Patents by Inventor Otto Cornelius Jonkers

Otto Cornelius Jonkers has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inspection system for process devices for treating substrates, sensor intended for such inspection system, and method for inspecting process devices
    Patent number: 6734027
    Abstract: The invention relates to an inspection system for process equipment for treating substrates, such as, for instance, semiconductor wafers or flat panel displays. The system is provided with a wireless sensor with which the interior of the process device can be inspected. The sensor is provided with a transmitter to transfer a signal, during inspection of the interior of the process device, to a receiver disposed outside the process device. The wireless sensor is arranged on a support having substantially the same dimensions as the substrates to be treated.
    Type: Grant
    Filed: March 14, 2002
    Date of Patent: May 11, 2004
    Assignee: ASM International, N.V.
    Inventor: Otto Cornelius Jonkers