Patents by Inventor Paul B. Mirkanimi

Paul B. Mirkanimi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Mitigation of substrate defects in reflective reticles using sequential coating and annealing
    Patent number: 6489066
    Abstract: A buffer-layer to minimize the size of defects on a reticle substrate prior to deposition of a reflective coating on the substrate. The buffer-layer is formed by either a multilayer deposited on the substrate or by a plurality of sequentially deposited and annealed coatings deposited on the substrate. The plurality of sequentially deposited and annealed coating may comprise multilayer and single layer coatings. The multilayer deposited and annealed buffer layer coatings may be of the same or different material than the reflecting coating thereafter deposited on the buffer-layer.
    Type: Grant
    Filed: March 27, 2001
    Date of Patent: December 3, 2002
    Assignee: The Regents of the University of California
    Inventor: Paul B. Mirkanimi
  • Mitigation of substrate defects in reflective reticles using sequential coating and annealing
    Publication number: 20010019803
    Abstract: A buffer-layer to minimize the size of defects on a reticle substrate prior to deposition of a reflective coating on the substrate. The buffer-layer is formed by either a multilayer deposited on the substrate or by a plurality of sequentially deposited and annealed coatings deposited on the substrate. The plurality of sequentially deposited and annealed coating may comprise multilayer and single layer coatings. The multilayer deposited and annealed buffer layer coatings may be of the same or different material than the reflecting coating thereafter deposited on the buffer-layer.
    Type: Application
    Filed: March 27, 2001
    Publication date: September 6, 2001
    Applicant: The Regents of the University of California
    Inventor: Paul B. Mirkanimi