Abstract: A variety of systems, apparatus and methods for deflecting a particle beam are described. An apparatus comprises at least six electromagnetic portions disposed on a plane. Each of the at least six electromagnetic portions is aligned with a radius emanating from an axis normal to the plane and is distanced from the axis to form a volume about the axis. At least six coils are configured for affecting a dipole magnetic field in the volume in response to electrical currents applied to physically opposing coils where a particle beam entering the volume is deflected. Each of the at least six coils is disposed about a one of the at least six electromagnetic portions. A yoke structure is configured for returning a generated magnetic flux.

Abstract: Delivering a beam of charged particles includes providing the beam along a first trajectory to a linear array of magnets and energizing two or more of the magnets in the linear array to deflect the beam to a second trajectory, in which the second trajectory is substantially orthogonal to the first trajectory. The beam can be deflected to any position along a straight linear path.

Abstract: A method and apparatus for controlling ion beam scanning in an ion implanter is disclosed. Before an implant process is commenced, a scan waveform to create a uniform distribution along a magnetic scan axis is determined, using a travelling Faraday detector (24). Charge data from the travelling Faraday (24) is collected into a small, finite number of channels and this is used to create a histogram of collected charge vs. beam crossing time. This is in turn used to correct a target scan velocity to compensate for any dose non-uniformity. The target scan velocity is used as a first input to a fast feedback loop. A second input is obtained by digitizing the output of an inductive pickup in the magnet of the magnetic scanner in the ion implanter. Each input is separately integrated and Fast Fourier Transformed Error coefficients Ferror are obtained by dividing. Fourier coefficients from the target scan velocity by Fourier coefficients from the inductive pickup signal.

Abstract: A method and apparatus for generating an accurate, table phase shift (b) in a sinusoidal signal employs fast analog multiplication to implement the trigonometric relationship sin(&ohgr;t+b)=sin(&ohgr;t)cos(b)+cos(&ohgr;t)sin(b). Cos (&ohgr;t) is generated by accurately shifting a signal sin(&ohgr;t) through 90° using a delay line, for example. Sin(b) and cos(b) are dc signals generated by digital to analogue conversion, using a demanded phase shift (b) whose sine and cosine are obtained from look-up tables. A controller for controlling a phase shift in an rf cavity is also disclosed and operates on the basis of the same trigonometrical principle. The amplitude of the signals in the rf cavity is also controllable; fast analogue multipliers are again employed to scale the signal amplitude to a nominal fixed value such as 1 volt.

Abstract: An apparatus and method for determining motility and other characteristics of cells in a fluid medium employing both the scattering and transmission of light through that medium and the absorption of shorter wavelength light by the cell with subsequent emission of fluorescent light. Both forms of light are imaged on an image detection apparatus, the output of which is analyzed as a function of time to produce the information concerning the characteristics of the cell.

Abstract: A motility scanner and method are disclosed for characterizing the motion of sperm, bacteria, particles suspended in flowing fluids and the like. The motility scanner preferably is mounted as a portable unit in a container and includes an optical system, a source of illumination for the system, a heated specimen support disposed in the system, ratiation sensing means coupled to the system, signal processing means for analyzing signals generated by the radiation sensing means, and a front panel disposed on the container and featuring an output screen, a printer and controls required for operating the motility detector, including a power switch. A disposable specimen holder of unique design allows external loading thereof and its positioning on the heated specimen support. The source of illumination can be a conventional filament lamp or one or more LED's. Power for the motility scanner can be self contained by incorporating a battery pack within the container or it can be derived from a conventional 110 V.A.C.

Abstract: An improved motility scanner is disclosed for characterizing the motion of sperm, bacteria, particles suspended in flowing fluids and the like. The motility scanner includes an improved optical system, a source of illumination for the system and radiation sensing means including electronic image reversal means coupled to the system. A disposable specimen holder allows external loading thereof and its positioning on a heated specimen support. The illumination source functions as a collimator in directing all of the emanating illumination onto the specimen. Both directly transmitted light and light scattered by the specimen are received by an imaging lens and are both focussed thereby onto pixels of a light sensitive device. A movable plate provided with a retarding member is designed to be located at the plane conjugate to the plane of the small source aperature. The directly transmitted light is transmitted through the retarding member and/or the attenuating member.