Abstract: The system described herein relates to operating a beam device for obtaining information about an object. Moreover, the invention relates to a computer program product having a program code, which, when executed, controls the beam device in such a way that the method for operating the beam device is carried out. Additionally, the invention relates to a method for generating a training data set for a processing unit and/or for a machine learning model. Furthermore, the invention relates to a method for training a machine learning model of a beam device. The processing unit determines which machine learning model of a plurality of machine learning models is to be used for determining control values of control parameters. The control values of the control parameters are used to operate the control unit for generating the information about the object.

Abstract: Operating a particle beam apparatus for imaging, analyzing and/or processing an object includes guiding a particle beam using a first guiding device and a second guiding device in such a way that the particle beam is guided to first positions on a surface of the object. The first positions are arranged along a first geometrical shape on the object. The particle beam is also guided to second positions on the surface of the object using the first guiding device and the second guiding device. The second positions are arranged along a second geometrical shape on the object. Guiding the particle beam along the first geometrical shape and/or along the second geometrical shape is faster in time than guiding the particle beam from the first geometrical shape to the second geometrical shape.