Patents by Inventor Paul Anthony Manfredi

Paul Anthony Manfredi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5785585
    Abstract: An apparatus for and method of conditioning a polishing pad suitable for in-situ use, is described. The apparatus consists of a wedge-shaped conditioning plate whose width varies as a function of its length and whose exact geometry is a function of the radial effects of the polishing process effecting conditioning of the polishing pad. The conditioning plate rests on the polishing pad and is surrounded by a loose-fitting frame that holds the conditioning plate stationary with respect to the rotating polishing table, preventing lateral movement of the conditioning plate, but allowing the plate to move in the vertical direction so that it can rest flat on the polishing pad.
    Type: Grant
    Filed: September 18, 1995
    Date of Patent: July 28, 1998
    Assignee: International Business Machines Corporation
    Inventors: Paul Anthony Manfredi, Richard Alan Bartley, Raymond George Morris, Timothy Scott Chamberlin