Abstract: A micromachined capacitive electrical component such as a condenser microphone with a support structure and a rigid plate with an electrically conductive plate electrode secured to the support structure at discrete locations. A diaphragm of a substantially non-conductive material is secured to the support structure along its periphery at a predetermined distance from the substantially rigid plate, whereby the substantially rigid plate and the diaphragm define an air gap. The diaphragm is movable in response to sound pressure and carries an electrically conductive diaphragm electrode. The support structure and the diaphragm electrode are electrically interconnected so as to have substantially the same electrical potential. A layer of a substantially non-conductive material is disposed between the substantially rigid plate and the support structure at least at the discrete locations.

Abstract: A micromachined component such as a transducer having a support structure with a rigid plate secured to the surface of the support structure by means of support arms directly interconnecting the rigid plate and the support structure at discrete locations. A diaphragm of a substantially non-conductive material is secured to the support structure along its periphery at a predetermined distance from the rigid plate. The rigid plate has a surface facing the air gap carrying an electrically conductive surface portion on that surface, and the diaphragm has a surface facing the air gap carrying an electrically conductive surface portion on that surface. For each support arm, at least one of the electrically conductive surface portions is separated from the support arm at a distance along the surface carrying the respective electrically conductive surface portion. This construction ensures a high leakage resistance and a low parasitic capacitance.

Abstract: A micromachined capacitive electrical component such as a condenser microphone with a support structure and a rigid plate with an electrically conductive plate electrode secured to the support structure at discrete locations. A diaphragm of a substantially non-conductive material is secured to the support structure along its periphery at a predetermined distance from the substantially rigid plate, whereby the substantially rigid plate and the diaphragm define an air gap. The diaphragm is movable in response to sound pressure and carries an electrically conductive diaphragm electrode. The support structure and the diaphragm electrode are electrically interconnected so as to have substantially the same electrical potential. A layer of a substantially non-conductive material is disposed between the substantially rigid plate and the support structure at least at the discrete locations.

Abstract: A micromachined component such as a transducer having a support structure with a rigid plate secured to the surface of the support structure by means of support arms directly interconnecting the rigid plate and the support structure at discrete locations. A diaphragm of a substantially non-conductive material is secured to the support structure along its periphery at a predetermined distance from the rigid plate. The rigid plate has a surface facing the air gap carrying an electrically conductive surface portion on that surface, and the diaphragm has a surface facing the air gap carrying an electrically conductive surface portion on that surface. For each support arm, at least one of the electrically conductive surface portions is separated from the support arm at a distance along the surface carrying the respective electrically conductive surface portion. This construction ensures a high leakage resistance and a low parasitic capacitance.