Patents by Inventor Patrick D. Duane

Patrick D. Duane has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate support assembly with thermal isolating plate
    Patent number: 7470919
    Abstract: Embodiments of the invention generally provide a substrate support assembly. In one embodiment, a substrate support assembly includes a substrate support plate, a thermal regulating plate coupled in a spaced-apart relation to the substrate support plate and a main actuator coupled in a spaced-apart relation to the thermal regulating plate. The main actuator is adapted to move the substrate support plate laterally. The substrate support assembly is configured to limit the thermal influence of the main actuator on a substrate positioned on the substrate support plate.
    Type: Grant
    Filed: September 29, 2006
    Date of Patent: December 30, 2008
    Assignee: Applied Materials, Inc.
    Inventors: Yacov Elgar, Patrick D. Duane, William Eckes, Rushford Ogden