Patents by Inventor Otto Luedke

Otto Luedke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for polishing a semiconductor substrate
    Patent number: 5643405
    Abstract: An improved method for polishing a semiconductor substrate includes forming a protective layer (21) on one major surface (24) of a substrate (19) to form a protected side and polishing an unprotected surface (26) of the substrate (19) with a double sided polisher (11). During the polishing process, material from the unprotected side (26) is removed at a faster rate than material from the protected side. The method provides a single side polished substrate (19) with improved flatness characteristics. In an additional embodiment, polishing pads (13,23) having different surface contact characteristics are used to support process automation.
    Type: Grant
    Filed: July 31, 1995
    Date of Patent: July 1, 1997
    Assignee: Motorola, Inc.
    Inventors: Fernando A. Bello, James B. Hall, Otto Luedke, Earl W. O'Neal