Patents by Inventor Patrick Marrow

Patrick Marrow has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Structure in a microelectronic device including a bi-layer for a diffusion barrier and an etch-stop layer
    Patent number: 7164206
    Abstract: The invention relates to a microelectronic device and a structure therein that includes a diffusion barrier layer having a first thickness and a first dielectric constant. An etch stop layer is disposed above and on the diffusion barrier layer. The etch stop layer has a second thickness and a second dielectric constant.
    Type: Grant
    Filed: March 28, 2001
    Date of Patent: January 16, 2007
    Assignee: Intel Corporation
    Inventors: Grant Kloster, Jihperng Leu, Lawrence Wong, Andrew Ott, Patrick Marrow