Patents by Inventor Paul Aponte

Paul Aponte has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • EXTENSION ELECTRODE OF PLASMA BEVEL ETCHING APPARATUS AND METHOD OF MANUFACTURE THEREOF
    Publication number: 20110206833
    Abstract: An extension electrode with enhanced durability and etching rate for plasma bevel etchers. The extension electrode comprises a plasma exposed truncated conical surface on an annular aluminum body. The aluminum body can roughened prior to anodization and coated with a ceramic material such as yttria.
    Type: Application
    Filed: February 11, 2011
    Publication date: August 25, 2011
    Applicant: Lam Research Corporation
    Inventors: Gregory Sexton, Paul Aponte