Abstract: Contamination of semiconductor wafers during coating and other operations is mitigated by passing the wafer through a tunnel with a slit providing a gas curtain which impinges upon the wafer as the wafer is transported from one station to the next station in the processing apparatus.

Abstract: The impact of plastid size change in both monocot and dicot plants has been examined. In both, when plastid size is increased there is an increase in biomass relative to the parental lines. Thus, provided herein are methods for increasing the biomass of a plant, comprising decreasing the expression of at least one plastid division protein in a plant. Optionally, the level of chlorophyll in the plant is also reduced.

Abstract: A device for handling a semiconductor wafer in an epitaxy reactor has a susceptor; longitudinal holes extending through the susceptor; a wafer lifting shaft; wafer lifting pins guided through the longitudinal holes; a susceptor carrying shaft; susceptor carrying arms; susceptor support pins; guide sleeves anchored in the susceptor carrying arms; and guide elements protruding from the guide sleeves which, at upper ends, have bores into which wafer lifting pins are inserted, and which can be raised and lowered together with the wafer lifting pins by the wafer lifting shaft.

Abstract: Semiconductor wafers with an epitaxial layer are produced in a deposition chamber by placing a substrate wafer in the edge region of the rear side of the substrate wafer onto a placement area of a susceptor; loading the deposition chamber with the susceptor and the substrate wafer lying on the susceptor by contacting the susceptor and transporting the susceptor and the substrate wafer lying on the susceptor from a load lock chamber into the deposition chamber; depositing an epitaxial layer on the substrate wafer; and unloading the deposition chamber by contacting the susceptor and transporting the susceptor and a semiconductor wafer with epitaxial layer, the semiconductor wafer having been produced in the course of depositing the epitaxial layer and lying on the susceptor, from the deposition chamber into the load lock chamber.

Abstract: The impact of plastid size change in both monocot and dicot plants has been examined. In both, when plastid size is increased there is an increase in biomass relative to the parental lines. Thus, provided herein are methods for increasing the biomass of a plant, comprising decreasing the expression of at least one plastid division protein in a plant. Optionally, the level of chlorophyll in the plant is also reduced.