Patents by Inventor Parthasarathy Ganguly

Parthasarathy Ganguly has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • LASER BEAM METROLOGY SYSTEM, LASER BEAM SYSTEM, EUV RADIATION SOURCE, AND LITHOGRAPHIC APPARATUS
    Publication number: 20240210840
    Abstract: A laser beam metrology system (500) configured to co-operate with a laser beam system that is configured to sequentially direct a first laser beam pulse and a second laser beam pulse (430) to a target along two independent optical paths, the laser beam metrology system comprising a beam steering device (470) and a detection system (510). A laser beam system comprising the laser beam metrology system and a EUV source is also described.
    Type: Application
    Filed: March 29, 2022
    Publication date: June 27, 2024
    Applicant: ASML Netherlands B.V.
    Inventors: Willem Paul BEEKER, Krishna Prashanth ANANDAN, Vasishta Parthasarathy GANGULY
  • Process for the preparation of lithium stanates doped with transition metal cations
    Patent number: 5461013
    Abstract: A process for the preparation of ceramic material Lithium stannate doped with a transition metal for a humidity sensor mixes a salt of Lithium with SnO.sub.2 in dry condition, thereafter mixes in wet conditions using an organic solvent, adds a transition metal compound to the resulting mixture, mixes the mixture thoroughly, drys and compacts the mixture in the range of 5000 to 8000 lbs and heats the pellets so formed at a temperature in the range of 600.degree. to 800.degree. C. for a period in the range of 6 to 12 hours followed by slow cooling to room temperature.
    Type: Grant
    Filed: March 30, 1994
    Date of Patent: October 24, 1995
    Assignee: Council of Scientific & Industrial Research
    Inventors: Kunjukrishna P. Vijaymohan, Imtiaz S. Mulla, Parthasarathy Ganguly