Patents by Inventor Patrick Doering
Patrick Doering has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20190351527Abstract: Described are abrasive surfaces and pad conditioners that contain high precision shaped surfaces, including pad conditioners useful for conditioning a chemical-mechanical processing (CMP) pad, and related methods.Type: ApplicationFiled: May 3, 2019Publication date: November 21, 2019Inventors: Rajesh TIWARI, Conrad SURIAGA, Bruce Arrington, Patrick DOERING, Andrew Allan GALPIN
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Patent number: 10471567Abstract: A chemical mechanical planarization (CMP) pad conditioning assembly that includes one or more support structures positioned between one or more abrasive regions of the pad conditioning assembly is disclosed. The support structures and abrasive regions can be separated by one or more channels. A top surface of the one or more support structures is not co-planar with the top surface of the abrasive regions of the pad conditioning assembly, and the height of the top surface of the one or more support structures when measured to the pad facing surface of the pad conditioning assembly backing plate is less than the height of the top surfaces of the abrasive regions when measured to the pad facing surface of the pad conditioning assembly.Type: GrantFiled: September 15, 2016Date of Patent: November 12, 2019Assignee: ENTEGRIS, INC.Inventors: Patrick Doering, Rajesh Tiwari, Andrew Galpin
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Publication number: 20180071891Abstract: A chemical mechanical planarization (CMP) pad conditioning assembly that includes one or more support structures positioned between one or more abrasive regions of the pad conditioning assembly is disclosed. The support structures and abrasive regions can be separated by one or more channels. A top surface of the one or more support structures is not co-planar with the top surface of the abrasive regions of the pad conditioning assembly, and the height of the top surface of the one or more support structures when measured to the pad facing surface of the pad conditioning assembly backing plate is less than the height of the top surfaces of the abrasive regions when measured to the pad facing surface of the pad conditioning assembly.Type: ApplicationFiled: September 15, 2016Publication date: March 15, 2018Inventors: Patrick Doering, Rajesh Tiwari, Andrew Galpin
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Patent number: 9669982Abstract: A method of packaging a CMP brush having a cylindrical brush portion and a pair of end connection portions. The method includes saturating the brush with a liquid; covering the cylindrical brush portion with a flexible sheet that extends around and engages the surface of the cylindrical portion; engaging each of the end connection portions with a respective end support; inserting the dampened brush into a rigid polymer tubular shipping container and supporting the end connection portions within the polymer tube; and providing an additional exterior self-supporting packaging.Type: GrantFiled: September 28, 2013Date of Patent: June 6, 2017Assignee: Entegris, Inc.Inventors: Patrick Doering, David Trio, Chintan Patel, Chester L. Bejtlich, Christopher Vroman, Bradley H. Wood, Matthew B. Nicolas
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Publication number: 20150251834Abstract: A method of packaging a CMP brush having a cylindrical brush portion and a pair of end connection portions. The method includes saturating the brush with a liquid; covering the cylindrical brush portion with a flexible sheet that extends around and engages the surface of the cylindrical portion; engaging each of the end connection portions with a respective end support; inserting the dampened brush into a rigid polymer tubular shipping container and supporting the end connection portions within the polymer tube; and providing an additional exterior self-supporting packaging.Type: ApplicationFiled: September 28, 2013Publication date: September 10, 2015Inventors: Patrick Doering, David Trio, Chintan Patel, Chester L. Bejtlich, Christopher Vroman, Bradley H. Wood, Matthew B. Nicolas
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Publication number: 20150087212Abstract: A pad conditioner for a CMP polishing pad. The pad conditioner includes a features having textured or roughened surfaces, with superabrasive grit seeds such as diamond interspersed on the roughened surface. A coating such as polycrystalline diamond can be applied over the surfaces and the grit seeds. In one embodiment, the coating has a thickness that is in the range of 50% to 100% of the larger superabrasive grit.Type: ApplicationFiled: May 6, 2013Publication date: March 26, 2015Inventors: Patrick Doering, Andrew Galpin
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Publication number: 20070283881Abstract: Synthetic monocrystalline diamond compositions having one or more monocrystalline diamond layers formed by chemical vapor deposition, the layers including one or more layers having an increased concentration of one or more impurities (such as boron and/or isotopes of carbon), as compared to other layers or comparable layers without such impurities. Such compositions provide an improved combination of properties, including color, strength, velocity of sound, electrical conductivity, and control of defects. A related method for preparing such a composition is also described., as well as a system for use in performing such a method, and articles incorporating such a composition.Type: ApplicationFiled: July 12, 2007Publication date: December 13, 2007Applicant: Apollo Diamond, Inc.Inventors: Robert Linares, Patrick Doering
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Publication number: 20070017437Abstract: The present invention provides in one example embodiment a synthetic diamond and a method of growing such a diamond on a plurality of seed diamonds, implanting the grown diamond with ions, and separating the grown diamond from the plurality of seed diamonds.Type: ApplicationFiled: July 21, 2005Publication date: January 25, 2007Inventors: Alfred Genis, Robert Linares, Patrick Doering
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Publication number: 20070009419Abstract: Plasma assisted chemical vapor deposition is used to form single crystal diamond from a seed and methane. A susceptor is used to support the seed. Under certain conditions, crystalline grit is formed in addition to the diamond. The crystalline grit in one embodiment comprises mono crystals or twin crystals of carbon, each having its own nucleus. The crystals form in columns or tendrils to the side of the monocrystalline diamond or off a side of the susceptor. The crystals may have bonding imperfections which simulate doping, providing conductivity. They may also be directly doped. Many tools may be coated with the grit.Type: ApplicationFiled: July 11, 2005Publication date: January 11, 2007Inventors: Patrick Doering, Alfred Genis, Robert Linares, John Calabria
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Publication number: 20060261349Abstract: An electrolytic cell includes a container for holding an electrolyte. A conductively doped single crystal diamond anode electrode is positioned to be disposed within the electrolyte, as is a conductive cathode electrode. Conductors are coupled to the electrodes for coupling to a power supply. An electrolyte inlet and an electrolyte outlet are coupled to the container for causing electrolyte to flow past the electrodes. The anode electrode is downstream from the cathode electrode in one embodiment, such that an electrolyte comprising water is purified by generation of oxygen and/or ozone.Type: ApplicationFiled: March 29, 2006Publication date: November 23, 2006Inventors: Patrick Doering, Robert Linares, Alicia Novak, John Abrahams, Michael Murray
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Publication number: 20060234419Abstract: Masked and controlled ion implants, coupled with annealing or etching are used in CVD formed single crystal diamond to create structures for both optical applications, nanoelectromechanical device formation, and medical device formation. Ion implantation is employed to deliver one or more atomic species into and beneath the diamond growth surface in order to form an implanted layer with a peak concentration of atoms at a predetermined depth beneath the diamond growth surface. The composition is heated in a non-oxidizing environment under suitable conditions to cause separation of the diamond proximate the implanted layer. Further ion implants may be used in released structures to straighten or curve them as desired. Boron doping may also be utilized to create conductive diamond structures.Type: ApplicationFiled: January 11, 2006Publication date: October 19, 2006Inventors: Robert Linares, Patrick Doering, Bryant Linares, Alfred Genis, William Dromeshauser, Michael Murray, Alicia Novak, John Abrahams
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Publication number: 20060157713Abstract: N-V centers in diamond are created in a controlled manner. In one embodiment, a single crystal diamond is formed using a CVD process, and then annealed to remove N-V centers. A thin layer of single crystal diamond is then formed with a controlled number of N-V centers. The N-V centers form Qubits for use in electronic circuits. Masked and controlled ion implants, coupled with annealing are used in CVD formed diamond to create structures for both optical applications and nanoelectromechanical device formation. Waveguides may be formed optically coupled to the N-V centers and further coupled to sources and detectors of light to interact with the N-V centers.Type: ApplicationFiled: July 11, 2005Publication date: July 20, 2006Inventors: Robert Linares, Patrick Doering, William Dromeshauser, Bryant Linares, Alfred Genis
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Publication number: 20050181131Abstract: Monocrystalline diamond, adapted for use as in applications such as semiconductor devices, optical waveguides, and industrial applications, in the form of a single crystalline diamond structure having one or more diamond layers, at least one of which is formed by a CVD process. The diamond layers are “lattice-matched” or “lattice-mismatched” to each other to provide a desired level of strain.Type: ApplicationFiled: December 10, 2004Publication date: August 18, 2005Inventors: Robert Linares, Patrick Doering
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Publication number: 20050181210Abstract: The present invention provides a method and composition used for separating a synthetic diamond from its substrate, involving the use of ion implantation to implant ions/atoms within a diamond substrate, followed by growth of synthetic diamond on the implanted surface, and finally separation of the grown diamond, together with a portion of the implanted substrate surface, by heating in a non-oxidizing environment. The resulting composite structure can be used as is, or can be further processed, as by removing the substrate portion from the grown diamond.Type: ApplicationFiled: February 11, 2005Publication date: August 18, 2005Inventors: Patrick Doering, Alfred Genis, Robert Linares
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Publication number: 20050109266Abstract: Synthetic monocrystalline diamond compositions having one or more monocrystalline diamond layers formed by chemical vapor deposition, the layers including one or more layers having an increased concentration of one or more impurities (such as boron and/or isotopes of carbon), as compared to other layers or comparable layers without such impurities. Such compositions provide an improved combination of properties, including color, strength, velocity of sound, electrical conductivity, and control of defects. A related method for preparing such a composition is also described., as well as a system for use in performing such a method, and articles incorporating such a composition.Type: ApplicationFiled: October 29, 2004Publication date: May 26, 2005Inventors: Robert Linares, Patrick Doering
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Publication number: 20050109264Abstract: Synthetic monocrystalline diamond compositions having one or more monocrystalline diamond layers formed by chemical vapor deposition, the layers including one or more layers having an increased concentration of one or more impurities (such as boron and/or isotopes of carbon), as compared to other layers or comparable layers without such impurities. Such compositions provide an improved combination of properties, including color, strength, velocity of sound, electrical conductivity, and control of defects. A related method for preparing such a composition is also described, as well as a system for use in performing such a method, and articles incorporating such a composition.Type: ApplicationFiled: October 29, 2004Publication date: May 26, 2005Inventors: Robert Linares, Patrick Doering
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Publication number: 20050109262Abstract: Synthetic monocrystalline diamond compositions having one or more monocrystalline diamond layers formed by chemical vapor deposition, the layers including one or more layers having an increased concentration of one or more impurities (such as boron and/or isotopes of carbon), as compared to other layers or comparable layers without such impurities. Such compositions provide an improved combination of properties, including color, strength, velocity of sound, electrical conductivity, and control of defects. A related method for preparing such a composition is also described., as well as a system for use in performing such a method, and articles incorporating such a composition.Type: ApplicationFiled: October 29, 2004Publication date: May 26, 2005Inventors: Robert Linares, Patrick Doering
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Publication number: 20050109267Abstract: Synthetic monocrystalline diamond compositions having one or more monocrystalline diamond layers formed by chemical vapor deposition, the layers including one or more layers having an increased concentration of one or more impurities (such as boron and/or isotopes of carbon), as compared to other layers or comparable layers without such impurities. Such compositions provide an improved combination of properties, including color, strength, velocity of sound, electrical conductivity, and control of defects. A related method for preparing such a composition is also described., as well as a system for use in performing such a method, and articles incorporating such a composition.Type: ApplicationFiled: October 29, 2004Publication date: May 26, 2005Inventors: Robert Linares, Patrick Doering
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Publication number: 20050109265Abstract: Synthetic monocrystalline diamond compositions having one or more monocrystalline diamond layers formed by chemical vapor deposition, the layers including one or more layers having an increased concentration of one or more impurities (such as boron and/or isotopes of carbon), as compared to other layers or comparable layers without such impurities. Such compositions provide an improved combination of properties, including color, strength, velocity of sound, electrical conductivity, and control of defects. A related method for preparing such a composition is also described., as well as a system for use in performing such a method, and articles incorporating such a composition.Type: ApplicationFiled: October 29, 2004Publication date: May 26, 2005Inventors: Robert Linares, Patrick Doering
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Publication number: 20050109268Abstract: Synthetic monocrystalline diamond compositions having one or more monocrystalline diamond layers formed by chemical vapor deposition, the layers including one or more layers having an increased concentration of one or more impurities (such as boron and/or isotopes of carbon), as compared to other layers or comparable layers without such impurities. Such compositions provide an improved combination of properties, including color, strength, velocity of sound, electrical conductivity, and control of defects. A related method for preparing such a composition is also described., as well as a system for use in performing such a method, and articles incorporating such a composition.Type: ApplicationFiled: October 29, 2004Publication date: May 26, 2005Inventors: Robert Linares, Patrick Doering