Patents by Inventor Pankaj Ghanshyam Ramnani

Pankaj Ghanshyam Ramnani has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • INTEGRATION OF FULLY ALIGNED VIA THROUGH SELECTIVE DEPOSITION AND RESISTIVITY REDUCTION
    Publication number: 20240030062
    Abstract: Methods and apparatuses for an integration scheme for forming a fully aligned via using selective deposition of graphene on metal surfaces and selective deposition of an inhibitor layer on exposed barrier surfaces prior to depositing dielectric material are provided.
    Type: Application
    Filed: April 15, 2022
    Publication date: January 25, 2024
    Inventors: Dennis M. Hausmann, Pankaj Ghanshyam Ramnani, Kashish Sharma, Paul C. Lemaire, Arpan Pravin Mahorowala
  • FACELESS SHOWERHEAD
    Publication number: 20230366089
    Abstract: In some examples, a faceless showerhead comprises a body including a backing plate, the body devoid of a faceplate or plenum; a gas supply stem to admit gas into the showerhead; and a baffle supported adjacent the backing plate or the gas supply stem. The faceless showerhead may further comprise at least one support element for supporting the baffle in a baffle cavity in the backing plate or the gas supply stem.
    Type: Application
    Filed: October 8, 2021
    Publication date: November 16, 2023
    Inventors: Shriram Vasant Bapat, Pankaj Ghanshyam Ramnani, Brian Joseph Williams, Christopher Matthew Jones, Curtis W. Bailey, Emile Draper, Nagraj Shankar