Patents by Inventor Parris Hawkins
Parris Hawkins has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10140394Abstract: Embodiments disclosed herein include methods for reducing or eliminating the impact of tuning disturbances during prediction of lamp failure. In one embodiment, the method comprises monitoring data of a lamp module for a process chamber using one or more physical sensors disposed at different locations within the lamp module, creating virtual sensors based on monitoring data of the lamp module, and providing a prediction model for the lamp module using the virtual sensors as inputs.Type: GrantFiled: August 31, 2015Date of Patent: November 27, 2018Assignee: Applied Materials, Inc.Inventors: Subrahmanyam Venkata Rama Kommisetti, Haw Jyue Luo, Jimmy Iskandar, Hsincheng Lai, Parris Hawkins
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Publication number: 20160092618Abstract: Embodiments disclosed herein include methods for reducing or eliminating the impact of tuning disturbances during prediction of lamp failure. In one embodiment, the method comprises monitoring data of a lamp module for a process chamber using one or more physical sensors disposed at different locations within the lamp module, creating virtual sensors based on monitoring data of the lamp module, and providing a prediction model for the lamp module using the virtual sensors as inputs.Type: ApplicationFiled: August 31, 2015Publication date: March 31, 2016Inventors: Subrahmanyam Venkata Rama KOMMISETTI, Haw Jyue LUO, Jimmy ISKANDAR, Hsincheng LAI, Parris HAWKINS
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Publication number: 20150331980Abstract: A method is provided for determining two or more context types having an associated fault to be modeled by the same multivariate model. The method includes selecting a fault and selecting two or more context types associated with the fault. The method further includes accessing data stored for the selected context types. The method further includes generating rankings of process data tags for each selected context type. Each ranking includes process data tags ranked according to relative contributions of each process data tag in the ranking to the fault. The method further includes classifying the context types into one or more classes based on the process data tags included in each ranking. The one or more classes include a first class of the context types. The method further includes deploying a multivariate model operable to monitor processing equipment for the selected fault for the first class of context types.Type: ApplicationFiled: May 15, 2015Publication date: November 19, 2015Inventors: Jimmy ISKANDAR, Bradley D. SCHULZE, Parris HAWKINS
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Patent number: 8225496Abstract: The present invention generally relates to a system that can be used to form a photovoltaic device, or solar cell, using processing modules that are adapted to perform one or more steps in the solar cell formation process. The automated solar cell fab is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices. The automated solar fab will thus generally comprise a substrate receiving module that is adapted to receive a substrate, one or more absorbing layer deposition cluster tools having at least one processing chamber that is adapted to deposit a silicon-containing layer on a surface of the substrate, one or more back contact deposition chambers, one or more material removal chambers, a solar cell encapsulation device, an autoclave module, an automated junction box attaching module, and one or more quality assurance modules that are adapted to test and qualify the completely formed solar cell device.Type: GrantFiled: August 29, 2008Date of Patent: July 24, 2012Assignee: Applied Materials, Inc.Inventors: Robert Z. Bachrach, Yong-Kee Chae, Soo Young Choi, Nicholas G. J. De Vries, Yacov Elgar, Eric A. Englhardt, Michel R. Frei, Charles Gay, Parris Hawkins, Choi (Gene) Ho, James Craig Hunter, Penchala N. Kankanala, Liwei Li, Wing Hoo (Hendrick) Lo, Danny Cam Toan Lu, Fang Mei, Stephen P. Murphy, Srujal (Steve) Patel, Matthew J. B. Saunders, Asaf Schlezinger, Shuran Sheng, Tzay-Fa (Jeff) Su, Jeffrey S. Sullivan, David Tanner, Teresa Trowbridge, Brice Walker, John M. White, Tae K. Won
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Publication number: 20090077805Abstract: The present invention generally relates to a system that can be used to form a photovoltaic device, or solar cell, using processing modules that are adapted to perform one or more steps in the solar cell formation process. The automated solar cell fab is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices. The automated solar fab will thus generally comprise a substrate receiving module that is adapted to receive a substrate, one or more absorbing layer deposition cluster tools having at least one processing chamber that is adapted to deposit a silicon-containing layer on a surface of the substrate, one or more back contact deposition chambers, one or more material removal chambers, a solar cell encapsulation device, an autoclave module, an automated junction box attaching module, and one or more quality assurance modules that are adapted to test and qualify the completely formed solar cell device.Type: ApplicationFiled: August 29, 2008Publication date: March 26, 2009Inventors: Robert Z. BACHRACH, Yong-Kee Chae, Soo Young Choi, Nicholas G.J. De Vries, Yacov Elgar, Eric A. Englhardt, Michael R. Frei, Charles Gay, Parris Hawkins, Choi (Gene) Ho, James Craig Hunter, Penchala N. Kankanala, Liwei Li, Wing Hoo (Hendrick) Lo, Danny Cam Toan Lu, Fang Mei, Stephen P. Murphy, Srujal (Steve) Patel, Matthew J.B. Saunders, Asaf Schlezinger, Shuran Sheng, Tzay-Fa (Jeff) Su, Jeffrey S. Sullivan, David Tanner, Teresa Trowbridge, Brice Walker, John M. White, Tae K. Won
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Publication number: 20090077804Abstract: The present invention generally relates to a sectioning module positioned within an automated solar cell device fabrication system. The solar cell device fabrication system is adapted to receive a single large substrate and form multiple silicon thin film solar cell devices from the single large substrate.Type: ApplicationFiled: August 29, 2008Publication date: March 26, 2009Inventors: Robert Z. Bachrach, Yong-Kee Chae, Soo Young Choi, Nicholas G.J. De Vries, Yacov Elgar, Eric A. Englhardt, Michel R. Frei, Charles Gay, Parris Hawkins, Choi (Gene) Ho, James Craig Hunter, Penchala N. Kankanala, Liwei Li, Wing Hoo (Hendrick) Lo, Danny Cam Toan Lu, Fang Mei, Stephen P. Murphy, Srujal (Steve) Patel, Matthew J.B. Saunders, Asaf Schlezinger, Shuran Sheng, Tzay-Fa (Jeff) Su, Jeffrey S. Sullivan, David Tanner, Teresa Trowbridge, Brice Walker, John M. White, Tae K. Won
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Publication number: 20070112928Abstract: A system, method and medium of sending messages in a distributed data processing network is described, and contemplates receiving a message that includes subject information that is generated based on one or more pre-selected portions as the message is generated. A message delivery system in a client-server environment is also described. The message delivery system includes a server configured to receive a message that includes subject information that is generated based on one or more pre-selected portions as the message is created and configured to forward the message based on the subject information.Type: ApplicationFiled: January 11, 2007Publication date: May 17, 2007Applicant: Applied Materials, Inc.Inventors: Yueh-shian Chi, Parris Hawkins, Charles Huang
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Patent number: 7174230Abstract: The present invention provides a novel distributed factory system framework including a novel factory automation lifecycle (200) having lifecycle activities for SW developing and integrating (210), installing and administrating (220), factory modeling (230), manufacturing planning (240), manufacturing controlling, monitoring and tracking (250) and analyzing of manufacturing results (260). The factory lifecycle comprises framework components. The distributed factory system framework also includes application components and building blocks. The framework components are adapted to for managing the application components, while the application components are utilized to provide instructions for managing a process such as a wafer fab. The building blocks are adapted for forming or modifying framework and application components. The distributed factory system framework provides computer implemented methods for integrating processing systems and facilitates process and equipment changes.Type: GrantFiled: February 28, 2002Date of Patent: February 6, 2007Assignee: Applied Materials, Inc.Inventors: John F. Arackaparambil, Tom Chi, Billy Chow, Patrick M. D'Souza, Parris Hawkins, Charles Huang, Jett Jensen, Badri N. Krishnamurthy, Pradeep M. Kulkarni, Prakash M. Kulkarni, Wen Fong Lin, Shantha Mohan, Bishnu Nandy, Huey-Shin Yuan
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Patent number: 7069101Abstract: The present invention provides a novel distributed factory system framework including a novel factory automation lifecycle (200) having lifecycle activities for SW developing and integrating (210), installing and administrating (220), factory modeling (230), manufacturing planning (240), manufacturing controlling, monitoring and tracking (250) and analyzing of manufacturing results (260). The factory lifecycle comprises framework components. The distributed factory system framework also includes application components and software building blocks. The framework components are adapted for managing the application components, while the application components are utilized to provide instructions for managing a process such as a wafer fab. The building blocks are adapted for forming or modifying framework and application components. The distributed factory system framework provides computer implemented methods for integrating processing systems and facilitates process and equipment changes.Type: GrantFiled: July 29, 1999Date of Patent: June 27, 2006Assignee: Applied Materials, Inc.Inventors: John F. Arackaparambil, Tom Chi, Billy Chow, Patrick M. D'Souza, Parris Hawkins, Charles Huang, Jett Jensen, Badri N. Krishnamurthy, Pradeep M. Kulkarni, Prakash M. Kulkarni, Wen Fong Lin, Shantha Mohan, Bishnu Nandy, Huey-Shin Yuan
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Publication number: 20020156548Abstract: The present invention provides a novel distributed factory system framework including a novel factory automation lifecycle (200) having lifecycle activities for SW developing and integrating (210), installing and administrating (220), factory modeling (230), manufacturing planning (240), manufacturing controlling, monitoring and tracking (250) and analyzing of manufacturing results (260). The factory lifecycle comprises framework components. The distributed factory system framework also includes application components and building blocks. The framework components are adapted to for managing the application components, while the application components are utilized to provide instructions for managing a process such as a wafer fab. The building blocks are adapted for forming or modifying framework and application components. The distributed factory system framework provides computer implemented methods for integrating processing systems and facilitates process and equipment changes.Type: ApplicationFiled: February 28, 2002Publication date: October 24, 2002Applicant: Applied Materials, Inc.Inventors: John F. Arackaparambil, Tom Chi, Billy Chow, Patrick M. D'Souza, Parris Hawkins, Charles Huang, Jett Jensen, Badri N. Krishnamurthy, Pradeep M. Kulkarni, Prakash M. Kulkarni, Wen Fong Lin, Shantha Mohan, Bishnu Nandy, Huey-Shin Yuan