Abstract: Various examples include a substrate pre-aligner system that can align substrates by detecting a fiducial on the substrate, determine an amount of bow in the substrate, and determine other characteristics of the substrate. In one example, by imaging both a 0-degree orientation and after a single 180-degree rotation of the substrate, the pre-aligner of the disclosed subject-matter can determine, for example, a location of the fiducial and bow in the substrate. In other embodiments, multiple cameras are used to capture images of the substrate substantially simultaneously and determine, for example, a location of the fiducial and bow in the substrate. The multiple camera embodiment can also allow a higher throughput of substrates as compared with the 0-degree to 180-degree embodiment. Other systems and methods are also disclosed.

Abstract: Various examples include a system and network to map of substrates within a substrate carrier (e.g., such as silicon wafers within a wafer cassette), and a classification of a state of each substrate, as well as the carrier in which the substrates are placed. In various examples provided herein, an image acquisition system, such as a camera, acquires multiple images of the substrates within the carrier. The image or images are then processed with a deep-convolutional neural-network to classify a state of the substrate relative to a substrate slot including empty slots, occupied slots (e.g., properly loaded slots), double-loaded slots, cross-slotted, and protruded (where a substrate is not fully loaded into a slot).

Abstract: A Halbach-based magnetic position sensor includes a Halbach magnetic element having a spatially rotating magnetization pattern along an extent, producing a focused and augmented magnetic field on a working side relative to a magnetic field on a non-working side. A sensing element on the working side is co-configured with the Halbach magnetic element for relative motion therebetween. The sensing element includes encoder circuitry and magnetic sensors that sense the working-side magnetic field and produce corresponding sensor signals. The encoder circuitry translates the sensor signals into position signals indicating relative position between the sensing element and the Halbach magnetic element. In one example the Halbach magnetic element has a closed curve (e.g., substantially circular or ring-like) configuration.

Abstract: An opto-magnetic rotary position encoder includes a polarization optical encoder and a magnetic encoder, both configured for on-axis placement and operation with respect to a rotational axis of a rotating component. A polarization sensor digital control block and a magnetic sensor digital control block are configured and operative to combine polarizer channel position data and magnetic channel position data in a manner providing for one or more of (1) redundancy, (2) calibration, (3) monitoring performance of one channel in relation to the other channel, or (4) compensation or correction of one channel based on the other channel.

Abstract: Various examples include a system and network to map of substrates within a substrate carrier (e.g., such as silicon wafers within a wafer cassette), and a classification of a state of each substrate, as well as the carrier in which the substrates are placed. In various examples provided herein, an image acquisition system, such as a camera, acquires multiple images of the substrates within the carrier. The image or images are then processed with a deep-convolutional neural-network to classify a state of the substrate relative to a substrate slot including empty slots, occupied slots (e.g., properly loaded slots), double-loaded slots, cross-slotted, and protruded (where a substrate is not fully loaded into a slot).

Abstract: A Halbach-based magnetic position sensor includes a Halbach magnetic element having a spatially rotating magnetization pattern along an extent, producing a focused and augmented magnetic field on a working side relative to a magnetic field on a non-working side. A sensing element on the working side is co-configured with the Halbach magnetic element for relative motion therebetween. The sensing element includes encoder circuitry and magnetic sensors that sense the working-side magnetic field and produce corresponding sensor signals. The encoder circuitry translates the sensor signals into position signals indicating relative position between the sensing element and the Halbach magnetic element. In one example the Halbach magnetic element has a closed curve (e.g., substantially circular or ring-like) configuration.

Abstract: Various examples described herein include image-processing tasks of image data used for defect detection and comparison of features on substrates. At least one of a deep-convnet-based and a transformer-based backbone network (a common backbone) that is arranged to convert various types of raw-image data into features that can, in turn, be used by smaller neural networks to perform final calculations of specific tasks. The smaller neural networks perform, for example, final defect-detections, die-to-die image comparisons, anomaly detection, and customer-specific tasks in a fabrication facility. The common-backbone network can initially be trained using self-supervised learning based on the raw-image data, and then transfer learning can be used to train a final application of the task-specific networks. Other systems and methods are also disclosed.

Abstract: Various examples include a substrate pre-aligner system that can align substrates by detecting a fiducial on the substrate, determine an amount of bow in the substrate, and determine other characteristics of the substrate. In one example, by imaging both a 0-degree orientation and after a single 180-degree rotation of the substrate, the pre-aligner of the disclosed subject-matter can determine, for example, a location of the fiducial and bow in the substrate. In other embodiments, multiple cameras are used to capture images of the substrate substantially simultaneously and determine, for example, a location of the fiducial and bow in the substrate. The multiple camera embodiment can also allow a higher throughput of substrates as compared with the 0-degree to 180-degree embodiment. Other systems and methods are also disclosed.

Abstract: A Halbach-based magnetic position sensor includes a Halbach magnetic element having a spatially rotating magnetization pattern along an extent, producing a focused and augmented magnetic field on a working side relative to a magnetic field on a non-working side. A sensing element on the working side is co-configured with the Halbach magnetic element for relative motion therebetween. The sensing element includes encoder circuitry and magnetic sensors that sense the working-side magnetic field and produce corresponding sensor signals. The encoder circuitry translates the sensor signals into position signals indicating relative position between the sensing element and the Halbach magnetic element. In one example the Halbach magnetic element has a closed curve (e.g., substantially circular or ring-like) configuration.

Abstract: Various examples include a system and network to map of substrates within a substrate carrier (e.g., such as silicon wafers within a wafer cassette), and a classification of a state of each substrate, as well as the carrier in which the substrates are placed. In various examples provided herein, an image acquisition system, such as a camera, acquires multiple images of the substrates within the carrier. The image or images are then processed with a deep-convolutional neural-network to classify a state of the substrate relative to a substrate slot including empty slots, occupied slots (e.g., properly loaded slots), double-loaded slots, cross-slotted, and protruded (where a substrate is not fully loaded into a slot).

Abstract: An opto-magnetic rotary position encoder includes a polarization optical encoder and a magnetic encoder, both configured for on-axis placement and operation with respect to a rotational axis of a rotating component. A polarization sensor digital control block and a magnetic sensor digital control block are configured and operative to combine polarizer channel position data and magnetic channel position data in a manner providing for one or more of (1) redundancy, (2) calibration, (3) monitoring performance of one channel in relation to the other channel, or (4) compensation or correction of one channel based on the other channel.

Abstract: A communication system that involves superimposing data over DC power. The data takes the form of high bitrate digital signals, where the bitrate is much higher than 0 Hz (DC); this separation allows the AC signal to be easily separated from the DC power. The physical system consists of a two conductor cable, and integration is modular, in that multiple slaves can be connected and disconnected to a master through a routing bus also comprising two conductors. The master can communicate bi-directionally with the slave(s), and the data is encoded using DC-balanced encoding in an FPGA. The data is sent to and from a differential signaling transmitter/receiver pairs at each end of the cable. The system is may be used with position sensors, and provides the benefit of reducing cable costs and sensor size due to the decrease in number of conductors and elimination of power components in the sensor.

Abstract: A communication system that involves superimposing data over DC power. The data takes the form of high bitrate digital signals, where the bitrate is much higher than 0 Hz (DC); this separation allows the AC signal to be easily separated from the DC power. The physical system consists of a two conductor cable, and integration is modular, in that multiple slaves can be connected and disconnected to a master through a routing bus also comprising two conductors. The master can communicate bi-directionally with the slave(s), and the data is encoded using DC-balanced encoding in an FPGA. The data is sent to and from a differential signaling transmitter/receiver pairs at each end of the cable. The system is may be used with position sensors, and provides the benefit of reducing cable costs and sensor size due to the decrease in number of conductors and elimination of power components in the sensor.

Abstract: Phase estimation apparatus processes sensor signals from sensors to estimate a phase of a periodically varying state of an object, such as position of a moving object. A phase estimation processor applies a first correlation calculation to simultaneously collected samples of the sensor signals to generate first quadrature values, where the first correlation calculation employs variable calculation values, and applies a phase calculation to the first quadrature values to generate the phase estimation. A pre-quadrature calibration circuit applies respective second correlation calculations to respective sequences of samples of the sensor signals individually to generate second quadrature values for each of the sensor signals, and applies phase and/or magnitude calculations to the sets of second quadrature values to generate the variable calculation values for the first correlation calculation, thereby compensate for the error component and improve accuracy of the estimated phase.

Abstract: Phase estimation apparatus processes sensor signals from sensors to estimate a phase of a periodically varying state of an object, such as position of a moving object. A phase estimation processor applies a first correlation calculation to simultaneously collected samples of the sensor signals to generate first quadrature values, where the first correlation calculation employs variable calculation values, and applies a phase calculation to the first quadrature values to generate the phase estimation. A pre-quadrature calibration circuit applies respective second correlation calculations to respective sequences of samples of the sensor signals individually to generate second quadrature values for each of the sensor signals, and applies phase and/or magnitude calculations to the sets of second quadrature values to generate the variable calculation values for the first correlation calculation, thereby compensate for the error component and improve accuracy of the estimated phase.

Abstract: A position encoder provides one or more trigger outputs based on position signals developed within the encoder, in addition to traditional position output signals used by other system components such as a motion controller. The trigger outputs may be used directly by a triggered device, bypassing the motion controller and obviating any separate trigger generation electronics. The trigger output(s) can be fully synchronous with the encoder's position output signal(s) with essentially no latency or jitter, increasing accuracy and providing improved system performance. The trigger functionality can be incorporated in a variety of encoder types (e.g., absolute and incremental) and technologies (optical, magnetic, inductive etc.), and used in conjunction with different position output signal formats (e.g., quadrature, serial).

Abstract: A position encoder provides one or more trigger outputs based on position signals developed within the encoder, in addition to traditional position output signals used by other system components such as a motion controller. The trigger outputs may be used directly by a triggered device, bypassing the motion controller and obviating any separate trigger generation electronics. The trigger output(s) can be fully synchronous with the encoder's position output signal(s) with essentially no latency or jitter, increasing accuracy and providing improved system performance. The trigger functionality can be incorporated in a variety of encoder types (e.g., absolute and incremental) and technologies (optical, magnetic, inductive etc.), and used in conjunction with different position output signal formats (e.g., quadrature, serial).

Abstract: A processing apparatus calculates and applies calibrations to sensors that produce quasi-sinusoidal, quadrature signals, using fixed or programmable electronic circuits, a circuit to calculate the phase and magnitude corresponding to the two input (quadrature) signals, and a circuit for accumulating the number of cycles of the input signals. The apparatus also includes a circuit to generate Gain, Offset, and Phase calibration coefficients by comparing a phase space position of a measured phasor with the position of an idealized phasor whose locus in phase space is a circle of predetermined radius with no offset. The calculation of the coefficients occurs without user intervention, according to a pre-programmed rule or rules.

Abstract: A processing apparatus calculates and applies calibrations to sensors that produce quasi-sinusoidal, quadrature signals, using fixed or programmable electronic circuits, a circuit to calculate the phase and magnitude corresponding to the two input (quadrature) signals, and a circuit for accumulating the number of cycles of the input signals. The apparatus also includes a circuit to generate Gain, Offset, and Phase calibration coefficients by comparing a phase space position of a measured phasor with the position of an idealized phasor whose locus in phase space is a circle of predetermined radius with no offset. The calculation of the coefficients occurs without user intervention, according to a pre-programmed rule or rules.

Abstract: A processing apparatus calculates and applies calibrations to sensors that produce quasi-sinusoidal, quadrature signals, using fixed or programmable electronic circuits, a circuit to calculate the phase and magnitude corresponding to the two input (quadrature) signals, and a circuit for accumulating the number of cycles of the input signals. The apparatus also includes a circuit to generate Gain, Offset, and Phase calibration coefficients by comparing a phase space position of a measured phasor with the position of an idealized phasor whose locus in phase space is a circle of predetermined radius with no offset. The calculation of the coefficients occurs without user intervention, according to a pre-programmed rule or rules. The apparatus also includes a circuit to apply the Gain, Offset, and Phase calibration coefficients to the measured quadrature signals xi and yi according to predetermined formulae using scaling coefficients, offset coefficients and a phase coefficient.