Abstract: An electronic memory device with a high density of non-volatile memory cells has a reduced capacitance cell-to-cell interference. The memory cells are integrated on a semiconductor substrate and are organized in a matrix of cells with word lines and bit lines connected to the cells. Each memory cell includes at least one floating gate transistor having a floating gate region projecting from the substrate, and a control gate region capacitively coupled to the floating gate region. Between the cells of opposite word lines, a lateral coating is provided that includes at least one conductive layer floating along the direction of the bit lines.

Abstract: A process for manufacturing a MOS device is described. The process comprising: providing a body of semiconductor material having a surface; forming a stack on the surface of the body, the stack including a first polysilicon region, an intermediate dielectric region arranged on top of the first polysilicon region, and a second polysilicon region arranged on top of the intermediate dielectric region; depositing a passivation layer on top of and laterally to the stack; and forming at least one electrical connection region in direct electrical contact with the first and second polysilicon regions, wherein the electrical connection region is formed laterally with respect to both the first and second polysilicon regions.

Abstract: A process for manufacturing a dual charge storage location electrically programmable memory cell that includes the steps of forming a central insulated gate over a semiconductor substrate; forming physically separated charge-confining layers stack portions of a dielectric-charge trapping material-dielectric layers stack at the sides of the central gate, the charge trapping material layer in each charge-confining layers stack portion forming a charge storage element; forming side control gates over each of the charge-confining layers stack portions; forming memory cell source/drain regions laterally to the side control gates; and electrically connecting the side control gates to the central gate. Each of the charge-confining layers stack portions at the sides of the central gate is formed with an “L” shape, with a base charge-confining layers stack portion lying on the substrate surface and an upright charge-confining layers stack portion lying against a respective side of the insulated gate.

Abstract: A MOS device has: a semiconductor body defining a surface; a stack on top of the semiconductor body; and a passivation layer on top of the semiconductor body and covering the stack. The stack is formed by a first polysilicon region and by a second polysilicon region arranged on top of one another and separated by an intermediate dielectric region. An electrical connection region extends through the passivation layer as far as the surface of the semiconductor body laterally with respect to, and in contact with, the first and the second polysilicon regions so as to contact them electrically.

Abstract: An electronic memory device with a high density of non-volatile memory cells has a reduced capacitance cell-to-cell interference. The memory cells are integrated on a semiconductor substrate and are organized in a matrix of cells with word lines and bit lines connected to the cells. Each memory cell includes at least one floating gate transistor having a floating gate region projecting from the substrate, and a control gate region capacitively coupled to the floating gate region. Between the cells of opposite word lines, a lateral coating is provided that includes at least one conductive layer floating along the direction of the bit lines.

Abstract: An MOS device has a stack and a passivation layer covering the stack. The stack is formed by a first polysilicon region and by a second polysilicon region arranged on top of one another and separated by an intermediate dielectric region. An electrical connection region, formed by a column structure substantially free of steps, extends through the passivation layer, the second polysilicon region and the intermediate dielectric region, and terminates in contact with the first polysilicon region so as to electrically contacting the first polysilicon region and the second polysilicon region. Fabrication of the electrical connection region requires just one mask.

Abstract: A MOS device has: a semiconductor body defining a surface; a stack on top of the semiconductor body; and a passivation layer on top of the semiconductor body and covering the stack. The stack is formed by a first polysilicon region and by a second polysilicon region arranged on top of one another and separated by an intermediate dielectric region. An electrical connection region extends through the passivation layer as far as the surface of the semiconductor body laterally with respect to, and in contact with, the first and the second polysilicon regions so as to contact them electrically.

Abstract: A process for manufacturing a dual charge storage location electrically programmable memory cell that includes the steps of forming a central insulated gate over a semiconductor substrate; forming physically separated charge-confining layers stack portions of a dielectric-charge trapping material-dielectric layers stack at the sides of the central gate, the charge trapping material layer in each charge-confining layers stack portion forming a charge storage element; forming side control gates over each of the charge-confining layers stack portions; forming memory cell source/drain regions laterally to the side control gates; and electrically connecting the side control gates to the central gate. Each of the charge-confining layers stack portions at the sides of the central gate is formed with an “L” shape, with a base charge-confining layers stack portion lying on the substrate surface and an upright charge-confining layers stack portion lying against a respective side of the insulated gate.

Abstract: A process for manufacturing a dual charge storage location electrically programmable memory cell that includes the steps of forming a central insulated gate over a semiconductor substrate; forming physically separated charge-confining layers stack portions of a dielectric-charge trapping material-dielectric layers stack at the sides of the central gate, the charge trapping material layer in each charge-confining layers stack portion forming a charge storage element; forming side control gates over each of the charge-confining layers stack portions; forming memory cell source/drain regions laterally to the side control gates; and electrically connecting the side control gates to the central gate. Each of the charge-confining layers stack portions at the sides of the central gate is formed with an “L” shape, with a base charge-confining layers stack portion lying on the substrate surface and an upright charge-confining layers stack portion lying against a respective side of the insulated gate.

Abstract: An MOS device has a stack and a passivation layer covering the stack. The stack is formed by a first polysilicon region and by a second polysilicon region arranged on top of one another and separated by an intermediate dielectric region. An electrical connection region, formed by a column structure substantially free of steps, extends through the passivation layer, the second polysilicon region and the intermediate dielectric region, and terminates in contact with the first polysilicon region so as to electrically contacting the first polysilicon region and the second polysilicon region. Fabrication of the electrical connection region requires just one mask.

Abstract: A transistor includes a substrate region (14) of a first type (P) of conductivity in a semiconductor material layer of the same type (P) of conductivity, at least a first contact region (13) of the first type (P+) of conductivity inside the substrate region (14) and adjacent to a first terminal (C) of the transistor, a well (11) of second type (N) of conductivity placed inside the substrate region (14), wherein the well (11) of second type (N) of conductivity includes at least a second contact region (12) of a second type of conductivity (N+) adjacent to a region of a second terminal (B) of the transistor, and a plurality of third contact regions (10) of the first type of conductivity (P+) adjacent to a plurality of regions of a third terminal (E1, . . . , E3) of the transistor interposed each one (10) and other (12) by proper insulating shapes (20).

Abstract: A process for manufacturing a dual charge storage location electrically programmable memory cell that includes the steps of forming a central insulated gate over a semiconductor substrate; forming physically separated charge-confining layers stack portions of a dielectric-charge trapping material-dielectric layers stack at the sides of the central gate, the charge trapping material layer in each charge-confining layers stack portion forming a charge storage element; forming side control gates over each of the charge-confining layers stack portions; forming memory cell source/drain regions laterally to the side control gates; and electrically connecting the side control gates to the central gate. Each of the charge-confining layers stack portions at the sides of the central gate is formed with an “L” shape, with a base charge-confining layers stack portion lying on the substrate surface and an upright charge-confining layers stack portion lying against a respective side of the insulated gate.

Abstract: A transistor includes a substrate region (14) of a first type (P) of conductivity in a semiconductor material layer of the same type (P) of conductivity, at least a first contact region (13) of the first type (P+) of conductivity inside the substrate region (14) and adjacent to a first terminal (C) of the transistor, a well (11) of second type (N) of conductivity placed inside the substrate region (14), wherein the well (11) of second type (N) of conductivity includes at least a second contact region (12) of a second type of conductivity (N+) adjacent to a region of a second terminal (B) of the transistor, and a plurality of third contact regions (10) of the first type of conductivity (P+) adjacent to a plurality of regions of a third terminal (E1, . . . , E3) of the transistor interposed each one (10) and other (12) by proper insulating shapes (20).

Abstract: A process for manufacturing electronic semiconductor integrated memory devices having a virtual ground and comprising at least a matrix of floating gate memory cells is presented. In the memory device, the matrix is formed on a semiconductor substrate with a number of continuous bit lines extending across the substrate as discrete parallel strips. The process begins by growing an oxide layer over the matrix region and depositing over the semiconductor throughout a stack structure which comprises a first conductor layer, a first dielectric layer, and a second conductor layer. Then a second dielectric layer is deposited over the stack structure, and floating gate regions are defined by photolithography using a mask of “POLY1 along a first direction”, to thereby define in the dielectric layer, a plurality of parallel strips which delimit a first dimension of floating gate regions.

Abstract: A method for autoaligning lines of a conductive material in circuits integrated on a semiconductor substrate is presented. The method includes forming several regions projecting from the substrate surface and aligned to one another, and forming a fill layer in the gaps between the projecting regions. The fill layer is planarized to expose the regions, and a portion of the regions is removed to form holes at the locations of the regions. Next an insulating layer is formed in the holes. The insulating layer is selectively removed to form spacers along the edges of said holes and at least one conductive layer is deposited over the exposed surface. Later, a step of photolithograpy with a mask is performed and the conductive layer is etched to define lines and collimate them to the underlying regions.

Abstract: A method of manufacturing a semiconductor virtual ground memory device having a matrix of floating gate memory cells formed on a semiconductor substrate with a plurality of continuous bit lines extending across the substrate as discrete parallel stripes. The device also includes a circuit portion for selection transistors and decode and address circuit portions having P-channel and N-channel MOS transistors. According to the method, N-wells are formed in at least one substrate portion to accommodate the P-channel transistors, active areas of all transistors are defined using a screening mask, and then an isolation layer is grown through the apertures of the screening mask. The screening mask is not open over the matrix region of the memory cells.

Abstract: A process for manufacturing electronic semiconductor integrated electronic memory devices having virtual ground and including at least a matrix of floating gate memory cells formed on a semiconductor substrate with a plurality of continuous bit lines extending across the substrate as discrete parallel strips begins with forming an oxide layer over the matrix region. Then, the semiconductor throughout is deposited with a stack structure which includes a first conductor layer, a first dielectric layer, and second conductor layer. Next, a second dielectric layer is formed. Floating gate regions are defined by photolithography using a mask of “POLY1 along a first predetermined direction”, and associated etching, to define, in the stack structure, a plurality of parallel openings. These openings are implanted to confer a predetermined conductivity on the bit line regions. Next, the parallel openings are filled with a photo-sensitive material to protect the matrix bit lines.

Abstract: A process for manufacturing a MOS transistor and especially a MOS transistor used for non-volatile memory cells is presented. At the start of the manufacturing, a semiconductor substrate having a first type of conductivity is covered by a gate oxide layer. A gate electrode is formed over the gate oxide layer, which is a stacked gate when the MOS transistor is used in a non-volatile memory. Covering the gate electrode is a covering oxide that is formed over the gate oxide layer, the gate electrode, and around the gate electrode. Next, a dopant of a second type of conductivity is implanted to provide implant regions adjacent to the gate electrode. Subjecting the semiconductor to thermal treatments allows the implanted regions to diffuse into the semiconductor substrate under the gate electrode and form a gradual junction drain and source region of the MOS transistor.

Abstract: A process creates contacts in semiconductor electronic devices and in particular on bit lines of non-volatile memories with cross-point structure. The cross-point structure includes memory cell matrices in which the bit lines are parallel unbroken diffusion strips extending along a column of the matrix with the contacts being provided through associated contact apertures defined through a dielectric layer deposited over a contact region defined on a semiconductor substrate at one end of the bit lines. The process calls for a step of implantation and following diffusion of contact areas provided in the substrate at opposite sides of each bit line to be contacted to widen the area designed to receive the contacts.

Abstract: A method is provided of manufacturing a P-channel native MOS transistor in a circuit integrated on a semiconductor which also includes a matrix of non-volatile memory cells of the floating gate type with two polysilicon levels having an interpoly dielectric layer sandwiched between the two polysilicon levels. The method has the following steps: (1) masking and defining active areas of the discrete integrated devices; (2) masking and defining the first polysilicon level using a Poly1 mask; and (3) masking and defining an intermediate dielectric layer using a matrix mask. The length of the native threshold channel of the native transistor is defined by means of the matrix mask and by etching away the interpoly dielectric layer.