Abstract: A first and second process gas is fed into a device during a first and second process step, respectively. The device has an exhaust gas line through which a first and second exhaust gas is conveyed out of the device in the first and second process step, respectively. A first and second exhaust gas device is connected by means of a valve arrangement optionally to the exhaust gas line in a fluidly communicable and separable manner, with a first and second treatment member for treating an exhaust gas produced in the first and second process step, respectively. A gas feed device is arranged between the valve arrangement and the respective treatment members. A control device is provided whose control variable is the pressure difference between the total pressure in the respective exhaust gas devices and is configured to minimize the pressure difference during switching of the valve arrangement.

Abstract: The invention relates to a device into which process gases different from one another can be fed during process steps different from one another and having an exhaust gas line (5) through which the exhaust gases different from one another can be conveyed out of the reactor (3) in process steps different from one another, with a first and a second exhaust gas device (10, 20) that can be connected by means of a valve arrangement (11, 21) optionally to the exhaust gas line (5) in a fluidly communicable and separable manner, with a respective treatment member (18, 28) for treating an exhaust gas produced in process steps different from one another, with a gas feed device (12, 22) arranged between the valve arrangement (11, 21) and the respective treatment member (18, 28) for feeding in a first equalizing gas, with a respective pressure sensor (13, 23) for determining the total pressure (PF, PT) in the exhaust gas device (10, 20), a control device (9) being provided whose control variable is the pressure differenc