Patents by Inventor Patricia Fallon

Patricia Fallon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Coating compositions for use with an overcoated photoresist
    Publication number: 20060068335
    Abstract: Compositions and methods are provided that can reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and/or function as a planarizing or via-fill layer. Preferred coating composition and methods of the invention can provide enhanced resolution of a patterned overcoated photoresist layer and include use of low activation temperature thermal acid generators as well as multiple thermal treatments to process a layer of the underlying coating composition.
    Type: Application
    Filed: May 18, 2005
    Publication date: March 30, 2006
    Applicant: Rohm and Haas Electronic Materials, L.L.C.
    Inventors: Suzanne Coley, Peter Trefonas, Patricia Fallon, Gerald Wayton