Patents by Inventor Patrick Turner

Patrick Turner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220247381
    Abstract: A filter device with multiple piezoelectric plate thicknesses if fabricated on a single chip by bonding a piezoelectric plate to a surface of a substrate having swimming pool shunt and series cavities. Non-selected areas of the plate have a thickness for shunt resonators and form shunt membranes of the plate that span the swimming pool shunt cavities. Selected areas of a back surface of the plate have a thickness for series resonators and form series membranes of the plate that span the swimming pool series cavities but not the swimming pool shunt cavities. The thickness for series resonators is thinner than that for shunt resonators. Shunt interdigital transducers (IDTs) are on a front surface of the plate over the swimming pool shunt cavities; and series IDTs are on a front surface of the plate over the swimming pool series cavities.
    Type: Application
    Filed: June 9, 2021
    Publication date: August 4, 2022
    Inventors: Andrew Kay, Patrick Turner, Albert Cardona
  • Publication number: 20220247373
    Abstract: An acoustic resonator is fabricated with multiple piezoelectric plate thicknesses on a single chip. After conductor patterns are formed on a piezoelectric plate, the plate is bonded to a sacrificial substrate, with the conductor patterns facing the sacrificial substrate. The piezoelectric plate is then thinned to a desired thickness for shunt resonators. A mask is applied to the surface of the plate and selected areas of the piezoelectric plate are further thinned to a desired thickness for series resonators to form a thinned piezoelectric plate. A substrate with swimming pool cavities is bonded to the thinned piezoelectric plate, and the sacrificial substrate is removed.
    Type: Application
    Filed: June 4, 2021
    Publication date: August 4, 2022
    Inventors: Andrew Kay, Patrick Turner, Albert Cardona
  • Publication number: 20220224310
    Abstract: Acoustic resonator devices and methods are disclosed. An acoustic resonator device includes a substrate having a surface and a piezoelectric plate having front and back surfaces. The back surface of the piezoelectric plate is attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. One or more diaphragm support pedestals extend between the substrate and the diaphragm within the cavity.
    Type: Application
    Filed: March 31, 2022
    Publication date: July 14, 2022
    Inventors: Andrew Kay, Ventsislav Yantchev, Patrick Turner
  • Publication number: 20220209740
    Abstract: Acoustic resonator devices and acoustic filter devices. An acoustic resonator includes a piezoelectric plate having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm, and a conductor pattern on the front surface, the conductor pattern comprising an interdigital transducer (IDT), interleaved fingers of the IDT on the diaphragm. A ratio of a mark of the interleaved fingers to a pitch of the interleaved fingers is greater than or equal to 0.12 and less than or equal to 0.3. A thickness of the interleaved fingers is greater than or equal to 0.85 times a thickness of the piezoelectric plate and less than or equal to 2.5 times the thickness of the piezoelectric plate.
    Type: Application
    Filed: March 16, 2022
    Publication date: June 30, 2022
    Inventors: Bryant Garcia, Ventsislav Yantchev, Patrick Turner, Viktor Plesski, Julius Koskela, Soumya Yandrapalli, Neal Fenzi, Robert B. Hammond
  • Publication number: 20220200563
    Abstract: Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a substrate having a trap-rich region adjacent to a surface and a single-crystal piezoelectric plate having parallel front and back surfaces, the back surface attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The single-crystal piezoelectric plate and the IDT are configured such that a radio frequency signal applied to the IDT excites a shear primary acoustic mode within the diaphragm.
    Type: Application
    Filed: March 10, 2022
    Publication date: June 23, 2022
    Inventor: Patrick Turner
  • Publication number: 20220182038
    Abstract: An acoustic resonator is fabricated by forming a patterned first photoresist mask on a piezoelectric plate at locations of a desired interdigital transducer (IDT) pattern. An etch-stop layer is then deposited on the plate and first photoresist mask. The first photoresist mask is removed to remove parts of the etch-stop and expose the plate. An IDT conductor material is deposited on the etch stop and the exposed plate. A patterned second photoresist mask is then formed on the conductor material at locations of the IDT pattern. The conductor material is then etched over and to the etch-stop to form the IDT pattern which has interleaved fingers on a diaphragm to span a substrate cavity. A portion of the plate and the etch-stop form the diaphragm. The etch-stop and photoresist mask are impervious to this etch. The second photoresist mask is removed to leave the IDT pattern.
    Type: Application
    Filed: February 17, 2022
    Publication date: June 9, 2022
    Inventors: Patrick Turner, Ryo Wakabayashi
  • Publication number: 20220149814
    Abstract: Acoustic resonators and filter devices. An acoustic resonator includes a piezoelectric plate having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm, a conductor pattern on the front surface, the conductor pattern including an interdigital transducer (IDT), fingers of the IDT on the diaphragm, and a front-side dielectric layer on the front surface of the piezoelectric plate between the interleaved fingers. A resonant frequency is determined, in part, by a thickness of the front-side dielectric layer. A ratio of a mark of the interleaved fingers to a pitch of the interleaved fingers is greater than or equal to 0.12 and less than or equal to 0.3.
    Type: Application
    Filed: January 26, 2022
    Publication date: May 12, 2022
    Inventors: Bryant Garcia, Julius Koskela, Robert B. Hammond, Patrick Turner, Viktor Plesski, Ventsislav Yantchev, Soumya Yandrapalli
  • Patent number: 11323091
    Abstract: Acoustic resonator devices and methods are disclosed. An acoustic resonator device includes a substrate having a surface and a piezoelectric plate having front and back surfaces. The back surface of the piezoelectric plate is attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. One or more diaphragm support pedestals extend between the substrate and the diaphragm within the cavity.
    Type: Grant
    Filed: September 23, 2020
    Date of Patent: May 3, 2022
    Assignee: Resonant Inc.
    Inventors: Andrew Kay, Ventsislav Yantchev, Patrick Turner
  • Patent number: 11323089
    Abstract: Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a substrate having a trap-rich region adjacent to a surface and a single-crystal piezoelectric plate having parallel front and back surfaces, the back surface attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The single-crystal piezoelectric plate and the IDT are configured such that a radio frequency signal applied to the IDT excites a shear primary acoustic mode within the diaphragm.
    Type: Grant
    Filed: August 10, 2020
    Date of Patent: May 3, 2022
    Assignee: Resonant Inc.
    Inventor: Patrick Turner
  • Publication number: 20220131525
    Abstract: Acoustic resonators and filter devices. An acoustic resonator includes a piezoelectric plate having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm, and a conductor pattern on the front surface, the conductor pattern including a multi-mark interdigital transducer (IDT), fingers of the IDT on the diaphragm. A thickness between the front and back surfaces is greater than or equal to 200 nm and less than or equal to 1000 nm.
    Type: Application
    Filed: December 30, 2021
    Publication date: April 28, 2022
    Inventors: Greg Dyer, Bryant Garcia, Julius Koskela, Robert B. Hammond, Patrick Turner, Viktor Plesski, Ventsislav Yantchev, Soumya Yandrapalli
  • Publication number: 20220131526
    Abstract: Acoustic resonators and filter devices. An acoustic resonator including a piezoelectric plate having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm, and a conductor pattern on the front surface, the conductor pattern including an interdigital transducer (IDT), fingers of the IDT on the diaphragm. A thickness between the front and back surfaces is greater than or equal to 200 nm and less than or equal to 1000 nm. The IDT comprises a first portion having a first pitch and a first mark and a second portion having a second pitch and a second mark not equal to the first pitch and first mark.
    Type: Application
    Filed: December 30, 2021
    Publication date: April 28, 2022
    Inventors: Bryant Garcia, Robert B. Hammond, Patrick Turner, Viktor Plesski, Ventsislav Yantchev, Soumya Yandrapalli
  • Publication number: 20220123723
    Abstract: Acoustic resonators and filter devices. An acoustic resonator includes a piezoelectric plate having front and back surfaces, the back surface attached to a surface of a substrate, a portion of the piezoelectric plate forming a diaphragm spanning a cavity in the substrate, and a conductor pattern on the front surface, the conductor pattern including an interdigital transducer (IDT), interleaved fingers of the IDT on the diaphragm. A ratio of a mark of the interleaved fingers to a pitch of the interleaved fingers is greater than or equal to 0.12 and less than or equal to 0.3. A thickness between the front and back surfaces is greater than or equal to 200 nm and less than or equal to 1000 nm.
    Type: Application
    Filed: December 30, 2021
    Publication date: April 21, 2022
    Inventors: Bryant Garcia, Julius Koskela, Robert B. Hammond, Patrick Turner, Viktor Plesski, Ventsislav Yantchev, Soumya Yandrapalli
  • Publication number: 20220123722
    Abstract: Acoustic resonators and filter devices. An acoustic resonator includes a piezoelectric plate having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm, and a conductor pattern on the front surface, the conductor pattern including a multi-mark interdigital transducer (IDT), with fingers of the IDT on the diaphragm. A thickness of the interleaved fingers is greater than or equal to 0.85 times a thickness of the piezoelectric plate and less than or equal to 2.5 times the thickness of the piezoelectric plate.
    Type: Application
    Filed: December 28, 2021
    Publication date: April 21, 2022
    Inventors: Greg Dyer, Bryant Garcia, Julius Koskela, Robert B. Hammond, Patrick Turner, Viktor Plesski, Ventsislav Yantchev, Neal Fenzi
  • Publication number: 20220123721
    Abstract: Acoustic resonators and filter devices. An acoustic resonator includes a piezoelectric plate having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm, and a conductor pattern on the front surface, the conductor pattern including an interdigital transducer (IDT), fingers of the IDT on the diaphragm. A thickness of the interleaved fingers is greater than or equal to 0.85 times a thickness of the piezoelectric plate and less than or equal to 2.5 times the thickness of the piezoelectric plate. The IDT comprises a first portion having a first pitch and a first mark and a second portion having a second pitch and a second mark not equal to the first pitch and first mark.
    Type: Application
    Filed: December 28, 2021
    Publication date: April 21, 2022
    Inventors: Bryant Garcia, Robert B. Hammond, Patrick Turner, Viktor Plesski, Ventsislav Yantchev, Neal Fenzi
  • Publication number: 20220123720
    Abstract: Acoustic resonators and filter devices. An acoustic resonator includes a piezoelectric plate having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm, and a conductor pattern on the front surface, the conductor pattern including an interdigital transducer (IDT), interleaved fingers of the IDT on the diaphragm. A ratio of a mark of the interleaved fingers to a pitch of the interleaved fingers is greater than or equal to 0.12 and less than or equal to 0.3. The pitch of the interleaved fingers is greater than or equal to 6 times a thickness of the piezoelectric plate and less than or equal to 12.5 times the thickness of the piezoelectric plate.
    Type: Application
    Filed: December 24, 2021
    Publication date: April 21, 2022
    Inventors: Bryant Garcia, Ventsislav Yantchev, Patrick Turner, Viktor Plesski, Julius Koskela, Soumya Yandrapalli, Neal Fenzi, Robert B. Hammond
  • Publication number: 20220123730
    Abstract: Filters and methods of making filters are disclosed. A filter device includes a substrate, a piezoelectric plate, and an acoustic Bragg reflector between a surface of the substrate and a back surface of the piezoelectric plate. A first portion of the piezoelectric plate has a first thickness, and a second portion of the piezoelectric plate has a second thickness less than the first thickness. A conductor pattern on front surfaces of the first and second portions of the piezoelectric plate includes a first interdigital transducer (IDT) with interleaved fingers on the first portion, and a second IDT with interleaved fingers on the second portion.
    Type: Application
    Filed: December 28, 2021
    Publication date: April 21, 2022
    Inventors: Ventsislav Yantchev, Patrick Turner, Robert B. Hammond
  • Publication number: 20220116015
    Abstract: Acoustic resonator devices and acoustic filter devices. An acoustic resonator includes a piezoelectric plate having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm, and a conductor pattern on the front surface, the conductor pattern comprising an interdigital transducer (IDT), interleaved fingers of the IDT on the diaphragm. A ratio of a mark of the interleaved fingers to a pitch of the interleaved fingers is greater than or equal to 0.12 and less than or equal to 0.3. A thickness of the interleaved fingers is greater than or equal to 0.85 times a thickness of the piezoelectric plate and less than or equal to 2.5 times the thickness of the piezoelectric plate.
    Type: Application
    Filed: December 23, 2021
    Publication date: April 14, 2022
    Inventors: Bryant Garcia, Ventsislav Yantchev, Patrick Turner, Viktor Plesski, Julius Koskela, Soumya Yandrapalli, Neal Fenzi, Robert B. Hammond
  • Publication number: 20220103160
    Abstract: A filter includes first and second shunt resonators, at least one series resonator connected to the first and second shunt resonators in a ladder filter circuit, and a first ground contact pad. The first shunt resonator has two or more first sub-resonators and the second shunt resonator has two or more second sub-resonators. At least one first sub-resonator and at least one, but less than all, of the two or more second sub-resonators are connected to the first ground contact pad.
    Type: Application
    Filed: December 9, 2021
    Publication date: March 31, 2022
    Inventors: Doug Jachowski, Ventsislav Yantchev, Bryant Garcia, Patrick Turner
  • Publication number: 20220094336
    Abstract: Methods of fabricating filter devices are disclosed. A back surface of a piezoelectric plate having a first thickness is attached to a substrate. The front surface of the piezoelectric plate is selectively etched to thin a portion of the piezoelectric plate from the first thickness to a second thickness less than the first thickness. Cavities are formed in the substrate such that portions of the piezoelectric plate form a plurality of diaphragms spanning respective cavities. A conductor pattern is formed on the front surface. The conductor pattern includes a first interdigital transducer (IDT) with interleaved fingers on a first diaphragm having the first thickness and a second IDT with interleaved fingers on a second diaphragm having the second thickness.
    Type: Application
    Filed: December 3, 2021
    Publication date: March 24, 2022
    Inventors: Chris O'Brien, Andrew Kay, Albert Cardona, Ventsislav Yantchev, Patrick Turner, Robert B. Hammond, Dylan Kelly
  • Patent number: 11283424
    Abstract: An acoustic resonator is fabricated by forming a patterned first photoresist mask on a piezoelectric plate at locations of a desired interdigital transducer (IDT) pattern. An etch-stop layer is then deposited on the plate and first photoresist mask. The first photoresist mask is removed to remove parts of the etch-stop and expose the plate. An IDT conductor material is deposited on the etch stop and the exposed plate. A patterned second photoresist mask is then formed on the conductor material at locations of the IDT pattern. The conductor material is then etched over and to the etch-stop to form the IDT pattern which has interleaved fingers on a diaphragm to span a substrate cavity. A portion of the plate and the etch-stop form the diaphragm. The etch-stop and photoresist mask are impervious to this etch. The second photoresist mask is removed to leave the IDT pattern.
    Type: Grant
    Filed: November 9, 2020
    Date of Patent: March 22, 2022
    Assignee: Resonant Inc.
    Inventors: Patrick Turner, Ryo Wakabayashi