Abstract: The invention provides a coating system for coating substrates in a cyclic mode. The process stations of the coating system are disposed in a circular fashion. A handling mechanism is provided for transferring the substrates between the process stations. The process stations comprise a lock for loading and unloading the substrates, at least two coating chambers, each of which comprises a plasma source for stationary coating of the substrate, and preferably a heating station.

Abstract: The present invention provides an apparatus and a method for avoiding gas bubbles when transporting a liquid. The apparatus comprises a conditioning container in which the liquid is degassed due to a low pressure. In a supply container, which is arranged downstream of the conditioning container, the degassed liquid is preferably pumped out preferably by means of a plunger pump which is submerged below the surface of the liquid. The plunger pump has a stationary piston and a movable cylinder, wherein the cylinder pumps liquid through an opening of the piston into an outlet conduit. Since the piston and the cylinder are arranged in the liquid, gas bubbles are prevented from entering the liquid to be transported.