Patents by Inventor Paul Andrew Haworth

Paul Andrew Haworth has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Elastomeric seal
    Patent number: 11041567
    Abstract: An elastomeric seal for use in semiconductor manufacturing apparatus comprising an ink on at least a portion of the upper surface thereof, wherein the ink comprises a barrier material, the barrier material being operable to prevent or reduce degradation of the elastomeric seal from ultraviolet (UV) radiation.
    Type: Grant
    Filed: May 6, 2016
    Date of Patent: June 22, 2021
    Assignee: PRECISION POLYMER ENGINEERING LTD.
    Inventors: Murat Gulcur, Christopher Julian Thornton, Paul Andrew Haworth, John Edward Kerwin
  • AN ELASTOMERIC SEAL
    Publication number: 20190154155
    Abstract: An elastomeric seal for use in semiconductor manufacturing apparatus comprising an ink on at least a portion of the upper surface thereof, wherein the ink comprises a barrier material, the barrier material being operable to prevent or reduce degradation of the elastomeric seal from ultraviolet (UV) radiation.
    Type: Application
    Filed: May 6, 2016
    Publication date: May 23, 2019
    Applicant: PRECISION POLYMER ENGINEERING LTD.
    Inventors: Murat GULCUR, Christopher Julian THORNTON, Paul Andrew HAWORTH, John Edward KERWIN
  • Slit valve door seal
    Patent number: 7282097
    Abstract: Embodiments of the invention generally provide a slit valve door seal. In one embodiment, a slit valve door seal includes a ring-shaped base having a center axis and at least one finger extending from the base. The finger is oriented substantially parallel to the center axis, wherein the base and the finger define a single, one-piece seal member. The seal is particularly suitable for using in sealing substrate access passages formed in load lock chambers.
    Type: Grant
    Filed: June 14, 2004
    Date of Patent: October 16, 2007
    Assignee: Applied Materials, Inc.
    Inventors: Yoshiaki Tanase, William Norman Sterling, Paul Andrew Haworth