Patents by Inventor Park Sun-E

Park Sun-E has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Metal interconnection method of semiconductor device
    Patent number: 8551878
    Abstract: A metal interconnection method of a semiconductor device includes forming a copper layer on a semiconductor substrate and planarizing the copper layer. Two thermal treatments are performed at different temperatures between formation of the copper layer and planarization of the copper layer.
    Type: Grant
    Filed: June 30, 2010
    Date of Patent: October 8, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Park Sun-E, Park Younghoon, Han Joocheol, Chung Jinkuk, Kang Kiho, Ahn Yu Jin