Abstract: The invention relates to an actuator system comprising at least four electrically controllable, longitudinally adjustable actuators, to each of which a compressive force is applied in the direction of the longitudinal adjustment thereof by means of a separate housing that has an integrally formed resilient portion, each housing being designed as a single piece along with a base element shared by all housings. The invention further relates to an array comprising a plurality of actuator systems of said type.

Abstract: The invention relates to an actuator system comprising at least four electrically controllable, longitudinally adjustable actuators, to each of which a compressive force is applied in the direction of the longitudinal adjustment thereof by means of a separate housing that has an integrally formed resilient portion, each housing being designed as a single piece along with a base element shared by all housings. The invention further relates to an array comprising a plurality of actuator systems of said type.

Abstract: The invention relates to an adjusting device with high position resolution, even in the nano- or subnanometer range and a regulating distance of a few micrometers up to several hundred millimeters, wherein PZT-solid state actuators in a closed-loop control circuit are used for the main control direction, the positions thereof being determined by high resolution sensors and the PZT-solid state actuators are in connection with a platform (2) via joints. For the compensation of position errors occurring perpendicular to the individual position, additional actuators (5) on the basis of piezoelectric single crystals are intended according to the invention. The single crystals are actuated according to stored values in an error table, wherein the respective control value results as a function of the main control axis, however with reversed gradient signs, and the additional actuators are connected to the adjusting device platform by a correcting plate (4).

Abstract: The invention relates to a method for the production of a monolithic multilayer actuator, a corresponding monolithic multilayer actuator, as well as an external contact for a monolithic multilayer actuator. According to the invention specific microdisturbances are incorporated in the actuator structure along the longitudinal axis of the stack essentially parallel and spaced to the inner electrodes in the area of the at least two opposite outer surfaces to which the inner electrodes known per se are brought out, which at the earliest during polarisation of the actuator are subject to a pregiven, limited, stress-reducing growth into the interior and/or towards the outer electrode, wherein additionally the basic metallic coating and/or the external contact is formed elongation-resistant or elastic at least in the area of the microdisturbances.

Abstract: The invention relates to a method for the production of a monolithic multilayer actuator, a corresponding monolithic multilayer actuator, as well as an external contact for a monolithic multilayer actuator. According to the invention specific microdisturbances are incorporated in the actuator structure along the longitudinal axis of the stack essentially parallel and spaced to the inner electrodes in the area of the at least two opposite outer surfaces to which the inner electrodes known per se are brought out, which at the earliest during polarisation of the actuator are subject to a pregiven, limited, stress-reducing growth into the interior and/or towards the outer electrode, wherein additionally the basic metallic coating and/or the external contact is formed elongation-resistant or elastic at least in the area of the microdisturbances.