Patents by Inventor Patrick Sebastian UEBEL

Patrick Sebastian UEBEL has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250251641
    Abstract: A broadband radiation device, comprising: a pulse shaper configured to impose a temporal profile onto an input pump pulse so as to generate a temporally-modulated pump pulse, the temporally-modulated pump pulse having a different temporal profile than the input pump pulse; and a hollow-core photonic crystal fiber (HC-PCF) having a hollow core for confining in use a working medium under a pressure, the HC-PCF being operable to receive the temporally-modulated pump pulse; wherein the temporally-modulated pump pulse is configured to be spectrally broadened by a soliton self-compression process to form broadband output radiation while propagating through the hollow core of the HC-PCF; and said temporal profile is configured so as to configure a spectrum of the broadband output radiation to have target spectrum characteristics.
    Type: Application
    Filed: March 14, 2023
    Publication date: August 7, 2025
    Applicant: ASML Netherlands B.V.
    Inventors: Patrick Sebastian UEBEL, Willem Richard PONGERS, Johannes Richard Karl KOHLER, Yongfeng NI
  • Patent number: 12366810
    Abstract: A radiation source includes: a hollow core optical fiber, a working medium; and a pulsed pump radiation source. The hollow core optical fiber has a body and has a hollow core. The working medium is disposed within the hollow core. The pulsed pump radiation source is arranged to produce pulsed pump radiation that is received by, and propagates through, the hollow core from an input end to an output end. One or more parameters of the pulsed pump radiation, the optical fiber and the working medium are configured to allow soliton self-compression of the pulsed pump radiation so as to change a spectrum of the pulsed pump radiation so as to form output radiation. In some embodiments, a length of the optical fiber is such that the output end substantially coincides with a position at which a temporal extent of the pulsed pump radiation is minimal.
    Type: Grant
    Filed: January 6, 2022
    Date of Patent: July 22, 2025
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Patrick Sebastian Uebel, Sebastian Thomas Bauerschmidt, Yongfeng Ni
  • Patent number: 12204229
    Abstract: A supercontinuum radiation source including a modulator being operable to modulate pump laser radiation including a train of radiation pulses to provide modulated pump laser radiation, the modulation being such to selectively provide a burst of the pulses; and a hollow-core photonic crystal fiber being operable to receive the modulated pump laser radiation and excite a working medium contained within the hollow-core photonic crystal fiber so as to generate supercontinuum radiation.
    Type: Grant
    Filed: September 27, 2023
    Date of Patent: January 21, 2025
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Sebastian Thomas Bauerschmidt, Peter Maximilian Götz, Patrick Sebastian Uebel
  • Patent number: 12184030
    Abstract: A broadband light source device for creating broadband light pulses includes a hollow-core fiber and a pump laser source device. The hollow-core fiber is configured to create the broadband light pulses by an optical non-linear broadening of pump laser pulses. The hollow-core fiber includes a filling gas, an axial hollow light guiding fiber core configured to support core modes of a guided light field, and an inner fiber structure surrounding the fiber core and configured to support transverse wall modes of the guided light field. The pump laser source device is configured to create and provide the pump laser pulses at an input side of the hollow-core fiber. The transverse wall modes include a fundamental transverse wall mode and second and higher order transverse wall modes.
    Type: Grant
    Filed: April 12, 2023
    Date of Patent: December 31, 2024
    Assignee: MAX-PLANCK-GESELLSCHAFT ZUR FÖRDERUNG DER WISSENSCHAFTEN E. V.
    Inventors: Patrick Sebastian Uebel, Philip St. J. Russell, Sebastian Thomas Bauerschmidt
  • Publication number: 20240427216
    Abstract: A broadband radiation source device configured for generating broadband output radiation upon receiving substantially linearly polarized input radiation, the source device including: a hollow-core photonic crystal fiber; at least a first polarization element operable to impose a substantially circular or elliptical polarization on the input radiation prior to being received by the hollow-core photonic crystal fiber; and a second polarization element operable in combination with the first polarization element to impose a substantially elliptical polarization on the input radiation, wherein the second polarization element and the first polarization element are oriented such that the elliptical polarization compensates at least partially for birefringence of the hollow-core photonic crystal fiber.
    Type: Application
    Filed: September 30, 2022
    Publication date: December 26, 2024
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Sebastian Thomas BAUERSCHMIDT, Patrick Sebastian UEBEL, Peter Maximilian GÖTZ
  • Publication number: 20240262736
    Abstract: A method of producing photonic crystal fibers (PCFs) is disclosed, the method includes: 1) obtaining an intermediate PCF having an initial outer fiber diameter of less than 1 mm; and 2) elongating the intermediate PCF so as to controllably reduce at least one dimension of the intermediate PCF.
    Type: Application
    Filed: May 24, 2022
    Publication date: August 8, 2024
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Janneke RAVENSBERGEN, Patrick Sebastian UEBEL, Johannes Jacobus Matheus BASELMANS
  • Publication number: 20240231243
    Abstract: Provided are light sources and methods of controlling them, and devices and methods for use in measurement applications, particularly in metrology, for example in a lithographic apparatus. The methods and devices provide mechanisms for detection and/or correction of variations in the light source, in particular stochastic variations. Feedback or feedforward approaches can be used for the correction of the source and/or the metrology outputs. An exemplary method of controlling the spectral output of a light source which emits a time-varying spectrum of light includes the steps of: determining at least one characteristic of the spectrum of light emitted from the light source; and using said determined characteristic to control the spectral output.
    Type: Application
    Filed: March 21, 2024
    Publication date: July 11, 2024
    Applicant: ASML Netherlands B.V.
    Inventors: Marinus Petrus REIJNDERS, Hendrik SABERT, Patrick Sebastian UEBEL
  • Publication number: 20240201561
    Abstract: A monolithic optical element for generating broadband radiation upon receiving input radiation at an input end of the optical element is disclosed, the optical element including: a hollow core region for guiding the input radiation along a longitudinal axis of the optical element towards an output end of the optical element; a cladding region surrounding the core region along the longitudinal axis and including transversally arranged micro-structures configured to provide non-linear optical behavior to the optical element causing the generation of the broadband radiation; and a supporting region surrounding the cladding region along the longitudinal axis of at least part of the optical element, wherein the supporting region has a transversal dimension which is sufficiently large to render the at least part of the optical element substantially rigid.
    Type: Application
    Filed: April 12, 2022
    Publication date: June 20, 2024
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Patrick Sebastian UEBEL, Willem Richard PONGERS, Ralph Jozef Johannes Gerardus Anna Maria SMEETS, Amir ABDOLVAND, Krishnaparvathy PUTHANKOVILAKAM
  • Publication number: 20240152024
    Abstract: A radiation source including: a hollow core optical fiber having a body having a hollow core for confining a working medium, the hollow core optical fiber being operable to receive pulsed pump radiation such that the received pulsed pump radiation propagates through the hollow core from an input end to an output end of the hollow core optical fiber, wherein one or more source parameters of the radiation source are configured such that the pulsed pump radiation undergoes a soliton self-compression process so as to change a spectrum of the pulsed pump radiation to form output radiation; and at least one dispersion control mechanism being operable to change dispersion characteristics in a first portion of the optical fiber so as to spectrally shift a dispersive wave generated in the soliton self-compression process.
    Type: Application
    Filed: February 17, 2022
    Publication date: May 9, 2024
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Willem Richard PONGERS, Patrick Sebastian UEBEL, Johannes Richard Karl KOHLER
  • Patent number: 11971663
    Abstract: Provided are light sources and methods of controlling them, and devices and methods for use in measurement applications, particularly in metrology, for example in a lithographic apparatus. The methods and devices provide mechanisms for detection and/or correction of variations in the light source, in particular stochastic variations. Feedback or feedforward approaches can be used for the correction of the source and/or the metrology outputs. An exemplary method of controlling the spectral output of a light source which emits a time-varying spectrum of light includes the steps of: determining at least one characteristic of the spectrum of light emitted from the light source; and using said determined characteristic to control the spectral output.
    Type: Grant
    Filed: July 7, 2020
    Date of Patent: April 30, 2024
    Assignee: ASML Netherlands B.V.
    Inventors: Marinus Petrus Reijnders, Hendrik Sabert, Patrick Sebastian Uebel
  • Publication number: 20240134182
    Abstract: An optical filter apparatus including an optical divergence device, operable to receive optical pulses and spatially distribute the optical pulses over an optical plane in dependence with a pulse energy of each of the optical pulses; and a spatial filter, located at the optical plane, operable to apply spatial filtering to the optical pulses based on a location of each of the optical pulses at the optical plane resulting from the spatial distributing.
    Type: Application
    Filed: January 12, 2022
    Publication date: April 25, 2024
    Applicants: ASML NETHERLANDS B.V., ASML HOLDING N.V.
    Inventors: Ali ALSAQQA, Patrick Sebastian UEBEL, Paulus Antonius Andreas TEUNISSEN
  • Publication number: 20240118584
    Abstract: A broadband radiation source device configured for generating a broadband output radiation upon receiving pump radiation, the device including: a hollow-core photonic crystal fiber (HC-PCF) including at least one structurally varied portion having at least one structural parameter of the HC-PCF varied with respect to one or more main portions of the HC-PCF, wherein the at least one structurally varied portion includes at least a structurally varied portion located downstream of a position along the length of the HC-PCF where the pump radiation will be spectrally expanded by a modulation instability dominated nonlinear optical process, and wherein the at least one structurally varied portion is configured and located such that the broadband output radiation includes wavelengths in the ultraviolet region.
    Type: Application
    Filed: November 9, 2023
    Publication date: April 11, 2024
    Applicant: ASML Netherlands B.V.
    Inventors: Janneke RAVENSBERGEN, Patrick Sebastian Uebel, Willem Richard Pongers
  • Publication number: 20240061314
    Abstract: A supercontinuum radiation source including a modulator being operable to modulate pump laser radiation including a train of radiation pulses to provide modulated pump laser radiation, the modulation being such to selectively provide a burst of the pulses; and a hollow-core photonic crystal fiber being operable to receive the modulated pump laser radiation and excite a working medium contained within the hollow-core photonic crystal fiber so as to generate supercontinuum radiation.
    Type: Application
    Filed: September 27, 2023
    Publication date: February 22, 2024
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Sebastian Thomas BAUERSCHMIDT, Peter Maximilian GÖTZ, Patrick Sebastian UEBEL
  • Publication number: 20240053532
    Abstract: A radiation source for generating broadband radiation, the source including an input assembly for providing input radiation and a hollow-core photonic crystal fiber configured to receive and confine the input radiation coupled into the fiber for generating broadband radiation through spectral broadening, wherein the input assembly includes a pump source configured to provide input radiation having an average power of at least 50 W, and wherein the hollow core photonic crystal fiber includes: a hollow core having a diameter of at least 35 ?m; and a cladding region including a plurality of anti-resonant structures surrounding the hollow core, the anti-resonant structures including a wall portion having a wall thickness smaller than half the wavelength of the lower end of a wavelength range of the broadband radiation.
    Type: Application
    Filed: December 20, 2021
    Publication date: February 15, 2024
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Patrick Sebastian UEBEL, Sebastian Thomas BAUERSCHMIDT, Peter Maximilian GÖTZ
  • Publication number: 20240004319
    Abstract: A radiation source for generating broadband radiation, the source including: a pump source having only one single fiber amplifier configured to generate pump radiation including a plurality of radiation pulses having a pulse energy of 2.5 ?J or less; and a hollow core fiber having a hollow core region and a cladding surrounding the hollow core region, the hollow core region having a pressurized gas therein, and the hollow core fiber being arranged to receive, at an input end, the pump radiation, wherein the hollow core region is dimensioned such that the radiation pulses have a soliton order higher than 16 so as to broaden a spectrum of the pump radiation using modulation instability as the pump radiation propagates along the hollow-core fiber, for providing output broadband radiation from an output end of the hollow core fiber.
    Type: Application
    Filed: November 25, 2021
    Publication date: January 4, 2024
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Patrick Sebastian UEBEL, Willem Richard PONGERS, Sebastian Thomas BAUERSCHMIDT, Peter Maximilian GOTZ, Ludovicus VAN DEN OETELAAR
  • Publication number: 20240004127
    Abstract: Optical components and methods of manufacture thereof. A first optical component has a hollow-core photonic crystal fiber includes internal capillaries for guiding radiation and an outer capillary sheathing the internal capillaries; and at least an output end section having a larger inner cross-sectional dimension over at least a portion of the output end section than an inner cross-sectional dimension of the outer capillary along a central portion of the hollow-core photonic crystal fiber prior to the output end section. A second optical component includes a hollow-core photonic crystal fiber and a sleeve arrangement.
    Type: Application
    Filed: August 15, 2023
    Publication date: January 4, 2024
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Patrick Sebastian UEBEL, Peter Maximilian Götz, Sebastian Thomas Bauerschmidt, Coen Hubertus Matheus Baltis, Janneke Ravensbergen
  • Publication number: 20240004308
    Abstract: A radiation source arrangement including: a radiation source operable to generate source radiation including source energy pulses; and at least one non-linear energy-filter operable to filter the source radiation to obtain filtered radiation including filtered energy pulses. The at least one non-linear energy-filter is operable to mitigate variation in energy in the filtered radiation by reducing the energy level of the source energy pulses which have an energy level corresponding to one of both extremities of an energy distribution of the source energy pulses by a greater amount than the source energy pulses which have an energy level corresponding to a peak of the energy distribution.
    Type: Application
    Filed: August 3, 2021
    Publication date: January 4, 2024
    Applicants: ASML NETHERLANDS B.V., ASML HOLDING N.V.
    Inventors: Ali ALSAQQA, Aabid PATEL, Patrick Sebastian UEBEL, Amir ABDOLVAND, Paulus Antonius Andreas TEUNISSEN, Wisham F. KADHIM
  • Patent number: 11846867
    Abstract: A broadband radiation source device configured for generating a broadband output radiation upon receiving pump radiation, the device including: a hollow-core photonic crystal fiber (HC-PCF) including at least one structurally varied portion having at least one structural parameter of the HC-PCF varied with respect to one or more main portions of the HC-PCF, wherein the at least one structurally varied portion includes at least a structurally varied portion located downstream of a position along the length of the HC-PCF where the pump radiation will be spectrally expanded by a modulation instability dominated nonlinear optical process, and wherein the at least one structurally varied portion is configured and located such that the broadband output radiation includes wavelengths in the ultraviolet region.
    Type: Grant
    Filed: December 1, 2021
    Date of Patent: December 19, 2023
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Janneke Ravensbergen, Patrick Sebastian Uebel, Willem Richard Pongers
  • Patent number: 11774828
    Abstract: A supercontinuum radiation source including a modulator being operable to modulate pump laser radiation including a train of radiation pulses to provide modulated pump laser radiation, the modulation being such to selectively provide a burst of the pulses; and a hollow-core photonic crystal fiber being operable to receive the modulated pump laser radiation and excite a working medium contained within the hollow-core photonic crystal fiber so as to generate supercontinuum radiation.
    Type: Grant
    Filed: May 4, 2021
    Date of Patent: October 3, 2023
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Sebastian Thomas Bauerschmidt, Peter Maximilian Götz, Patrick Sebastian Uebel
  • Patent number: 11774671
    Abstract: Optical components and methods of manufacture thereof. A first optical component has a hollow-core photonic crystal fiber includes internal capillaries for guiding radiation and an outer capillary sheathing the internal capillaries; and at least an output end section having a larger inner cross-sectional dimension over at least a portion of the output end section than an inner cross-sectional dimension of the outer capillary along a central portion of the hollow-core photonic crystal fiber prior to the output end section. A second optical component includes a hollow-core photonic crystal fiber and a sleeve arrangement.
    Type: Grant
    Filed: October 22, 2020
    Date of Patent: October 3, 2023
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Patrick Sebastian Uebel, Peter Maximilian Götz, Sebastian Thomas Bauerschmidt, Coen Hubertus Matheus Baltis, Janneke Ravensbergen