Patents by Inventor Paul Antonius Brom

Paul Antonius Brom has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby
    Publication number: 20060175558
    Abstract: A method for removal of deposition on a radiation collector of a lithographic apparatus includes providing a gas barrier to an end of a radiation collector, thereby providing a radiation collector enclosure volume; providing a gas to the enclosure volume, the gas selected from a halogen containing gas and a hydrogen containing gas; and removing at least part of the deposition from the radiation collector. A lithographic apparatus includes a radiation collector; a circumferential hull enclosing the radiation collector; a gas barrier at an end of the radiation collector, thereby providing a radiation collector enclosure volume. The radiation collector is enclosed by the circumferential hull and the gas barrier. An inlet provides a gas to the radiation collector enclosure volume and an outlet removes a gas from the radiation collector enclosure volume.
    Type: Application
    Filed: February 7, 2005
    Publication date: August 10, 2006
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Levinus Bakker, Vadim Banine, Johannes Josephina Moors, Carolus Ida Maria Spee, Johannes Leonardus Franken, Arnoud Wassink, Paul Antonius Brom