Abstract: A system for performing spectral microanalysis delivers analysis results during the course of data collection. As spectra are collected from pixels on a specimen, the system periodically analyzes the spectra to statistically derive underlying spectra representing proposed specimen components, wherein the derived spectra combine in varying proportions to result (at least approximately) in the measured spectra at each pixel. Those pixels having the same dominant proposed component, and/or which contain at least approximately the same proportions of the proposed components, may then have their measured spectra combined (i.e., added or averaged). These spectra may then be cross-referenced via reference libraries to identify the components actually present.

Abstract: A system for performing spectral microanalysis delivers analysis results during the course of data collection. As spectra are collected from pixels on a specimen, the system periodically analyzes the spectra to statistically derive underlying spectra representing proposed specimen components, wherein the derived spectra combine in varying proportions to result (at least approximately) in the measured spectra at each pixel. Those pixels having the same dominant proposed component, and/or which contain at least approximately the same proportions of the proposed components, may then have their measured spectra combined (i.e., added or averaged). These spectra may then be cross-referenced via reference libraries to identify the components actually present.

Abstract: A system and method for correcting automatically the distortions in electron background diffration (EBSD) patterns which result from magnetic fields produced by some scanning electron microscopes (SEMs) used for collecting such patterns from polycrystalline sample materials. The method may be implemented as a software program running on a computer which is part of a conventional system for obtaining and analyzing EBSD patterns to obtain crystallographic information about the sample material. The method includes a calibration procedure and a correction procedure. In the calibration procedure, a distorted EBSD pattern obtained from a calibration sample is displayed on an operator display and user interface. Using an input device, an operator defines segment endpoints along a Kikuchi band in the distorted EBSD pattern image. From the user defined segment endpoints, correction parameters are calculated based on a mathematical curve (e.g., cubic spline) fitting the endpoints.

Abstract: An atom probe provides rapidly pulsed field evaporation/desorption of ions from a tip utilizing a local extraction electrode positioned closely adjacent to the tip. A bias potential is applied between the tip and the local extraction electrode which provides an electric field at the tip which is less than but near the field intensity required for field evaporation of ions. Additional potential is applied between the tip and the extraction electrode in relatively low over-voltage pulses to obtain field evaporation of ions without substantially accelerating the ions. The ions extracted from the tip by the sharply defined pulses pass through an aperture in the extraction electrode and are accelerated by a large potential difference between the tip and a detector spaced from the tip and the local extraction electrode.

Abstract: A position sensitive detector has one or more wedge-and-wedge anode units, each of which has four electrodes on a planar surface arranged in a plurality of sets of four wedge-shaped electrode elements each, with the sets extending across the anode unit. Two of the electrode elements become progressively wider from set to set from one side of the anode unit to the other, while the other two electrode elements become progressively narrower. The respective electrode elements in each set are electrically connected together to complete the four electrodes. The charge measured on each of the four electrodes can be utilized to determine the X and Y coordinates of an event which results in a charge cloud impacting the anode, with redundant information available from the four electrodes.