Patents by Inventor Pandu Maddherla

Pandu Maddherla has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • LOAD LOCK BODY PORTIONS, LOAD LOCK APPARATUS, AND METHODS FOR MANUFACTURING THE SAME
    Publication number: 20200126826
    Abstract: A load lock apparatus may include a body portion including one or more surfaces. A first groove may extend into and along a first surface of the one or more surfaces. A first tube may be received in the first groove, wherein the first tube may be configured to transport a liquid (e.g., to thermally control the body portion). Other apparatus and methods of manufacturing load lock apparatus in accordance with these and other embodiments are disclosed.
    Type: Application
    Filed: October 18, 2018
    Publication date: April 23, 2020
    Inventors: Ram Dayal Malviya, Travis Morey, Theodossios V. Costuros, Michael C. Kuchar, Pandu Maddherla, Richard Giljum, Edward Ng
  • Flexible equipment front end module interfaces, environmentally-controlled equipment front end modules, and assembly methods
    Patent number: 10159169
    Abstract: An equipment front end module interface of an equipment front end module including environmental controls. The equipment front end module interface includes a first mounting member configured to couple to a load lock assembly, and a flexible seal coupled to the first mounting member. The flexible seal provides sealing between the equipment front end module and the load lock assembly and also accommodates axial and other misalignment between the load lock assembly and the equipment front end module during assembly. Equipment front end modules including the equipment front end module interface and methods of assembling a load lock assembly to the equipment front end module using the equipment front end module interface are provided, as are other aspects.
    Type: Grant
    Filed: October 27, 2016
    Date of Patent: December 18, 2018
    Assignee: Applied Materials, Inc.
    Inventors: Joseph Vincent, Michael Kuchar, Dean C. Hruzek, Vijayabaskar Soundarrajan, Pandu Maddherla, Adam J. Wyatt, Robert M. McAndrew
  • FLEXIBLE EQUIPMENT FRONT END MODULE INTERFACES, ENVIRONMENTALLY-CONTROLLED EQUIPMENT FRONT END MODULES, AND ASSEMBLY METHODS
    Publication number: 20180124960
    Abstract: An equipment front end module interface of an equipment front end module including environmental controls. The equipment front end module interface includes a first mounting member configured to couple to a load lock assembly, and a flexible seal coupled to the first mounting member. The flexible seal provides sealing between the equipment front end module and the load lock assembly and also accommodates axial and other misalignment between the load lock assembly and the equipment front end module during assembly. Equipment front end modules including the equipment front end module interface and methods of assembling a load lock assembly to the equipment front end module using the equipment front end module interface are provided, as are other aspects.
    Type: Application
    Filed: October 27, 2016
    Publication date: May 3, 2018
    Inventors: Joseph Vincent, Michael Kuchar, Dean C. Hruzek, Vijayabaskar Soundarrajan, Pandu Maddherla, Adam J. Wyatt, Robert M. McAndrew
  • Device and method for switching electrical energy
    Patent number: 8809705
    Abstract: A shutter device is provided for a bypass isolation automatic transfer switch. The shutter device comprises a frame and a shutter that is movably supported by the frame and that is configured to selectively cover and uncover conductors. At least one cam is movably supported by the frame and at least one shutter lever is interposed between the shutter and the at least one cam. The shutter lever is configured to move the shutter in response to movement of the cam.
    Type: Grant
    Filed: December 4, 2007
    Date of Patent: August 19, 2014
    Assignee: General Electric Company
    Inventors: Mark Anthony Serrano, Pandu Maddherla, Sudarshan Allada