Patents by Inventor Panda Durga

Panda Durga has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of manufacturing sidewall spacers on a memory device
    Patent number: 8890214
    Abstract: The present invention relates to a method of manufacturing sidewall spacers on a memory device. The method comprises forming sidewall spacers on a memory device having a memory array region and at least one peripheral circuit region by forming a first sidewall spacer adjacent to a word line in the memory array region and a second sidewall spacer adjacent to a transistor in the peripheral circuit region. The first sidewall spacer has a first thickness and the second sidewall spacer has a second thickness, wherein the second thickness is greater than the first thickness.
    Type: Grant
    Filed: December 22, 2011
    Date of Patent: November 18, 2014
    Assignee: Nan Ya Technology Corporation
    Inventors: Panda Durga, Jaydip Guha, Robert Kerr
  • METHOD OF MANUFACTURING SIDEWALL SPACERS ON A MEMORY DEVICE
    Publication number: 20130161700
    Abstract: The present invention relates to a method of manufacturing sidewall spacers on a memory device. The method comprises forming sidewall spacers on a memory device having a memory array region and at least one peripheral circuit region by forming a first sidewall spacer adjacent to a word line in the memory array region and a second sidewall spacer adjacent to a transistor in the peripheral circuit region. The first sidewall spacer has a first thickness and the second sidewall spacer has a second thickness, wherein the second thickness is greater than the first thickness.
    Type: Application
    Filed: December 22, 2011
    Publication date: June 27, 2013
    Applicant: Nan Ya Technology Corporation
    Inventors: Panda Durga, Jaydip Guha, Robert Kerr