Patents by Inventor P. Sudharshan Phani

P. Sudharshan Phani has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for two dimensional nanoindentation
    Patent number: 10996152
    Abstract: A two-dimensional nanoindentation measurement apparatus includes a first actuator that imparts a first force in a first direction, and a second actuator that imparts a second force in a second direction orthogonal to the first direction. A first elongate member has a first end attached to the first actuator and a second end attached to an indenter tip that engages the surface of the sample. A second elongate member includes a first end attached to the second actuator and a second end connected to the second end of the first elongate member. The first elongate member is rigid in the first direction and compliant in the second direction, and the second elongate member is rigid in the second direction and compliant in the first direction. The first force is imparted to the indenter tip in the first direction through the first elongate member, and the second force is imparted to the indenter tip in the second direction through the second elongate member.
    Type: Grant
    Filed: January 14, 2019
    Date of Patent: May 4, 2021
    Assignee: KLA-Tencor Corporation
    Inventors: Warren C. Oliver, Kermit H. Parks, Kurt Johanns, P. Sudharshan Phani, John B. Pethica
  • Apparatus and Method for Two Dimensional Nanoindentation
    Publication number: 20190226960
    Abstract: A two-dimensional nanoindentation measurement apparatus includes a first actuator that imparts a first force in a first direction, and a second actuator that imparts a second force in a second direction orthogonal to the first direction. A first elongate member has a first end attached to the first actuator and a second end attached to an indenter tip that engages the surface of the sample. A second elongate member includes a first end attached to the second actuator and a second end connected to the second end of the first elongate member. The first elongate member is rigid in the first direction and compliant in the second direction, and the second elongate member is rigid in the second direction and compliant in the first direction. The first force is imparted to the indenter tip in the first direction through the first elongate member, and the second force is imparted to the indenter tip in the second direction through the second elongate member.
    Type: Application
    Filed: January 14, 2019
    Publication date: July 25, 2019
    Applicant: KLA-Tencor Corporation
    Inventors: Warren C. Oliver, Kermit H. Parks, Kurt Johanns, P. Sudharshan Phani, John B. Pethica