Abstract: Acoustic resonators and filter devices. An acoustic resonator includes a piezoelectric plate having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm, and a conductor pattern on the front surface, the conductor pattern including a multi-mark interdigital transducer (IDT), fingers of the IDT on the diaphragm. A thickness between the front and back surfaces is greater than or equal to 200 nm and less than or equal to 1000 nm.

Abstract: An acoustic resonator is provided that includes a piezoelectric layer; an interdigital transducer on the piezoelectric layer and that includes a plurality of interleaved fingers; a lid disposed above the piezoelectric layer and defining a first cavity between the lid and the piezoelectric layer; a substrate disposed below the piezoelectric layer opposite the lid; and a second cavity between at least a portion of the piezoelectric layer and at least a portion of the substrate. Moreover, a height of the first cavity is greater than a pitch of at least two interleaved fingers of the plurality of interleaved fingers and at most four times greater than a height of the second cavity.

Abstract: A bulk acoustic resonator that includes a substrate, a piezoelectric plate, and an interdigital transducer (IDT) formed on the front surface of the piezoelectric plate. The IDT is configured to excite a primary shear acoustic mode within the piezoelectric plate. Also included is a half-lambda dielectric layer on at least one of the front surface or the back surface of the piezoelectric plate, where a thickness of the half-lambda dielectric layer is related to a wavelength of a fundamental shear bulk acoustic wave resonance in the half-lambda dielectric layer. The device further includes an acoustic Bragg reflector sandwiched between the surface of the substrate and the back surface of the piezoelectric plate, the acoustic Bragg reflector configured to reflect the primary acoustic mode. A top layer of the alternating layers of the acoustic Bragg reflector contacts the piezoelectric plate or the half-lambda dielectric layer.

Abstract: An acoustic resonator device is provided that includes a substrate having a surface; a piezoelectric layer attached to the surface of the substrate via an intermediate layer, the piezoelectric layer including a portion that is over a cavity in the intermediate layer; a conductor pattern including an interdigital transducer (IDT) on a surface of the piezoelectric layer and having interleaved fingers on the piezoelectric layer; a dielectric layer at least between the interleaved fingers of the IDT; and a dielectric cover over the IDT and the piezoelectric layer, the dielectric cover including a bottom surface, wherein at least a portion of the dielectric cover is attached to a portion of the conductor pattern, wherein the conductor pattern includes at least two metal layers including a first metal layer of the interleaved fingers of the IDT and a second metal layer attached to the dielectric cover.

Abstract: Acoustic resonators and filter devices. An acoustic resonator includes a piezoelectric plate having front and back surfaces, the back surface attached to a surface of a substrate, a portion of the piezoelectric plate forming a diaphragm spanning a cavity in the substrate, and a conductor pattern on the front surface, the conductor pattern including an interdigital transducer (IDT), interleaved fingers of the IDT on the diaphragm. A ratio of a mark of the interleaved fingers to a pitch of the interleaved fingers is greater than or equal to 0.12 and less than or equal to 0.3. A thickness between the front and back surfaces is greater than or equal to 200 nm and less than or equal to 1000 nm.

Abstract: A bandpass filter is provided that includes series acoustic resonators and shunt acoustic resonators. The shunt acoustic resonators include a first transversely-excited film bulk acoustic resonators (XBAR) that includes a diaphragm comprising a portion of a piezoelectric layer that is over a cavity of the first XBAR and a first interdigital transducer (IDT) on a surface of the piezoelectric layer. The first XBAR is connected between (i) a node directly between a first series acoustic resonator of the plurality of series acoustic resonators and the input port, and (ii) a ground of the bandpass filter. The series and shunt acoustic resonators include one or more solidly-mounted XBARs that includes a portion of a second piezoelectric layer that is solidly mounted over a substrate with a Bragg reflector disposed therebetween.

Abstract: An apparatus for filtering radio frequency signals is provided. The apparatus includes a substrate and a membrane coupled to the substrate that includes piezoelectric material. The apparatus also includes an interdigital transducer (IDT) coupled to the membrane and includes a plurality of interleaved fingers. The apparatus also includes a lid, in which the membrane is arranged between the substrate and the lid with a first cavity having a first height between the lid and a first main surface of the membrane and a second cavity having a second height between the substrate and a second main surface of the membrane that opposes the first main surface. Moreover, the first height between the lid and the first main surface of the membrane is greater than a pitch of at least one pair of interleaved fingers of the plurality of interleaved fingers and at most four times greater than the second height.

Abstract: Filter devices are disclosed. A filter device includes a piezoelectric plate comprising a supported portion, a first diaphragm, and a second diaphragm. The supported portion is attached to a substrate and the first and second diaphragms spans respective cavities in the substrate. A first interdigital transducer (IDT) has interleaved fingers on the first diaphragm. A second interdigital transducer (IDT) has interleaved fingers on the second diaphragm. A first dielectric layer is between the interleaved fingers of the first IDT, and a second dielectric layer is between the interleaved fingers of the second IDT. A thickness of the first dielectric layer is greater than a thickness of the second dielectric layer. The piezoelectric plate and the first and second IDTs are configured such that radio frequency signals applied to first and second IDTs excite primary shear acoustic modes in the respective diaphragms.

Abstract: An acoustic resonator device includes a substrate having a surface and a single-crystal piezoelectric plate bonded to the substrate surface. A portion of the piezoelectric plate forms a diaphragm that spans a cavity. A conductor pattern including an interdigital transducer (IDT) formed on a surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. A dielectric cover is disposed over the IDT and the plate, and the dielectric cover forms an air gap above the IDT and the plate.

Abstract: An acoustic wave device is provided that includes a piezoelectric layer and first and second resonators. The first resonator includes a first functional electrode and a first dielectric film on the piezoelectric layer. The second resonator includes a second functional electrode and a second dielectric film on the piezoelectric layer. The piezoelectric layer includes first and second resonator portions respectively including portions of the first and second resonators. Moreover, a resonant frequency of the first resonator is lower than that of the second resonator. A thickness of the first resonator portion is greater than that of the second resonator portion, and ts1/tp1?ts2/tp2 is satisfied, where tp1, tp2, ts1, and ts2 are respectively thicknesses of the first and second resonator portions and the first and second dielectric films.

Abstract: Acoustic resonators, acoustic filter devices and methods of making the same. An acoustic resonator device includes a piezoelectric layer having front and back surfaces, a high acoustic velocity layer on the back surface, and an interdigital transducer (IDT) on the front surface. The high acoustic velocity layer has a higher acoustic velocity than an acoustic velocity of the piezoelectric layer.

Abstract: Acoustic resonator devices is provided that includes a piezoelectric layer having a first surface and a second surface; and a first electrode and a second electrode on the first surface of the piezoelectric layer. At least one of the first electrode and second electrode has a side that extends at an angle relative to the first surface of the piezoelectric layer. Moreover, the angle is greater than or equal to 70 degrees and less than 90 degrees. Furthermore, a thickness of the piezoelectric layer is less than a distance between a center of the first electrode and a center of the second electrode.

Abstract: A filter device is provided that includes a substrate comprising a base and an intermediate layer; a piezoelectric layer coupled to the substrate; a first interdigital transducer (IDT) of a first bulk acoustic resonator device on the piezoelectric layer and having interleaved fingers over a first cavity the first bulk acoustic resonator device; a second IDT of a second bulk acoustic resonator device on the piezoelectric layer and having interleaved fingers over a second cavity of the second bulk acoustic resonator device; a first dielectric layer having a first thickness disposed on the piezoelectric layer and between the interleaved fingers of the first IDT; and a second dielectric layer having a second thickness disposed on the piezoelectric layer and between the interleaved fingers of the second IDT. Moreover, the first thickness is greater than the second thickness.

Abstract: There is disclosed acoustic resonators and filter devices. An acoustic resonator includes a single-crystal piezoelectric plate having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The piezoelectric plate and the IDT are configured such that a radio frequency signal applied to the IDT excites a primary shear acoustic mode in the diaphragm.

Abstract: An extraction cleaner may include a base, an upright body pivotally coupled to the base, a supply tank for supplying cleaning fluid to the base or a cleaning tool coupled to a hose, a recovery tank removably coupled to the upright body for recovering the cleaning fluid and/or debris through at least one inlet at the base and at least one inlet at the cleaning tool. A suction changeover valve may include a valve drive arrangement coupled between the base and the upright body to automatically provide suction at the cleaning tool when the upright body is in an upright position relative to the base, and suction at the base with the upright body is in a reclined position relative to the base.

Abstract: An acoustic resonator is provided that a substrate; a piezoelectric layer, a Bragg reflector layer disposed between the substrate and the piezoelectric layer, and an IDT at a surface of the piezoelectric layer that faces the Bragg reflector layer. The IDT includes a plurality of interleaved fingers extending from first and second busbars. Moreover, an etched region extends into at least a portion of the piezoelectric layer, the etched region including an area between the first busbar and a tip of at least one finger of the plurality of interleaved fingers extending from the second busbar in a first direction substantially parallel to a direction in which the interleaved fingers extend.

Abstract: Acoustic resonator devices and methods are disclosed. An acoustic resonator device includes a piezoelectric plate having opposed front and back surfaces. A first electrode and a second electrode are formed on the front surface of the piezoelectric plate, the first and second electrodes and the piezoelectric plate configured such that a radio frequency signal applied between the first and second electrodes excites a shear primary acoustic mode in the piezoelectric plate. The first electrode and the second electrode have trapezoidal cross-sectional shapes. A sidewall angle of at least one side surface of the first electrode and a sidewall angle of at least one side surface of the second electrode are greater than or equal to 70 degrees and less than or equal to 110 degrees.

Abstract: A bulk acoustic resonator is provided that includes a piezoelectric layer, and an interdigital transducer on a surface of the piezoelectric layer and including a plurality of interleaved fingers. At least one finger of the plurality of interleaved fingers comprises a first layer having a bottom surface that contacts the surface of the piezoelectric layer. The at least one finger includes a second layer having a bottom surface that contacts a top surface of the first layer. Moreover, a width of the bottom surface of the second layer is less than a width of the bottom surface of the first layer.

Abstract: A filter device is provided that includes a piezoelectric layer having a first portion having a first thickness and a second portion having a second thickness less than the first thickness; an acoustic multilayer reflector attached to the piezoelectric layer; and a conductor pattern on the first portion and the second portion of the piezoelectric layer. The conductor pattern includes a first IDT with interleaved fingers on the first portion, and a second IDT with interleaved fingers on the second portion. At least a portion of interleaved fingers of the second IDT has a width that is greater than or equal to 0.2 times a pitch of the second IDT and less than or equal to 0.3 times the pitch of the second IDT.

Abstract: Acoustic resonator devices, filter devices, and methods of fabrication are disclosed. An acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces. The back surface is attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The IDT is configured to excite a primary acoustic mode in the diaphragm in response to a radio frequency signal applied to the IDT. At least a portion of an edge of the diaphragm is at an oblique angle to the fingers.