Abstract: A miniature nozzle structure, comprising an essentially flat member having a top and a bottom surface, and having a first opening provided on the bottom surface, and a second opening provided on the top surface, thereby forming a channel between the openings, and a transition region between the openings. The diameter of the first opening is larger than the diameter of the second opening. The geometrical shapes of the first and second openings, respectively, are different. The diameter of the channel is reduced in the direction from the first opening towards the second opening and up to the transition region, the diameter of the channel being constant from the transition region and to the second opening. The intersection between the different geometrical shapes in the transition region corresponds to a true geometrical intersection. A method for making holes is also disclosed, the method comprising lithographic techniques.