Patents by Inventor Pang-Shiu Chen

Pang-Shiu Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9373789
    Abstract: A resistive random access memory and a method for fabricating the same are provided. The method includes forming a bottom electrode on a substrate; forming a metal oxide layer on the bottom electrode; forming an oxygen atom gettering layer on the metal oxide layer; forming a first top electrode sub-layer on the oxygen atom gettering layer; forming a second top electrode sub-layer on the first top electrode sub-layer, wherein the first top electrode sub-layer and the second top electrode sub-layer comprise a top electrode; and subjecting the metal oxide layer and the oxygen atom gettering layer to a thermal treatment, driving the oxygen atoms of the metal oxide layer to migrate into and react with the oxygen atom gettering layer, resulting in a plurality of oxygen vacancies within the metal oxide layer.
    Type: Grant
    Filed: October 22, 2014
    Date of Patent: June 21, 2016
    Assignee: Industrial Technology Research Institute
    Inventors: Heng-Yuan Lee, Pang-Shiu Chen, Tai-Yuan Wu, Ching-Chiun Wang
  • Publication number: 20150280122
    Abstract: A resistive random access memory and a method for fabricating the same are provided. The method includes providing a structure comprising a substrate, a bottom electrode disposed on the substrate, a metal oxide layer disposed on the bottom electrode, and an oxygen atom gettering layer disposed on the metal oxide layer; and subjecting the structure to a thermal treatment, driving the oxygen atoms of the metal oxide layer to migrate into and react with the oxygen atom gettering layer, resulting in a plurality of oxygen vacancies within the metal oxide layer.
    Type: Application
    Filed: June 9, 2015
    Publication date: October 1, 2015
    Inventors: Heng-Yuan LEE, Pang-Shiu CHEN, Tai-Yuan WU, Ching-Chiun WANG
  • Patent number: 9142776
    Abstract: A resistive random access memory and a method for fabricating the same are provided. The method includes forming a bottom electrode on a substrate; forming a metal oxide layer on the bottom electrode; forming an oxygen atom gettering layer on the metal oxide layer; forming a first top electrode sub-layer on the oxygen atom gettering layer; forming a second top electrode sub-layer on the first top electrode sub-layer, wherein the first top electrode sub-layer and the second top electrode sub-layer comprise a top electrode; and subjecting the metal oxide layer and the oxygen atom gettering layer to a thermal treatment, driving the oxygen atoms of the metal oxide layer to migrate into and react with the oxygen atom gettering layer, resulting in a plurality of oxygen vacancies within the metal oxide layer.
    Type: Grant
    Filed: December 20, 2012
    Date of Patent: September 22, 2015
    Assignee: Industrial Technology Research Institute
    Inventors: Heng-Yuan Lee, Pang-Shiu Chen, Tai-Yuan Wu, Ching-Chiun Wang
  • Publication number: 20150044851
    Abstract: A resistive random access memory and a method for fabricating the same are provided. The method includes forming a bottom electrode on a substrate; forming a metal oxide layer on the bottom electrode; forming an oxygen atom gettering layer on the metal oxide layer; forming a first top electrode sub-layer on the oxygen atom gettering layer; forming a second top electrode sub-layer on the first top electrode sub-layer, wherein the first top electrode sub-layer and the second top electrode sub-layer comprise a top electrode; and subjecting the metal oxide layer and the oxygen atom gettering layer to a thermal treatment, driving the oxygen atoms of the metal oxide layer to migrate into and react with the oxygen atom gettering layer, resulting in a plurality of oxygen vacancies within the metal oxide layer.
    Type: Application
    Filed: October 22, 2014
    Publication date: February 12, 2015
    Inventors: HENG-YUAN LEE, PANG-SHIU CHEN, TAI-YUAN WU, CHING-CHIUN WANG
  • Patent number: 8817521
    Abstract: A control method for at least one memory cell is disclosed. The memory cell includes a transistor and a resistor. The resistor is connected to the transistor in series between a first node and a second node. In a programming mode, the memory cell is programmed. When it is determined that the memory cell has been successfully programmed, impedance of the memory cell is in a first state. When it is determined that the memory cell has not been successfully programmed, a specific action is executed to reset the memory cell. The impedance of the memory cell is in a second state after the step resetting the memory cell. The impedance of the memory cell in the second state is higher than that of the memory cell in the first state.
    Type: Grant
    Filed: June 5, 2012
    Date of Patent: August 26, 2014
    Assignee: Industrial Technology Research Institute
    Inventors: Yu-Sheng Chen, Heng-Yuan Lee, Yen-Ya Hsu, Pang-Shiu Chen, Ching-Chih Hsu, Frederick T. Chen
  • Publication number: 20120243346
    Abstract: A control method for at least one memory cell. The memory cell includes a transistor and a resistor. The resistor is connected to the transistor in series between a first node and a second node. In a programming mode, the memory cell is programmed. When it is determined that the memory cell has been successfully programmed, impedance of the memory cell is in a first state. When it is determined that the memory cell has not been successfully programmed, a specific action is executed to reset the memory cell. The impedance of the memory cell is in a second state after the step resetting the memory cell. The impedance of the memory cell in the second state is higher than that of the memory cell in the first state.
    Type: Application
    Filed: June 5, 2012
    Publication date: September 27, 2012
    Applicant: Industrial Technology Research Institute
    Inventors: Yu-Sheng CHEN, Heng-Yuan LEE, Yen-Ya HSU, Pang-Shiu CHEN, Ching-Chih HSU, Frederick T. CHEN
  • Patent number: 8223528
    Abstract: A control method for at least one memory cell is disclosed. The memory cell includes a transistor and a resistor. The resistor is connected to the transistor between a first node and a second node. In a programming mode, the memory cell is programmed. The step of programming the memory cell includes providing a first controlling voltage to a gate of the transistor, providing a first setting voltage to the first node, and providing a second setting voltage to the second node. When it is determined that the memory cell has been successfully programmed, a specific action is executed.
    Type: Grant
    Filed: December 29, 2009
    Date of Patent: July 17, 2012
    Assignee: Industrial Technology Research Institute
    Inventors: Yu-Sheng Chen, Heng-Yuan Lee, Yen-Ya Hsu, Pang-Shiu Chen, Ching-Chih Hsu
  • Publication number: 20110122714
    Abstract: A control method for at least one memory cell is disclosed. The memory cell includes a transistor and a resistor. The resistor is connected to the transistor between a first node and a second node. In a programming mode, the memory cell is programmed. The step of programming the memory cell includes providing a first controlling voltage to a gate of the transistor, providing a first setting voltage to the first node, and providing a second setting voltage to the second node. When it is determined that the memory cell has been successfully programmed, a specific action is executed.
    Type: Application
    Filed: December 29, 2009
    Publication date: May 26, 2011
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Yu-Sheng CHEN, Heng-Yuan LEE, Yen-Ya HSU, Pang-Shiu CHEN, Ching-Chih HSU
  • Patent number: 7498224
    Abstract: A method for growing strained Si layer and relaxed SiGe layer with multiple Ge quantum dots (QDs) on a substrate is disclosed. The method can reduce threading dislocation density, decrease surface roughness of the strained silicon and further shorten growth time for forming epitaxy layers than conventional method. The method includes steps of: providing a silicon substrate, forming a multiple Ge QDs layers; forming a layer of relaxed SixGe1-x; and forming a strained silicon layer in subsequence; wherein x is greater than 0 and less than 1.
    Type: Grant
    Filed: July 20, 2006
    Date of Patent: March 3, 2009
    Assignee: Industrial Technology Research Institute
    Inventors: Pang-Shiu Chen, Sheng-Wei Lee, Lih-Juann Chen, Chee-Wee Liu
  • Patent number: 7341929
    Abstract: A method to fabricate patterned strain-relaxed SiGe epitaxial with threading dislocation density control is provided. An ion-implanting area is first defined on a silicon substrate, and then proceeds ion-implanting. Finally, a buffer layer and a SiGe epitaxial layer are deposited. According to the disclosure, an active area and a non-active area are defined through ion-implanting. Therefore, the threading dislocation occurring in the active area concentrates in the non-active area, and the density of the threading dislocation is lowered. Furthermore, the performance of the semiconductor is also enhanced.
    Type: Grant
    Filed: July 9, 2004
    Date of Patent: March 11, 2008
    Assignee: Industrial Technology Research Institute
    Inventors: Yang-Tai Tseng, Pang-Shiu Chen, Shin-Chi Lu
  • Patent number: 7202512
    Abstract: A construction of thin strain-relaxed SiGe layers and method for fabricating the same is provided. The construction includes a semiconductor substrate, a SiGe buffer layer formed on the semiconductor substrate, a Si(C) layer formed on the SiGe buffer layer, and an relaxed SiGe epitaxial layer formed on the Si(C) layer. The Si(C) layer is employed to change the strain-relaxed mechanism of the relaxed SiGe epitaxial layer formed on the Si(C) layer. Therefore, a thin relaxed SiGe epitaxial layer with low threading dislocation density, smooth surface is available. The fabricating time for fabricating the strain-relaxed SiGe layers is greatly reduced and the surface roughness is also improved.
    Type: Grant
    Filed: August 11, 2004
    Date of Patent: April 10, 2007
    Assignee: Industrial Technology Research Institute
    Inventors: Pang-Shiu Chen, Sheng-Wei Lee, Kao-Feng Liao, Lih-Juann Chen, Chee-Wee Liu
  • Publication number: 20060255331
    Abstract: A method for growing strained Si layer and relaxed SiGe layer with multiple Ge quantum dots (QDs) on a substrate is disclosed. The method can reduce threading dislocation density, decrease surface roughness of the strained silicon and further shorten growth time for forming epitaxy layers than conventional method. The method includes steps of: providing a silicon substrate, forming a multiple Ge QDs layers; forming a layer of relaxed SixGe1-x; and forming a strained silicon layer in subsequence; wherein x is greater than 0 and less than 1.
    Type: Application
    Filed: July 20, 2006
    Publication date: November 16, 2006
    Applicant: Industrial Technology Research Institute
    Inventors: Pang-Shiu Chen, Sheng-Wei Lee, Lih-Juann Chen, Chee-Wee Liu
  • Patent number: 7102153
    Abstract: A method for growing strained Si layer and relaxed SiGe layer with multiple Ge quantum dots (QDs) on a substrate is disclosed. The method can reduce threading dislocation density, decrease surface roughness of the strained silicon and further shorten growth time for forming epitaxy layers than conventional method. The method includes steps of: providing a silicon substrate, forming a multiple Ge QDs layers; forming a layer of relaxed SixGe1-x; and forming a strained silicon layer in subsequence; wherein x is greater than 0 and less than 1.
    Type: Grant
    Filed: August 17, 2004
    Date of Patent: September 5, 2006
    Assignee: Industrial Technology Research Institute
    Inventors: Pang-Shiu Chen, Sheng-Wei Lee, Lih-Juann Chen, Chee-Wee Liu
  • Publication number: 20050179028
    Abstract: A construction of thin strain-relaxed SiGe layers and method for fabricating the same is provided. The construction includes a semiconductor substrate, a SiGe buffer layer formed on the semiconductor substrate, a Si(C) layer formed on the SiGe buffer layer, and an relaxed SiGe epitaxial layer formed on the Si(C) layer. The Si(C) layer is employed to change the strain-relaxed mechanism of the relaxed SiGe epitaxial layer formed on the Si(C) layer. Therefore, a thin relaxed SiGe epitaxial layer with low threading dislocation density, smooth surface is available. The fabricating time for fabricating the strain-relaxed SiGe layers is greatly reduced and the surface roughness is also improved.
    Type: Application
    Filed: August 11, 2004
    Publication date: August 18, 2005
    Inventors: Pang-Shiu Chen, Sheng-Wei Lee, Kao-Feng Liao, Lih-Juann Chen, Chee-Wee Liu
  • Publication number: 20050176217
    Abstract: A method to fabricate patterned strain-relaxed SiGe epitaxial with threading dislocation density control is provided. An ion-implanting area is first defined on a silicon substrate, and then proceeds ion-implanting. Finally, a buffer layer and a SiGe epitaxial layer are deposited. According to the disclosure, an active area and a non-active area are defined through ion-implanting. Therefore, the threading dislocation occurring in the active area concentrates in the non-active area, and the density of the threading dislocation is lowered. Furthermore, the performance of the semiconductor is also enhanced.
    Type: Application
    Filed: July 9, 2004
    Publication date: August 11, 2005
    Inventors: Yang-Tai Tseng, Pang-Shiu Chen, Shin-Chi Lu
  • Publication number: 20050153491
    Abstract: A process of forming a low-strain crystal layer having low cell dislocation, low surface roughness and low thickness comprises: forming at least one crystal layer on a substrate; patterning the crystal layer by exposure and development to form an ion-doping region; doping ions in the ion-doping region of the crystal layer to convert the crystal layer to an amorphous layer; performing a planarization process on the amorphous layer; and annealing the amorphous layer to convert the amorphous layer to a low-strain crystal layer.
    Type: Application
    Filed: May 5, 2004
    Publication date: July 14, 2005
    Inventors: Yang-Tai Tseng, Pang-Shiu Chen, Chee-Wee Liu
  • Patent number: 6916674
    Abstract: The present invention discloses a method for fabricating multiple-thickness insulator layers via strain field generated by stress. The strain field is used for alternating a develop mechanism of insulator layers on the quantum dots. By forming the multiple-thickness insulator layers at various developing rates, not only leakage current is prevented, but also components are kept isolated in the nano-electronics components. In nano-electronics manufacturing, the method for fabricating multiple-thickness insulator layers results in both better product reliability and the yield rate. It is potential for integral circuit manufacturing.
    Type: Grant
    Filed: November 12, 2003
    Date of Patent: July 12, 2005
    Assignee: Industrial Technology Research Institute
    Inventors: Pang-Shiu Chen, Buo-Chin Hsu, Chee-Wee Liu
  • Publication number: 20040152225
    Abstract: The present invention discloses a method for fabricating multiple-thickness insulator layers via strain field generated by stress. The strain field is used for alternating a develop mechanism of insulator layers on the quantum dots. By forming the multiple-thickness insulator layers at various developing rates, not only leakage current is prevented, but also components are kept isolated in the nano-electronics components. In nano-electronics manufacturing, the method for fabricating multiple-thickness insulator layers results in both better product reliability and the yield rate. It is potential for integral circuit manufacturing.
    Type: Application
    Filed: November 12, 2003
    Publication date: August 5, 2004
    Applicant: Industrial Technology Research Institute
    Inventors: Pang-Shiu Chen, Buo-Chin Hsu, Chee-Wee Liu
  • Publication number: 20040087097
    Abstract: A manufacture method of a semiconductor device, and more particularly to the manufacture method of a silicon/silicon-germanium heterogeneous bipolar transistor (HBT) device with ultra-thin base, which mainly utilized the method of doping carbon atoms in the silicon-germanium (SiGe) spacer layer in order to suppress the out-diffusion of boron, increase the amount of doped boron in base, germanium (Ge) concentration, and critical thickness, and decrease the thickness of silicon-germanium spacer layer, and achieve the objective of raising the device's high frequency property.
    Type: Application
    Filed: April 28, 2003
    Publication date: May 6, 2004
    Applicant: Industrial Technology Research Institute
    Inventors: Li-Shyue Lai, Pang-Shiu Chen, Shin-Chii Lu, Chee-Wee Liu