Patents by Inventor P. C. Jann

P. C. Jann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5131755
    Abstract: In each configuration, at least one TDI sensor is used to image substrate portions of interest, with those portions illuminated with substantially uniform illumination. In one configuration, a substrate is compared to prestored expected characteristic features. In a second configuration, first and second patterns in a region of the surface of at least one substrate are inspected by comparing one pattern against the other and noting whether they agree with each other. This is accomplished by illuminating the two patterns, imaging the first pattern and storing its characteristics in a temporary memory, then imaging the second pattern and comparing it to the stored characteristics from the temporary memory. Then the comparisons continue sequentially with the second pattern becoming the first pattern in the next imaging/comparison sequence against a new second pattern.
    Type: Grant
    Filed: October 31, 1989
    Date of Patent: July 21, 1992
    Inventors: Curt H. Chadwick, Robert R. Sholes, John D. Greene, Francis D. Tucker, III, Michael E. Fein, P. C. Jann, David J. Harvey, William Bell
  • Patent number: 5085517
    Abstract: In each configuration, at least one TDI sensor is used to image the portions of interest of the substrate that are substantially uniformly or critically illuminated. In one configuration, the substrate is compared to the expected characteristic features prestored in memory. In a second configuration, a first and second pattern in a region of at least one substrate are inspected by comparing one pattern against the other and noting whether they agree with each other. This is accomplished by illuminating the two patterns, imaging the first pattern and storing its characteristics in a temporary memory, then imaging the second pattern and comparing it to the stored characteristics from the temporary memory. Then the comparisons continue sequentially with the second pattern becoming the first pattern in the next imaging/comparison sequence against a new second pattern. With each comparison whether there has been agreement between the two patterns is noted.
    Type: Grant
    Filed: October 31, 1989
    Date of Patent: February 4, 1992
    Inventors: Curt H. Chadwick, Robert R. Sholes, John D. Greene, Francis D. Tucker, III, Michael E. Fein, P. C. Jann, David J. Harney, William Bell, Bin-Ming B. Isai, Walter I. Novak, Mark J. Wihl
  • Patent number: 4877326
    Abstract: Substrate inspection apparatus and methods, and illumination apparatus. The inspection apparatus and method includes memory for storing the desired features of the surface of the substrate, focussed illuminator for substantially uniformly illuminating a region of the surface of the substrate to be inspected. Additionally there is a sensor for imaging the region of the substrate illuminated by the illuminator, and a comparator responsive to the memory and sensor for comparing the imaged region of the substrate with the stored desired features of the substrate. The illumination apparatus is designed to provide substantially uniform focussed illumination along a narrow linear region. This apparatus includes first, second and third reflectors elliptically cylindrical in shape, each with its long axis substantially parallel to the long axes of each of the others.
    Type: Grant
    Filed: February 19, 1988
    Date of Patent: October 31, 1989
    Assignee: KLA Instruments Corporation
    Inventors: Curt H. Chadwick, Robert R. Sholes, John D. Greene, Francis D. Tucker, III, Michael E. Fein, P. C. Jann, David J. Harvey, William Bell
  • Patent number: RE37740
    Abstract: Substrate inspection apparatus and methods, and illumination apparatus. The inspection apparatus and method includes memory for storing the desired features of the surface of the substrate, focussed illuminator for substantially uniformly illuminating a region of the surface of the substrate to be inspected. Additionally there is a sensor for imaging the region of the substrate illuminated by the illuminator, and a comparator responsive to the memory and sensor for comparing the imaged region of the substrate with the stored desired features of the substrate. The illumination apparatus is designed to provide substantially uniform focussed illumination along a narrow linear region. This apparatus includes first, second and third reflectors elliptically cylindrical in shape, each with its long axis substantially parallel to the long axes of each of the others.
    Type: Grant
    Filed: January 17, 1995
    Date of Patent: June 11, 2002
    Assignee: KLA-Tencor Corporation
    Inventors: Curt H. Chadwick, Robert R. Sholes, John D. Greene, Francis D. Tucker, III, Michael E. Fein, P. C. Jann, David J. Harvey, William Bell