Abstract: A flow rate ratio control device is provided with a main flow path, a plurality of branch flow paths that branch off from a terminus of the main flow path, a plurality of fluid control devices that are provided respectively on each branch flow path, and that are each equipped with a valve and a pressure-based flow rate sensor that is disposed downstream of the valve, and an operation setting unit that establishes settings such that, based on the target flow rate ratio, any one fluid control device from among the plurality of fluid control devices is made to operate in a flow velocity control mode in which the flow velocity of a fluid is controlled upstream of each valve, and the remaining fluid control devices are made to operate in a flow rate control mode in which the flow rate is controlled based on the target flow rates.

Abstract: A flow rate ratio control device is provided with a main flow path, a plurality of branch flow paths that branch off from a terminus of the main flow path, a plurality of fluid control devices that are provided respectively on each branch flow path, and that are each equipped with a valve and a pressure-based flow rate sensor that is disposed downstream of the valve, and an operation setting unit that establishes settings such that, based on the target flow rate ratio, any one fluid control device from among the plurality of fluid control devices is made to operate in a flow velocity control mode in which the flow velocity of a fluid is controlled upstream of each valve, and the remaining fluid control devices are made to operate in a flow rate control mode in which the flow rate is controlled based on the target flow rates.

Abstract: A micro-position gap sensor assembly, including a structural housing, a flexible diaphragm fixedly attached at a first end of the structural housing, and a shaft orthogonally attached to the flexible diaphragm. The micro-position gap sensor assembly may further include a first retainer coupled to the shaft, a second retainer formed as a step of the structural housing, and a plate gap sensor. The plate gap sensor may include a non-contact sensor plate biased by a compression spring so that the non-contact sensor plate is held against a portion of the second retainer. The plate gap sensor may further include a target plate positioned adjacent the non-contact sensor plate and separated therefrom by a gap. The target plate may be biased by a return spring so that the target plate is held against a portion of the first retainer. The target plate may be coupled to the shaft.

Abstract: A micro-position gap sensor assembly, including a structural housing, a flexible diaphragm fixedly attached at a first end of the structural housing, and a shaft orthogonally attached to the flexible diaphragm. The micro-position gap sensor assembly may further include a first retainer coupled to the shaft, a second retainer formed as a step of the structural housing, and a plate gap sensor. The plate gap sensor may include a non-contact sensor plate biased by a compression spring so that the non-contact sensor plate is held against a portion of the second retainer. The plate gap sensor may further include a target plate positioned adjacent the non-contact sensor plate and separated therefrom by a gap. The target plate may be biased by a return spring so that the target plate is held against a portion of the first retainer. The target plate may be coupled to the shaft.

Abstract: A micro-position gap sensor assembly including a structural housing and a flexible diaphragm fixedly attached forming a barrier against fluid ingress. The structural housing includes a shaft orthogonally attached to the flexible diaphragm, a first retainer including one or more standoffs, a second retainer, and a parallel plate gap sensor. The parallel gap plate sensor includes a non-contact sensor plate biased against a portion of the first retainer defining a plane of the non-contact sensor plate and receiving a biasing force in opposition of the first retainer from the second retainer, a target plate comprised of a conductive paramagnetic material. The parallel plate gap sensor is configured such that displacement of one of the target plate or the non-contact sensor plate changes a distance between the target plate and the non-contact sensor plate.

Abstract: A micro-position gap sensor assembly including a structural housing and a flexible diaphragm fixedly attached forming a barrier against fluid ingress. The structural housing includes a shaft orthogonally attached to the flexible diaphragm, a first retainer including one or more standoffs, a second retainer, and a parallel plate gap sensor. The parallel gap plate sensor includes a non-contact sensor plate biased against a portion of the first retainer defining a plane of the non-contact sensor plate and receiving a biasing force in opposition of the first retainer from the second retainer, a target plate comprised of a conductive paramagnetic material. The parallel plate gap sensor is configured such that displacement of one of the target plate or the non-contact sensor plate changes a distance between the target plate and the non-contact sensor plate.