Abstract: An actuator, configured to move a first object with respect to a second object, that includes a first body having an annular ring, a second body, arranged movably with respect to the first body, having a longitudinal shaft at least partially disposed within the annular ring, and at least one spring device, arranged between the first body and the second body, wherein the at least one spring device is configured to guide relative movements between the first body and the second body in a range of movement, and the at least one spring device has two or more leaf springs, wherein each of the two or more leaf springs is connected to the first body and to the second body, and wherein at least one of the leaf springs is in a non-planar state when the spring device is in an equilibrium position.

Abstract: An actuator, configured to move a first object with respect to a second object, that includes a first body having an annular ring, a second body, arranged movably with respect to the first body, having a longitudinal shaft at least partially disposed within the annular ring, and at least one spring device, arranged between the first body and the second body, wherein the at least one spring device is configured to guide relative movements between the first body and the second body in a range of movement, and the at least one spring device has two or more leaf springs, wherein each of the two or more leaf springs is connected to the first body and to the second body, and wherein at least one of the leaf springs is in a non-planar state when the spring device is in an equilibrium position.

Abstract: A lithographic apparatus comprising a projection system configured to project a patterned radiation beam to form an exposure area on a substrate held on a substrate table, the lithographic apparatus further comprising a cooling apparatus for cooling the substrate, wherein the cooling apparatus comprises a cooling element located above the substrate table and adjacent to the exposure area, the cooling element being configured to remove heat from the substrate.

Abstract: The invention pertains to a stage system, and to a lithographic apparatus and a method for manufacturing a device in which a stage system is used. In the stage system a positioning system is provided comprising an actuator adapted to position an object table. The actuator comprises a magnet assembly and a coil assembly. The magnet assembly comprises a first magnetic body and a second magnetic body, which are in use subjected to a internal magnetic force. The magnet assembly has a separate interface for connecting each magnetic body to the object table separately. The magnet assembly further comprises a spacer device, which holds the first and second magnetic body at a relative distance to each other in at least the direction of the internal magnetic force.

Abstract: The invention pertains to a stage system, and to a lithographic apparatus and a method for manufacturing a device in which a stage system is used. In the stage system a positioning system is provided comprising an actuator adapted to position an object table. The actuator comprises a magnet assembly and a coil assembly. The magnet assembly comprises a first magnetic body and a second magnetic body, which are in use subjected to a internal magnetic force. The magnet assembly has a separate interface for connecting each magnetic body to the object table separately. The magnet assembly further comprises a spacer device, which holds the first and second magnetic body at a relative distance to each other in at least the direction of the internal magnetic force.

Abstract: A lithographic apparatus comprising a projection system configured to project a patterned radiation beam to form an exposure area on a substrate held on a substrate table, the lithographic apparatus further comprising a cooling apparatus for cooling the substrate, wherein the cooling apparatus comprises a cooling element located above the substrate table and adjacent to the exposure area, the cooling element being configured to remove heat from the substrate.

Abstract: The invention relates to a magnetic resonance imaging (MRI apparatus comprising a main magnetic system for generating a main magnetic field in an examination volume which is enclosed by the main magnetic system. The MRI apparatus also comprises a magnetic gradient coil system comprising gradient coils. The gradient coil system is accommodated between the main magnetic system and the examination volume in order to generate gradients of the main magnetic field. The MRI apparatus also comprises a vacuum space. According to the invention, the gradient coil system only partly adjoins the vacuum space, that is, by way of its side which faces the vibrations caused by the gradient coil system in operation, while, in a specific embodiment, the end sides of the gradient coil system are available for electrical and mechanical connections outside the vacuum space.

Abstract: The invention relates to an open magnetic resonance imaging (MRI) magnet system (1) for use in a medical imaging system. The open MRI magnet system has two main coil units which are accomodated, at some distance from each other, in a first housing (2) and in a second housing (3), respectively. Between the two housings, an imaging volume (6) is present wherein a patient to be examined is placed. A gradient coil unit (9, 10) facing the imaging volume is present near a side of each of the two housings. Functional connections of the gradient coil units (9, 10), such as electrical power supply lines (13, 14) and cooling channels (15, 16) are provided in a central passage (4, 5) which is present in each of the two housings. As a result, these functional connections do not reduce the space in the imaging volume available for the patient.

Abstract: The invention relates to a magnetic resonance imaging (MRI) system (1) comprising an examination volume (11), a main magnet system (13) for generating a main magnetic field (B0) in the examination volume in a Z-direction, a gradient magnet system (19) for generating gradients of the main magnetic field, and an anti-vibration system (33) for reducing vibrations of the gradient magnet system caused by a mechanical load (MX, MY) exerted on the gradient magnet system as a result of electromagnetic interaction between the main magnetic field and electrical currents in the gradient magnet system. According to the invention the anti-vibration system (33) comprises a balance member (39), which is coupled to the gradient magnet system (19) by means of an actuator system (51) and a coupling device (49) allowing displacements of the balance member relative to the gradient magnet system.

Abstract: The invention relates to a magnetic resonance imaging (MRI) system (1) comprising an examination volume (11), a main magnet system (17) for generating a magnetic field (B0) in the examination volume, and a gradient magnet system (25) for generating altering gradients of the magnetic field in the examination volume. The gradient magnet system is accommodated in a housing (31) having a main wall (33) facing the examination volume and a substantially conical wall (35) facing away from the examination volume. The main wall and the conical wall enclose a substantially angular tip portion (47) of the housing. In order to limit the level of the acoustic vibrations in and around the MRI system (1) caused by mechanical vibrations of the angular tip portion (47), the MRI system comprises a plurality of acoustic resonators (55) which each comprise an elongate resonance volume (57) with an open end (59) and a closed end (61) and a length (L) between the open end and the closed end.