Abstract: The invention relates to a method for the operation of a multi-stage, dry compression vacuum pump (1) with an inlet (7) and an outlet (9), in which the aspirated gases contain gaseous components which endanger the operation of the vacuum pump; in order to render the gas components harmless it is proposed that the gases aspirated from the vacuum chamber (8) and flowing through the vacuum pump be carried through a reaction chamber (14) in which the components endangering the vacuum pump are chemically or physically treated at a pressure between the aspiration pressure and the outlet pressure of the vacuum pump.

Abstract: A filter cartridge for cleaning oil of an oil sealed vacuum pump which comprises a cartridge housing, the cartridge housing being releasably mounted to the vacuum pump; filter materials including at least two types of filters having different characteristics, the filter materials including the filters being disposed in the cartridge housing.

Abstract: Disclosed is a system for separating impurities from a hydrogen-free fluorinated lubricant. The lubricant is passed through a filter apparatus containing an adsorbing material. The lubricant is then passed into a degasser unit to remove volatile impurities from the lubricant. The degassing unit has an area of closed suction. A pressure measuring device measures the pressure in the closed area and, based on this measurement, a control apparatus controls the degassing unit. A monitoring unit monitors the quality of the filtered lubricant.

Abstract: A vacuum pump and trap combination in which the trap is configured in the manner of a siphon and comprises a tube immersed in trap liquid but having an opening lying above the trap liquid level. The tube has a wall section lying below the trap liquid level and having perforations therein to admit different amounts of trap liquid in relation to the rate of discharge gas flow, thereby preventing frothing of the trap liquid.