Patents by Inventor Otto Hahnemann

Otto Hahnemann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical system of an illumination device of a projection exposure apparatus
    Patent number: 8068279
    Abstract: The disclosure relates to an optical system of an illumination device of a microlithographic projection exposure apparatus, including at least one first light-conductance-increasing element having a plurality of diffractively or refractively beam-deflecting structures extending in a common first preferred direction the light-conductance-increasing element having an optically uniaxial crystal material in such a way that the optical crystal axis of the crystal material is substantially parallel or substantially perpendicular to the first preferred direction.
    Type: Grant
    Filed: March 13, 2007
    Date of Patent: November 29, 2011
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Karl-Heinz Schuster, Juergen Hartmaier, Manfred Maul, Dieter Schmerek, Detlev Mueller, Otto Hahnemann, Frank Marianek, Gundula Weiss, Damian Fiolka
  • OPTICAL SYSTEM OF AN ILLUMINATION DEVICE OF A PROJECTION EXPOSURE APPARATUS
    Publication number: 20070217013
    Abstract: The disclosure relates to an optical system of an illumination device of a microlithographic projection exposure apparatus, comprising at least one first light-conductance-increasing element having a plurality of diffractively or refractively beam-deflecting structures extending in a common first preferred direction the light-conductance-increasing element having an optically uniaxial crystal material in such a way that the optical crystal axis of the crystal material is substantially parallel or substantially perpendicular to the first preferred direction.
    Type: Application
    Filed: March 13, 2007
    Publication date: September 20, 2007
    Inventors: Karl-Heinz Schuster, Juergen Hartmaier, Manfred Maul, Dieter Schmerek, Detlev Mueller, Otto Hahnemann, Frank Marianek, Gundula Weiss, Damian Fiolka