Abstract: A MEMS gyroscope has a structure with a main extension in a horizontal plane formed by first and second horizontal axes. The gyroscope includes a first driving mass that performs a translation driving movement along the second horizontal axis of the horizontal plane, and a first sensing mass, having an anchoring element arranged centrally with respect to the first sensing mass and connected to the anchoring element by an elastic arrangement. The first sensing mass is coupled to the first driving mass by an elastic coupling element and performs a rotation movement in the horizontal plane around the anchoring element, dragged by the first driving mass, and a sensing movement of rotation outside the horizontal plane around a rotation axis defined by the elastic arrangement, in response to an angular velocity around the first horizontal axis. The rotation axis extends along the second horizontal axis, parallel to the driving movement.

Abstract: A microelectromechanical structure has a mobile-mass with a main extension in a horizontal plane, defined by first and second horizontal axes, and having an internal window. The mobile-mass is elastically coupled to a central anchoring structure, arranged centrally with respect to the window, by an elastic structure, so that it can perform a first rotation outside the horizontal plane and a second rotation in the horizontal plane. The elastic structure has a first symmetry-axis parallel to the first horizontal-axis and a second symmetry-axis parallel to the second horizontal-axis, and has first and second elastic elements arranged in a central position of the window, on opposite sides with respect to the first symmetry-axis. The first and second elastic elements have the shape of an “H” in the horizontal plane, mirrored with respect to the first symmetry-axis and face each other at a separation distance along the second horizontal-axis.

Abstract: A MEMS angular rate sensor is presented with two pairs of suspended masses that are micromachined on a semiconductor layer. A first pair includes two masses opposite to and in mirror image of each other. The first pair of masses has driving structures to generate a mechanical oscillation in a linear direction. A second pair of masses includes two masses opposite to and in mirror image of each other. The second pair of masses is coupled to the first pair of driving masses with coupling elements. The two pairs of masses are coupled to a central bridge. The central bridge has a differential configuration to reject any external disturbances. Each of the masses of the two pairs of masses includes different portions to detect different linear and angular movements.

Abstract: A microelectromechanical gyroscope is provided with a detection structure having: a substrate with a top surface parallel to a horizontal plane (xy); a mobile mass, suspended above the substrate to perform, as a function of a first angular velocity (?x) around a first axis (x) of the horizontal plane (xy), at least a first detection movement of rotation around a second axis (y) of the horizontal plane; and a first and a second stator elements integral with the substrate and arranged underneath the mobile mass to define a capacitive coupling, a capacitance value thereof is indicative of the first angular velocity (?x).

Abstract: A method of determining calibrated values of atmospheric pressure using a reference value of atmospheric pressure and measured values of atmospheric pressure acquired when movable devices are and are not being inductively charged by a fixed device. An electronic apparatus having the fixed device and the movable devices having movable barometers.

Abstract: A microelectromechanical gyroscope includes a support body having a main surface parallel to a reference plane defined by a first axis and a second axis perpendicular to each other. Transduction masses are constrained to the support body so as to be capable of oscillating along a driving direction parallel to the first axis and along a third axis perpendicular to the first axis and the second axis. Sensing masses are constrained to the support body at a distance from the substrate so as to be capable of oscillating in a direction parallel to the second axis. Motion conversion flexures connect the transduction masses to respective sensing masses and are configured so as to convert movements of the transduction masses along the third axis into movements of the respective sensing masses along the second axis.

Abstract: A microelectromechanical gyroscope is provided with a detection structure having: a substrate with a top surface parallel to a horizontal plane (xy); a mobile mass, suspended above the substrate to perform, as a function of a first angular velocity (?x) around a first axis (x) of the horizontal plane (xy), at least a first detection movement of rotation around a second axis (y) of the horizontal plane; and a first and a second stator elements integral with the substrate and arranged underneath the mobile mass to define a capacitive coupling, a capacitance value thereof is indicative of the first angular velocity (?x).

Abstract: A microelectromechanical device includes a substrate, a first structural layer, and a second structural layer of semiconductor material. A sensing mass extends in the first structural layer and is coupled to the substrate by first elastic connections to enable oscillation of the sensing mass in a sensing direction perpendicular to the substrate by a maximum amount relative to a resting position of the sensing mass. An out-of-plane stopper structure includes an anchorage fixed to the substrate and a mechanical end-of-travel structure, which extends in the second structural layer, faces the sensing mass, and is separated therefrom by a gap having a width smaller than the maximum displacement distance of the sensing mass. The mechanical end-of-travel structure is coupled to the anchorage by second elastic connections that enable movement of the mechanical end-of-travel structure in the sensing direction in response to an impact of the sensing mass.

Abstract: A microelectromechanical gyroscope includes a die of semiconductor material forming a substrate and a detection structure suspended over the substrate. The detection structure has a main extension in a horizontal plane, is symmetrical with respect to a central axis of symmetry, and is provided, for each gyroscope detection axis, with: a first pair of detection masses arranged on a first side of the central axis of symmetry; and a second pair of detection masses arranged on a second side of the central axis of symmetry, opposite to the first side in the horizontal plane. The detection masses of each pair are capacitively coupled to respective stator electrodes according to a differential detection scheme. The stator electrodes are arranged symmetrically with respect to one another on opposite sides of the central axis of symmetry.

Abstract: Microelectromechanical device comprising a supporting body, containing semiconductor material and a movable mass, constrained to the supporting body with a relative degree of freedom with respect to at least one motion direction, within a range of admissible positions. The device also comprises stopper elements, operable by the movable mass due to movements along the at least one motion direction and configured to apply stop forces to opposite sides of the movable mass, transversely to the at least one motion direction, when the movable mass reaches a respective endpoint of the range of admissible positions, so as to prevent the movable mass from exceeding the respective endpoint.

Abstract: A microelectromechanical device includes: a support body; at least one movable mass of semiconductor material, elastically constrained to the support body so as to be able to oscillate; fixed detection electrodes rigidly connected to the support body and capacitively coupled to the at least one movable mass; and at least one test structure of semiconductor material, rigidly connected to the support body and distinct from the fixed detection electrodes. The test structure is capacitively coupled to the at least one movable mass and is configured to apply electrostatic forces to the at least one movable mass in response to a voltage between the test structure and the at least one movable mass.

Abstract: A microelectromechanical gyroscope with detection along a vertical axis is provided with a detection structure having a movable structure, suspended above a substrate so as to perform, as a function of an angular velocity around the vertical axis a sense movement along a first horizontal axis. The movable structure has at least one drive mass internally defining a window, elastically coupled to a rotor anchor, at an anchoring region, through elastic anchoring elements; at least one bridge element, rigid and of a conductive material, cantilevered suspended and extending within the window along the first horizontal axis, elastically coupled to the drive mass; movable electrodes, carried integrally by the bridge element with extension along a second horizontal axis.

Abstract: In an embodiment a circuit includes an inertial measurement unit configured to be oscillated via a driving signal provided by driving circuitry, a lock-in amplifier configured to receive a sensing signal from the inertial measurement unit and a reference demodulation signal which is a function of the driving signal and provide an inertial measurement signal based on the sensing signal, wherein the reference demodulation signal is affected by a variable phase error, phase meter circuitry configured to receive the driving signal and the sensing signal and provide, as a function of a phase difference between the driving signal and the sensing signal, a phase correction signal for the reference demodulation signal and a correction node configured to apply the phase correction signal to the reference demodulation signal so that, in response to the phase correction signal being applied to the reference demodulation signal, the phase error is maintained in a vicinity of a reference value.

Abstract: MEMS gyroscope, having a first movable mass configured to move with respect to a fixed structure along a first drive direction and along a first sense direction, transverse to the first drive direction; a first drive assembly, coupled to the first movable mass and configured to generate a first alternate drive movement; a first drive elastic structure, coupled to the first movable mass and to the first drive assembly, rigid in the first drive direction and compliant in the first sense direction; a second movable mass, configured to move with respect to the fixed structure in a second drive direction parallel to the first drive direction and in a second sense direction parallel to the first sense direction; a second drive assembly, coupled to the second movable mass and configured to generate a second alternate drive movement in the second drive direction; and a second drive elastic structure, coupled to the second movable mass and to the second drive assembly, rigid in the second drive direction and compliant

Abstract: A MEMS angular rate sensor is presented with two pairs of suspended masses that are micromachined on a semiconductor layer. A first pair includes two masses opposite to and in mirror image of each other. The first pair of masses has driving structures to generate a mechanical oscillation in a linear direction. A second pair of masses includes two masses opposite to and in mirror image of each other. The second pair of masses is coupled to the first pair of driving masses with coupling elements. The two pairs of masses are coupled to a central bridge. The central bridge has a differential configuration to reject any external disturbances. Each of the masses of the two pairs of masses includes different portions to detect different linear and angular movements.

Abstract: Method for determining a first and a second calibrated value of atmospheric pressure, performed by an electronic apparatus comprising a fixed device and a first and a second movable device comprising respectively a first and a second movable barometer.

Abstract: A microelectromechanical gyroscope is provided with a detection structure having: a substrate with a top surface parallel to a horizontal plane (xy); a mobile mass, suspended above the substrate to perform, as a function of a first angular velocity (?x) around a first axis (x) of the horizontal plane (xy), at least a first detection movement of rotation around a second axis (y) of the horizontal plane; and a first and a second stator elements integral with the substrate and arranged underneath the mobile mass to define a capacitive coupling, a capacitance value thereof is indicative of the first angular velocity (?x).

Abstract: In an embodiment a circuit includes an inertial measurement unit configured to be oscillated via a driving signal provided by driving circuitry, a lock-in amplifier configured to receive a sensing signal from the inertial measurement unit and a reference demodulation signal which is a function of the driving signal and provide an inertial measurement signal based on the sensing signal, wherein the reference demodulation signal is affected by a variable phase error, phase meter circuitry configured to receive the driving signal and the sensing signal and provide, as a function of a phase difference between the driving signal and the sensing signal, a phase correction signal for the reference demodulation signal and a correction node configured to apply the phase correction signal to the reference demodulation signal so that, in response to the phase correction signal being applied to the reference demodulation signal, the phase error is maintained in a vicinity of a reference value.

Abstract: A microelectromechanical device includes a substrate, a first structural layer, and a second structural layer of semiconductor material. A sensing mass extends in the first structural layer and is coupled to the substrate by first elastic connections to enable oscillation of the sensing mass in a sensing direction perpendicular to the substrate by a maximum amount relative to a resting position of the sensing mass. An out-of-plane stopper structure includes an anchorage fixed to the substrate and a mechanical end-of-travel structure, which extends in the second structural layer, faces the sensing mass, and is separated therefrom by a gap having a width smaller than the maximum displacement distance of the sensing mass. The mechanical end-of-travel structure is coupled to the anchorage by second elastic connections that enable movement of the mechanical end-of-travel structure in the sensing direction in response to an impact of the sensing mass.

Abstract: A MEMS accelerometer includes a supporting structure, at least one deformable group and one second deformable group, which include, respectively, a first deformable cantilever element and a second deformable cantilever element, which each have a respective first end, which is fixed to the supporting structure, and a respective second end. The first and second deformable groups further include, respectively, a first piezoelectric detection structure and a second piezoelectric detection structure. The MEMS accelerometer further includes: a first mobile mass and a second mobile mass, which are fixed, respectively, to the second ends of the first and second deformable cantilever elements and are vertically staggered with respect to the first and second deformable cantilever elements, respectively; and a first elastic structure, which elastically couples the first and second mobile masses.