Patents by Inventor Patrick Wieland

Patrick Wieland has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sputtering target and method/apparatus for cooling the target
    Publication number: 20070089982
    Abstract: A sputtering target includes an outer target tube, an inner support tube of rectangular cross-sectional shape supporting a magnet carrier extending along substantially the entire length of the inner support tube; and a water cooling circuit including at least one passageway within said inner support tube with an inlet at one end thereof adapted to receive cooling water from an external source, at least one outlet aperture at an opposite end thereof opening to a chamber radially between the inner support tube and the outer target tube; and at least one cooling water outlet at the one end of the inner support tube.
    Type: Application
    Filed: October 24, 2005
    Publication date: April 26, 2007
    Inventors: Hendryk Richert, Patrick Wieland, Armin Schmidt, Gerald Janicke, Roland Weidl, Bernd Gruenler, Hans-Jurgen Tiller, Uwe Kriltz