Abstract: An electronic device and related method of fabricating such a device includes an electrically-conductive passive device (e.g., an inductor or transmission line) fabricated above an upper surface of a semiconductor substrate that has a body portion disposed between the upper surface and a lower surface of the substrate. The body portion is doped n-type or p-type and the passive device is separated from the upper surface by one or more layers of electrically insulating material. The substrate includes a set of electrically-insulating isolation trenches disposed beneath the passive device that extend from the upper surface of the substrate toward the lower surface of the substrate and the isolation trenches are disjoint from each other.

Abstract: A bipolar transistor and a method of making a bipolar transistor. The method includes providing a semiconductor substrate having a major surface, one or more layers located beneath the major surface for forming an intrinsic base, and a collector. The method also includes depositing a first oxide layer on the major surface, depositing a second oxide layer on the first oxide layer, and depositing an extrinsic base layer on the second oxide layer. The method further includes forming an emitter window through the extrinsic base layer. The method also includes removing at least a part of the second oxide layer to form a first cavity and forming an initial part of a base link region in the first cavity. The method also includes removing at least a part of the first oxide layer to form a second cavity and filling the second cavity to form a completed base link region.

Abstract: A method of making a bipolar transistor includes forming an extrinsic base layer over an oxide layer on a substrate. After an emitter window is opened in the extrinsic base layer, a sidewall spacer is formed on the sidewall of the emitter window. After forming the sidewall spacer, the oxide layer may be etched away to expose the substrate and to form a cavity extending beneath the extrinsic base layer. Subsequently, a monocrystalline emitter is formed in the emitter window whereby a peripheral part of the monocrystalline emitter fills the cavity. An anneal is then performed to form an emitter diffusion region and a base link region of the bipolar transistor.

Abstract: Disclosed is a SiGe, HBT, and method of manufacturing the same, comprising: an n-doped buried collector; a p-doped SiGe base layer, within a layer stack, the layer stack being over and in direct contact with the collector; an n-doped monocrystalline silicon emitter; an epitaxial silicon base contact layer over a second area of the layer stack; a polycrystalline silicon emitter contact layer; an oxide layer over a third area of the layer stack between the first and second areas, wherein the oxide layer and the n-doped monocrystalline silicon emitter are within a window, having sidewalls, in the epitaxial silicon layer; dielectric spacers on the sidewalls of the window and over the oxide layer, and providing electrical isolation between the epitaxial silicon layer and the polycrystalline silicon layer; the epitaxial silicon layer extending beneath the dielectric spacers on the sidewalls of the window.

Abstract: Disclosed is a method of manufacturing a silicon bipolar junction transistor device, the method comprising a sequence of steps including: depositing a polysilicon layer over at least a device region; depositing a dielectric layer over the polysilicon layer; patterning a photoresist layer and etching a window in the dielectric layer and the polysilicon layer through an opening in the photoresist layer; etching a SiGe layer stack through the window, to expose a silicon layer thereunder; patterning a further photoresist layer to expose at least the window; and doping the silicon layer by ion implantation through the window to form a base region. A corresponding BJT device is also disclosed.

Abstract: There is disclosed a metal-insulator-metal, MIM, capacitor. The MIM capacitor comprises a MIM stack formed within an interconnect metal layer. The interconnect metal layer is utilized as an electrical connection to a metal layer of the MIM stack.

Abstract: There is disclosed a metal-insulator-metal, MIM, capacitor. The MIM capacitor comprises a MIM stack formed within an interconnect metal layer. The interconnect metal layer is utilised as an electrical connection to a metal layer of the MIM stack.

Abstract: There is disclosed a metal-insulator-metal, MIM, capacitor. The MIM capacitor comprises a MIM stack formed within an interconnect metal layer. The interconnect metal layer is utilised as an electrical connection to a metal layer of the MIM stack.