Abstract: A massively parallel microfluidic chip is provided having a plurality of sections that are stacked or layered along a stacking direction to form a plurality of microchannels at least partially oriented to flow along the stacking direction. The plurality of sections can include a transfer section for introduction of sample fluid including particles, a particle focusing section configured to focus the particles in the sample fluid, and an actuation section including a plurality of interrogation regions and a plurality of actuators. Each interrogation region and actuator is associated with at least one microchannel in the plurality of microchannels. The arrangement of the microfluidic channels along the stacking direction enables an extremely high packing density of channels and interrogation regions on a single chip to provide massively parallel processing of particles.

Abstract: An apparatus for processing or manipulating or sorting particles by acoustic wave is disclosed. The apparatus can include a plastic or glass microfluidic channel or chip coupled via an intermediate layer to a piezoelectric substrate. The intermediate layer is acoustically matched to an acoustic wave produced in the piezoelectric substrate for manipulating and/or sorting particles in the microfluidic channel or chip. In some embodiments, the microfluidic channel or chip is coupled to a sealing layer through the intermediate layer. This multiple-layer assembly has higher yield and lower failure rate than conventional instruments and improves acoustic-wave propagation into the polymer or glass microchannel for the purpose of processing or manipulating or sorting particles or any combination thereof.