Patents by Inventor Pamanabhan Krishnaraj

Pamanabhan Krishnaraj has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chamber cleaning with fluorides of iodine
    Patent number: 6581612
    Abstract: A method of cleaning a semiconductor processing chamber uses as a cleaning gas precursor an iodine fluoride such as IF5 and IF7. Reactive species are generated from the precursor with help of plasma. These reactive species are further used to clean the processing chamber.
    Type: Grant
    Filed: April 17, 2001
    Date of Patent: June 24, 2003
    Assignee: Applied Materials Inc.
    Inventors: Peter Loewenhardt, Shamouil Shamouilian, Pavel Ionov, Pamanabhan Krishnaraj