Patents by Inventor P. V. Patel

P. V. Patel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5839870
    Abstract: An apparatus for preventing the cross contamination of heating element within horizontal furnaces is disclosed. A rotating spindle may connect to either or both of the lifting arm of a triaxial loader or the transfer plate of a loading station. A pair of spindles are able to lift a single wafer boat. Each spindle includes a plurality of active positions with one active position associated with each heating element of the horizontal furnace. A control processor monitors the position of the spindle and rotates the spindle to the active position associated with a heating element when a loading or unloading process is initiated for that heating element.
    Type: Grant
    Filed: March 13, 1996
    Date of Patent: November 24, 1998
    Assignee: Novus Corporation
    Inventors: George E. Niemirowski, Adam F. Niemirowski, John M. Harrell, P. V. Patel