Patents by Inventor Parsifal GODERIS

Parsifal GODERIS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8500976
    Abstract: A sputtering magnetron (300) insertable in a rotatable target is described. The magnetron is designed around a single piece, multiwalled tube (102, 202) with compartments (316, 316?, 318, 318?) extending over the length of the tube. The multiwalled tube gives a much stiffer magnetron carrier structure compared to prior art magnetrons. As a result, the magnetic field generator can be mounted inside a compartment and the distance between magnets and target surface is easily adjustable as the tube is much stiffer than the generator. Additionally, the coolant channels can be incorporated inside the tube and close to the outer wall of the tube so that coolant can be supplied in the vicinity of the magnetic field generator. The increased stiffness of the magnetron allows the target tube to be carried by the magnetron—not the other way around—at least during part of the useful life of the target.
    Type: Grant
    Filed: May 6, 2009
    Date of Patent: August 6, 2013
    Assignee: Soleras Advanced Coatings BVBA
    Inventors: Parsifal Goderis, Ivan Van De Putte
  • Publication number: 20110062022
    Abstract: A sputtering magnetron (300) insertable in a rotatable target is described. The magnetron is designed around a single piece, multiwalled tube (102, 202) with compartments (316, 316?, 318, 318?) extending over the length of the tube. The multiwalled tube gives a much stiffer magnetron carrier structure compared to prior art magnetrons. As a result, the magnetic field generator can be mounted inside a compartment and the distance between magnets and target surface is easily adjustable as the tube is much stiffer than the generator. Additionally, the coolant channels can be incorporated inside the tube and close to the outer wall of the tube so that coolant can be supplied in the vicinity of the magnetic field generator. The increased stiffness of the magnetron allows the target tube to be carried by the magnetron—not the other way around—at least during part of the useful life of the target.
    Type: Application
    Filed: May 6, 2009
    Publication date: March 17, 2011
    Inventors: Parsifal Goderis, Ivan Van De Putte
  • Publication number: 20090208280
    Abstract: The present invention relates to a coupling system (10) to releasably clamp a cylindrical target (12) to a spindle (14) by means of an interface ring (22) and a clamping ring (26), whereby the interface ring (22) and the cylindrical target (12) have engaging surfaces comprising two or more circular grooves (18). In another embodiment the clamping ring and the interface ring are the same piece. The advantage of the present coupling system is that it allows a square fitting and avoids high mechanical stresses.
    Type: Application
    Filed: February 11, 2009
    Publication date: August 20, 2009
    Inventors: Ivan VAN DE PUTTE, Parsifal GODERIS