Abstract: Accelerometer including a seismic mass in a plane and a first capacitor plate and a second capacitor plate arranged parallel to the plane. The seismic mass is arranged in between the first capacitor plate and the second capacitor plate. The first capacitor plate and the second capacitor plate are configured to detect movements of the seismic mass out of the plane. A pillar extending from the first capacitor plate to the second capacitor plate through a cut-out in the seismic mass for stiffening the accelerometer.

Abstract: Accelerometer including a seismic mass in a plane and a first capacitor plate and a second capacitor plate arranged parallel to the plane. The seismic mass is arranged in between the first capacitor plate and the second capacitor plate. The first capacitor plate and the second capacitor plate are configured to detect movements of the seismic mass out of the plane. A pillar extending from the first capacitor plate to the second capacitor plate through a cut-out in the seismic mass for stiffening the accelerometer.

Abstract: A method for evaluating and/or compensating the acceleration offset in a combined accelerometer and gyroscope, wherein the evaluation or compensation is based on a quadrature signal delivered by the accelerometer.

Abstract: A vibrating gyroscope includes a proof mass (1); a spring suspension system (5, 6, 7, 8; 9) for suspending the proof mass; an electrical drive mechanism for vibrating the proof mass along a drive axis (x); and electrodes (2, 3) for building together with at least a part of the proof mass (1) a capacitance system for detecting moves of the proof mass along a sense axis (z) perpendicular to the drive axis. The gyroscope is arranged so that quadrature forces generate displacements of the proof mass without substantially displacing the neutral point (10) of the proof mass along the sense axis (z). This may be achieved by tilting the proof mass while keeping its neutral point at a constant position along the sense axis, or by applying a constant electrostatic force.

Abstract: A vibrating gyroscope comprising: a proof mass (1); a spring suspension system (5, 6, 7, 8; 9) for suspending the proof mass; an electrical drive mechanism for vibrating the proof mass along a drive axis (x); electrodes (2, 3) for building together with at least a part of the proof mass (1) a capacitance system for detecting moves of the proof mass along a sense axis (z) perpendicular to the drive axis. The gyroscope is arranged so that quadrature forces generate displacements of the proof mass without substantially displacing the neutral point (10) of the proof mass along the sense axis (z). This may be achieved by tilting the proof mass while keeping its neutral point at a constant position along the sense axis, or by applying a constant electrostatic force.

Abstract: A method for evaluating and/or compensating the acceleration offset in a combined accelerometer and gyroscope, wherein the evaluation or compensation is based on a quadrature signal delivered by the accelerometer.