Patents by Inventor Patrick K. Cheung
Patrick K. Cheung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7645632Abstract: An organic polymer memory cell is provided having an organic polymer layer and an electrode layer formed over a first conductive (e.g., copper) layer (e.g., bitline). The memory cells are connected to a second conductive layer (e.g., forming a wordline), and more particularly the top of the electrode layer of the memory cells to the second conductive layer. Optionally, a conductivity facilitating layer is formed over the conductive layer. Dielectric material separates the memory cells. The memory cells are self-aligned with the bitlines formed in the first conductive layer and the wordlines formed in the second conductive layer.Type: GrantFiled: May 18, 2007Date of Patent: January 12, 2010Assignee: Spansion LLCInventors: Patrick K. Cheung, Ashok M. Khathuria
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Patent number: 7220985Abstract: An organic polymer memory cell is provided having an organic polymer layer and an electrode layer formed over a first conductive (e.g., copper) layer (e.g., bitline). The memory cells are connected to a second conductive layer (e.g., forming a wordline), and more particularly the top of the electrode layer of the memory cells to the second conductive layer. Optionally, a conductivity facilitating layer is formed over the conductive layer. Dielectric material separates the memory cells. The memory cells are self-aligned with the bitlines formed in the first conductive layer and the wordlines formed in the second conductive layer.Type: GrantFiled: December 9, 2002Date of Patent: May 22, 2007Assignee: Spansion, LLCInventors: Patrick K. Cheung, Ashok M. Khathuria
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Patent number: 7015504Abstract: Systems and methodologies are disclosed for increasing the number of memory cells associated with a lithographic feature. The systems comprise memory elements that are formed on the sidewalls of the lithographic feature by employing various depositing and etching processes. The side wall memory cells can have a bit line of the wafer as the first electrode and operate with a second formed electrode to activate a portion of an organic matter that is formed there between.Type: GrantFiled: November 3, 2003Date of Patent: March 21, 2006Assignee: Advanced Micro Devices, Inc.Inventors: Christopher F. Lyons, Mark S. Chang, Sergey D. Lopatin, Ramkumar Subramanian, Patrick K. Cheung, Minh V. Ngo, Jane V. Oglesby
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Patent number: 6989563Abstract: A method of protecting a charge trapping dielectric flash memory cell from UV-induced charging, including fabricating a charge trapping dielectric flash memory cell in a semiconductor device; depositing and planarizing an interlevel dielectric layer over the charge trapping dielectric flash memory cell and depositing over the planarized interlevel dielectric layer at least one UV-protective layer, the UV-protective layer including a substantially UV-opaque material.Type: GrantFiled: February 2, 2004Date of Patent: January 24, 2006Assignee: Advanced Micro Devices, Inc.Inventors: Krishnashree Achuthan, Patrick K. Cheung, Cyrus Tabery, Jean Y. Yang, Ning Cheng, Minh Van Ngo
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Patent number: 6955939Abstract: A method of making organic memory devices containing organic memory cells made of two electrodes with a controllably conductive media between the two electrodes is disclosed. The organic memory devices are made using a patternable, photosensitive dielectric that facilitates formation of the memory cells and mitigates the necessity of using photoresists.Type: GrantFiled: November 3, 2003Date of Patent: October 18, 2005Assignee: Advanced Micro Devices, Inc.Inventors: Christopher F. Lyons, Terence C. Tong, Patrick K. Cheung
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Patent number: 6900488Abstract: The present invention provides a multi-cell organic memory device that can operate as a non-volatile memory device having a plurality of multi-cell structures constructed within the memory device. A lower electrode can be formed, wherein one or more passive layers are formed on top of the lower electrode. An Inter Layer Dielectric (ILD) is formed above the passive layers and lower electrode, whereby a via or other type relief is created within the ILD and an organic semiconductor material is then utilized to partially fill the via above the passive layer. The portions of the via that are not filled with organic material are filled with dielectric material, thus forming a multi-dimensional memory structure above the passive layer or layers and the lower electrode. One or more top electrodes are then added above the memory structure, whereby distinctive memory cells are created within the organic portions of the memory structure and activated (e.g.Type: GrantFiled: October 31, 2002Date of Patent: May 31, 2005Assignee: Advanced Micro Devices, Inc.Inventors: Sergey D. Lopatin, Mark S. Chang, Minh Van Ngo, Patrick K. Cheung
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Patent number: 6836398Abstract: The present invention provides systems and methods that facilitate formation of semiconductor devices via planarization processes. The present invention utilizes dishing effects that typically occur during a chemical mechanical planarization (CMP) process. A reducing CMP process is performed on a semiconductor device in order to form a passive layer instead of performing a first CMP, followed by a deposition and a second CMP to form a passive layer. The reducing CMP process utilizes a slurry that includes a reducing chemistry that forms the passive layer in a dish region of an electrode. Thus, the passive layer is formed in conjunction with the reducing CMP process utilized for forming the electrode.Type: GrantFiled: October 31, 2002Date of Patent: December 28, 2004Assignee: Advanced Micro Devices, Inc.Inventors: Ramkumar Subramanian, Jane V. Oglesby, Minh Van Ngo, Mark S. Chang, Sergey D. Lopatin, Angela T. Hui, Christopher F. Lyons, Patrick K. Cheung, Ashok M. Khathuria
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Patent number: 6803267Abstract: The present invention provides a method to fabricate an organic memory device, wherein the fabrication method includes forming a lower electrode, depositing a passive material over the surface of the lower electrode, applying an organic semiconductor material over the passive material, and operatively coupling the an upper electrode to the lower electrode through the organic semiconductor material and the passive material. Patterning of the organic semiconductor material is achieved by depositing a silicon-based resist over the organic semiconductor, irradiating portions of the silicon-based resist and patterning the silicon-based resist to remove the irradiated portions of the silicon-based resist. Thereafter, the exposed organic semiconductor can be patterned, and the non-irradiated silicon-based resist can be stripped to expose the organic semiconductor material that can be employed as a memory cell for single and multi-cell memory devices.Type: GrantFiled: July 7, 2003Date of Patent: October 12, 2004Assignee: Advanced Micro Devices, Inc.Inventors: Ramkumar Subramanian, Christopher F. Lyons, Matthew S. Buynoski, Patrick K. Cheung, Angela T. Hui, Ashok M. Khathuria, Sergey D. Lopatin, Minh Van Ngo, Jane V. Oglesby, Terence C. Tong, James J. Xie
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Patent number: 6787458Abstract: One aspect of the present invention relates to a method of fabricating a polymer memory device in a via. The method involves providing a semiconductor substrate having at least one metal-containing layer thereon, forming at least one copper contact in the metal-containing layer, forming at least one dielectric layer over the copper contact, forming at least one via in the dielectric layer to expose at least a portion of the copper contact, forming a polymer material in a lower portion of the via, and forming a top electrode material layer in an upper portion of the via.Type: GrantFiled: July 7, 2003Date of Patent: September 7, 2004Assignee: Advanced Micro Devices, Inc.Inventors: Nicholas H. Tripsas, Matthew S. Buynoski, Suzette K. Pangrle, Uzodinma Okoroanyanwu, Angela T. Hui, Christopher F. Lyons, Ramkumar Subramanian, Sergey D. Lopatin, Minh Van Ngo, Ashok M. Khathuria, Mark S. Chang, Patrick K. Cheung, Jane V. Oglesby
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Publication number: 20040108501Abstract: An organic polymer memory cell is provided having an organic polymer layer and an electrode layer formed over a first conductive (e.g., copper) layer (e.g., bitline). The memory cells are connected to a second conductive layer (e.g., forming a wordline), and more particularly the top of the electrode layer of the memory cells to the second conductive layer. Optionally, a conductivity facilitating layer is formed over the conductive layer. Dielectric material separates the memory cells. The memory cells are self-aligned with the bitlines formed in the first conductive layer and the wordlines formed in the second conductive layer.Type: ApplicationFiled: December 9, 2002Publication date: June 10, 2004Inventors: Patrick K. Cheung, Ashok M. Khathuria
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Patent number: 6350639Abstract: An ultra-large scale CMOS integrated circuit semiconductor device with LDD structures is manufactured by forming a gate oxide layer over the semiconductor substrate; forming a polysilicon layer over the gate oxide layer; forming a first mask layer over the polysilicon layer; patterning and etching the first mask layer to form a first gate mask; anisotropically etching the polysilicon layer to form a first polysilicon gate, wherein the first polysilicon gate has sidewalls with sloped profiles and the sloped profiles are used as masks during the ion implantation of the LDD structures to space the resultant LDD structures away from the edges of second polysilicon gates to be formed subsequently with substantially vertical profiles.Type: GrantFiled: April 10, 2001Date of Patent: February 26, 2002Assignee: Advanced Micro Devices, Inc.Inventors: Allen S. Yu, Patrick K. Cheung, Paul J. Steffan
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Patent number: 6287922Abstract: An ultra-large scale CMOS integrated circuit semiconductor device with LDD structures having gradual doping profiles and reduced process complexity is manufactured by forming a gate oxide layer over the semiconductor substrate; forming a polysilicon layer over the gate oxide layer, forming a first mask layer over the polysilicon layer; patterning and etching the first mask layer to form a first gate mask; anisotropically etching the polysilicon layer to form a first polysilicon gate, wherein the first polysilicon gate has sidewalls with sloped profiles, and implanting the semiconductor substrate with a dopant to penetrate portions of the sidewalls to form one or more graded shallow junctions with gradual doping profiles.Type: GrantFiled: September 28, 1998Date of Patent: September 11, 2001Assignee: Advanced Micro Devices, Inc.Inventors: Allen S. Yu, Patrick K. Cheung, Paul J. Steffan
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Patent number: 6274443Abstract: An ultra-large scale CMOS integrated circuit semiconductor device with LDD structures having gradual doping profiles and reduced process complexity is manufactured by forming a gate oxide layer over the semiconductor substrate; forming a polysilicon layer over the gate oxide layer; forming a first mask layer over the polysilicon layer; patterning and etching the first mask layer to form a first gate mask; anisotropically etching the polysilicon layer to form a first polysilicon gate, wherein the first polysilicon gate has sidewalls with sloped profiles and the sloped profiles are used as masks during the ion implantation of the LDD structures to space the resultant LDD structures away from the edges of second polysilicon gates to be formed subsequently with substantially vertical profiles. Since the LDD structures are spaced away from the edges of the second polysilicon gates, the lateral diffusion of the LDD structures into the channel due to rapid thermal annealing is reduced.Type: GrantFiled: September 28, 1998Date of Patent: August 14, 2001Assignee: Advanced Micro Devices, Inc.Inventors: Allen S. Yu, Patrick K. Cheung, Paul J. Steffan
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Patent number: 6191044Abstract: An ultra-large scale CMOS integrated circuit semiconductor device with LDD structures having reduced polysilicon gate length, reduced parasitic capacitance and gradual doping profiles is manufactured by forming a gate oxide layer over the semiconductor substrate; forming a polysilicon layer over the gate oxide layer; forming a first mask layer over the polysilicon layer; patterning and etching the first mask layer to form a first gate mask; anisotropically etching the polysilicon layer to form a polysilicon gate, wherein the polysilicon gate comprises sidewalls with re-entrant profiles, and implanting the semiconductor substrate with a dopant to penetrate portions of the sidewalls to form one or more graded shallow junctions with gradual doping profiles. The gradual doping profiles reduce parasitic capacitance and minimize hot carrier injections.Type: GrantFiled: October 8, 1998Date of Patent: February 20, 2001Assignee: Advanced Micro Devices, Inc.Inventors: Allen S. Yu, Patrick K. Cheung, Paul J. Steffan
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Patent number: 6013570Abstract: An ultra-large scale MOS integrated circuit semiconductor device is processed after the formation of the gate oxide and polysilicon layer by forming a forming a first mask layer over the polysilicon layer followed by a second mask layer over the first mask layer. The first mask layer and the second mask layer are patterned to form first gate mask and second gate mask respectively. The polysilicon gate is then formed by anisotropically etching the polysilicon layer. The second gate mask is then removed. The polysilicon gate is then etched isotropically to reduce its width using the gate oxide layer and the patterned first gate mask as hard masks. The first gate mask is then used as a mask for dopant implantation to form source and drain extensions which are spaced away from the edges of the polysilicon gate. Thereafter, the first gate mask is removed and a spacer is formed dopant implantation to form deep source and drain junctions.Type: GrantFiled: July 17, 1998Date of Patent: January 11, 2000Assignee: Advanced Micro Devices, Inc.Inventors: Allen S. Yu, Patrick K. Cheung, Paul J. Steffan