Patents by Inventor Paul Andrew Doyle

Paul Andrew Doyle has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Stabilizing a substrate using a vacuum preload air bearing chuck
    Patent number: 7607647
    Abstract: Substrate processing method and apparatus are disclosed. The substrate processing apparatus includes a non-contact air bearing chuck with a vacuum preload.
    Type: Grant
    Filed: March 20, 2007
    Date of Patent: October 27, 2009
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Guoheng Zhao, Alexander Belyaev, Christian H. Wolters, Paul Andrew Doyle, Howard W. Dando, Mehdi Vaez-Iravani
  • STABILIZING A SUBSTRATE USING A VACUUM PRELOAD AIR BEARING CHUCK
    Publication number: 20080229811
    Abstract: Substrate processing method and apparatus are disclosed. The substrate processing apparatus includes a non-contact air bearing chuck with a vacuum preload.
    Type: Application
    Filed: March 20, 2007
    Publication date: September 25, 2008
    Applicant: KLA-Tencor Technologies Corporation
    Inventors: Guoheng Zhao, Alexander Belyaev, Christian H. Wolters, Paul Andrew Doyle, Howard W. Dando, Mehdi Vaez-Iravani