Patents by Inventor Patibandla NAG

Patibandla NAG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS AND METHOD FOR FABRICATING PVD PEROVSKITE FILMS
    Publication number: 20230257868
    Abstract: Embodiments described herein relate to a method of fabricating a perovskite film device. The method includes heating and degassing a substrate within a processing system; depositing a first perovskite film layer over a surface of the substrate using multi-cathode sputtering deposition within a processing chamber; depositing a second perovskite film layer over the first perovskite film layer using multi-cathode sputtering deposition within a processing chamber; and annealing the substrate with the first perovskite film layer and second perovskite film layer disposed thereon. The first perovskite film layer includes a first perovskite material. The second perovskite film layer includes a second perovskite material.
    Type: Application
    Filed: February 14, 2023
    Publication date: August 17, 2023
    Inventors: Zihao YANG, Mingwei ZHU, Bharatwaj RAMAKRISHNAN, Rongjun WANG, Robert Jan VISSER, Patibandla NAG