Abstract: A device is disclosed that may include a spool valve having a first connector and a second connector and a spool movable for controlling flow between the first connector and the second connector, regardless of direction of flow through the spool valve. A pilot valve having an inlet and an outlet develops a command pressure. A feedback circuit having an inlet and an outlet develops a feedback pressure. The spool valve may be responsive to the command pressure and the feedback pressure. A fluid rectifier circuit is provided to connect the higher pressure of the first connector and second connector to the pilot valve inlet and feedback circuit inlet, and connect the other of the first connector and second connector to the pilot valve outlet and feedback circuit outlet.

Abstract: A plate is adapted for use in a microvalve and includes a displaceable member configured for movement between a closed position, wherein the displaceable member prevents fluid communication through the microvalve, and an opened position, wherein the displaceable member does not prevent fluid communication through the microvalve. The displaceable member includes an elongated arm portion, a plurality of actuator ribs connected through a central spine to the elongated arm portion, and a hinge portion. The actuator ribs have a first portion and a second portion, the first portion having a first end and a second end, the second end of the first portion connected to the central spine, the second portion having a first end and a second end, the second end of the second portion connected to the central spine. A channel is formed in the plate. A plurality of elongated openings are formed in the plate and define the actuator ribs, each elongated opening having longitudinally extending side edges.

Abstract: A microvalve includes a first plate having a surface, a recessed region provided within the surface, a fluid port provided within the recessed region, and a sealing structure extending about the fluid port. A second plate defines a non-movable portion and a movable portion formed within the first opening and having an axis. A surface of the non-movable portion abuts the surface of the first plate, the non-movable portion having first and second openings formed therethrough. The first opening has a notch formed in each of two longitudinally extending side walls thereof. The movable portion defines a displaceable member connected to the non-movable portion by a convoluted spring formed in a second opening. The displaceable member has a tab extending outwardly from each of two longitudinally extending side walls thereof, each tab positioned within one of the notches.

Abstract: A microvalve includes a first plate having an inner surface, a recessed region provided within the inner surface, a normally open fluid port and a normally closed fluid port provided within the recessed region. A first sealing structure extends about the normally open fluid port, and a second sealing structure extends about the normally closed fluid port. A second plate defines a non-movable portion and a movable portion. A surface of the non-movable portion abuts the inner surface of the first plate, the non-movable portion having an opening formed therethrough. The movable portion is formed within the opening, has an axis, and defines a displaceable member connected to the non-movable portion by a convoluted spring formed in the opening.

Abstract: A microvalve includes a first plate having a surface, a recessed region provided within the surface, a fluid port provided within the recessed region, and a sealing structure extending about the fluid port. A second plate defines a non-movable portion and a movable portion, a surface of the non-movable portion abutting the surface of the first plate, the non-movable portion having first and second openings formed therethrough. The movable portion is formed within the first opening and has an axis, the movable portion defining a displaceable member connected to the non-movable portion by a convoluted spring formed in a second opening.

Abstract: A system for controlling the flow of a fluid from a source to a load includes a source. An on/off type of control valve communicates with the source. A micro-electric mechanical system communicates with the on/off type of control valve. A consuming device communicates with the micro-electric mechanical system. An electronic controller that communicates with the consuming device and the source. The electronic controller measures a change in a parameter of the micro-electric mechanical system that results from the flow of fluid through the micro-electric mechanical system to sense a flow of fluid through a micro-electric mechanical system.

Abstract: A superheat sensor includes a housing, a pressure sensor mounted within the housing, and a processor. A fluid passageway connects the pressure sensor to a source of superheat fluid. An external temperature sensor is located outside the housing of the superheat sensor and is electrically connected to the processor. The external temperature sensor is also electronically connected to a component of a fluid system to which the superheat sensor is attached and is configured to provide one of an internal temperature of the component, an external temperature of the component, and a temperature of fluid in the component.

Abstract: A refrigeration system includes a compressor, a condenser fluidly connected to the compressor, an evaporator fluidly connected to the condenser and the compressor, such that fluid may flow from the compressor through the condenser, through the evaporator, and again through the compressor. An expansion device is fluidly connected between the condenser and the evaporator, and a micro-expansion valve is also connected between the condenser and the evaporator.

Abstract: A method of cleaning contaminants, including particulate contaminants, from a valve in a fluid system includes moving a valve flow control element of the valve from a first position to a second position in response to a change in a condition in the fluid system other than a change in superheat.

Abstract: An arrangement includes a housing defining a first and second ports. A first passageway provides communication between the ports; a second passageway provides communication with the first port. An element is disposed in the housing and positioned by a balance of forces, the element is positionable to throttled positions for controlling flow through the first passageway in a first direction and to an open position to permit unrestricted flow in a second direction. A check valve is disposed in the second passageway for preventing flow therein from the first port when pressure in the first port is greater than pressure in the second port, and permitting flow through the second passageway to the first port when pressure in the first port is less than the pressure in the second port thereby affecting the balance of forces acting on the element so the element is urged toward the fully open position.

Abstract: A superheat sensor includes a housing, a pressure sensor mounted within the housing, a temperature sensor that is integrated to the pressure sensor, and/or is external to the pressure sensor, a fluid passageway connecting the pressure sensor to a source of superheat fluid, and a processor.

Abstract: An arrangement includes a housing defining a first and second ports. A first passageway provides communication between the ports; a second passageway provides communication with the first port. An element is disposed in the housing and positioned by a balance of forces, the element is positionable to throttled positions for controlling flow through the first passageway in a first direction and to an open position to permit unrestricted flow in a second direction. A check valve is disposed in the second passageway for preventing flow therein from the first port when pressure in the first port is greater than pressure in the second port, and permitting flow through the second passageway to the first port when pressure in the first port is less than the pressure in the second port thereby affecting the balance of forces acting on the element so the element is urged toward the fully open position.

Abstract: A method of sensing superheat includes the steps of: (a) connecting a fluid inlet member of a superheat sensor to one of a plurality of fluid systems; (b) allowing fluid to flow from the fluid system to which the superheat sensor is connected to the superheat sensor; (c) sensing a temperature of the fluid in the fluid system with one of an internal temperature sensor mounted within a housing of the superheat sensor and an external temperature sensor mounted outside of the housing of the superheat sensor; and (d) calculating a superheat of the fluid in the fluid system.

Abstract: A method of manufacturing a MEMS package includes initially providing a substrate formed of a first material and defining a bore therein. The bore is substantially completely lined with a second material that is different from the first material. A micromachined component having a fluid passageway formed therein is affixed to the substrate such that the bore and the fluid passageway are in fluid communication.

Abstract: A method to prevent movable structures within a MEMS device, and more specifically, in recesses having one or more dimension in the micrometer range or smaller (i.e., smaller than about 10 microns) from being inadvertently bonded to non-moving structures during a bonding process. The method includes surface preparation of silicon both structurally and chemically to aid in preventing moving structures from bonding to adjacent surfaces during bonding, including during high force, high temperature fusion bonding.

Abstract: A non-abrading method to facilitate bonding of semiconductor components, such as silicon wafers, that have micro structural defects in a bonding interface surface. In a preferred method, micro structural defects are removed by forming an oxide layer on the bonding interface surface to a depth below the level of the defect, and then removing the oxide layer to expose a satisfactory surface for bonding, thereby increasing line yield and reducing scrap triggers in fabrication facilities.

Abstract: A method of bonding an electrical component to a substrate includes applying solder paste on to a substrate. Solder preform has an aperture is formed therethrough and is then urged into contact with the solder paste, such that solder paste is urged through the aperture. An electrical component is then urged into contact with the solder preform and into contact with the solder paste that has been urged through the aperture, thereby bonding the electrical component, the solder preform, and the substrate together to define a reflow subassembly.

Abstract: A microvalve includes a base plate having a surface defining an actuator cavity. A venting groove extends from a first cavity portion of the actuator cavity having a dead end region to a second cavity portion of the actuator cavity having a structure that can vent air from the microvalve. A cover plate includes a surface having an actuator cavity provided therein that includes a first cavity portion having a dead end region and a second cavity portion having a structure that can vent air from the microvalve. An intermediate plate includes a displaceable member that is disposed within the actuator cavity for movement between a closed position, wherein the displaceable member prevents fluid communication through the microvalve, and an opened position, wherein the displaceable member does not prevent fluid communication through the microvalve.

Abstract: A microvalve includes a base plate including a surface, a recessed area provided within the surface, a first fluid port provided within the recessed area, and a first sealing structure extending about the first fluid port. The microvalve also includes a cover plate including a surface, a recessed area provided within the surface, a second fluid port provided within the recessed area, and a second sealing structure extending about the second fluid port. An intermediate plate is disposed between the base plate and the cover plate and includes a displaceable member that is movable between a closed position, wherein the displaceable member cooperates with the sealing structures to prevent fluid communication between the fluid ports, and an opened position, wherein the displaceable member does not cooperate with at least a portion of the sealing structures to prevent fluid communication between the fluid ports.

Abstract: A system for controlling the flow of a fluid from a source to a load includes a source. An on/off type of control valve communicates with the source. A micro-electric mechanical system communicates with the on/off type of control valve. A consuming device communicates with the micro-electric mechanical system. An electronic controller that communicates with the consuming device and the source. The electronic controller measures a change in a parameter of the micro-electric mechanical system that results from the flow of fluid through the micro-electric mechanical system to sense a flow of fluid through a micro-electric mechanical system.