitter to transfer a signal, during inspection of the interior of the process device, to a receiver disposed outside the process device. The wireless sensor is arranged on a support having substantially the same dimensions as the substrates to be treated.
    Type: Application
    Filed: March 14, 2002
    Publication date: October 17, 2002
    Inventor: Otto Cornelis Jonkers